JPS64452A - Detection of foreign matter - Google Patents

Detection of foreign matter

Info

Publication number
JPS64452A
JPS64452A JP63135483A JP13548388A JPS64452A JP S64452 A JPS64452 A JP S64452A JP 63135483 A JP63135483 A JP 63135483A JP 13548388 A JP13548388 A JP 13548388A JP S64452 A JPS64452 A JP S64452A
Authority
JP
Japan
Prior art keywords
light
substrate
foreign matter
polarized light
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63135483A
Other languages
Japanese (ja)
Other versions
JPH05662B2 (en
JPH01452A (en
Inventor
Yukio Uto
Masataka Shiba
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63-135483A priority Critical patent/JPH01452A/en
Priority claimed from JP63-135483A external-priority patent/JPH01452A/en
Publication of JPS64452A publication Critical patent/JPS64452A/en
Publication of JPH01452A publication Critical patent/JPH01452A/en
Publication of JPH05662B2 publication Critical patent/JPH05662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To make detection more exactly by mounting a means for preventing deposition of foreign matter which is formed with a pellicle on a frame to a substrate, scanning the polarized light which is condensed and projected relatively on the substrate, condensing the light reflected from the foreign matter by a condensing optical system and converting the light to a signal. CONSTITUTION:The laser light 30 from a laser oscillator 27 is linearly polarized by a polarizing element 29 and the polarized light is reflected by a galvanomirror 28 connected to a motor 34 so as to arrive at a mirror 32 via an f.theta lens 31. The light 30 is entered at an angle alpha of inclination to the substrate 21 via mirrors 35a, 36a or mirrors 35b, 36b. Detecting devices 37a and 37b consisting of a detector 41a which detects the linearly polarized light, a condenser lens 40a, a slit-shaped light shielding device 39a, and a photoelectric converting element 38a are then disposed perpendicularly to the laser light 30a, 30b and at an angle beta of inclination with the substrate 21 to detect the foreign matter on the substrate 21. The polarized light 30 is, therefore, used and detector 41a, the device 39a, etc., are provided, by which the exact detection is executed with high sensitivity.
JP63-135483A 1988-06-03 Double-sided foreign object detection device Granted JPH01452A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63-135483A JPH01452A (en) 1988-06-03 Double-sided foreign object detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63-135483A JPH01452A (en) 1988-06-03 Double-sided foreign object detection device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57192462A Division JPS5982727A (en) 1982-11-04 1982-11-04 Foreign object detection method and device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3096770A Division JPH0816651B2 (en) 1991-04-26 1991-04-26 Double-sided foreign matter detection method and device

Publications (3)

Publication Number Publication Date
JPS64452A true JPS64452A (en) 1989-01-05
JPH01452A JPH01452A (en) 1989-01-05
JPH05662B2 JPH05662B2 (en) 1993-01-06

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192541A (en) * 2009-05-25 2009-08-27 Hitachi Ltd Defect inspection equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129582A (en) * 1976-04-23 1977-10-31 Hitachi Ltd Flaw detector
JPS5686340A (en) * 1979-12-17 1981-07-14 Hitachi Ltd Automatic detector for foreign matter
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Foreign object detection method and device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129582A (en) * 1976-04-23 1977-10-31 Hitachi Ltd Flaw detector
JPS5686340A (en) * 1979-12-17 1981-07-14 Hitachi Ltd Automatic detector for foreign matter
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS5982727A (en) * 1982-11-04 1984-05-12 Hitachi Ltd Foreign object detection method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192541A (en) * 2009-05-25 2009-08-27 Hitachi Ltd Defect inspection equipment

Also Published As

Publication number Publication date
JPH05662B2 (en) 1993-01-06

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