JPS64454A - Apparatus for inspecting shape of object - Google Patents

Apparatus for inspecting shape of object

Info

Publication number
JPS64454A
JPS64454A JP62178859A JP17885987A JPS64454A JP S64454 A JPS64454 A JP S64454A JP 62178859 A JP62178859 A JP 62178859A JP 17885987 A JP17885987 A JP 17885987A JP S64454 A JPS64454 A JP S64454A
Authority
JP
Japan
Prior art keywords
region
mirrors
lens
reflected light
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62178859A
Other languages
Japanese (ja)
Other versions
JPH01454A (en
Inventor
Giichi Kakigi
Koji Oka
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62-178859A priority Critical patent/JPH01454A/en
Priority claimed from JP62-178859A external-priority patent/JPH01454A/en
Publication of JPS64454A publication Critical patent/JPS64454A/en
Publication of JPH01454A publication Critical patent/JPH01454A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PURPOSE:To make detection of long regions at one time by projecting a linear light beam onto an object to be inspected, splitting the reflected light horizontally by a mirror optical system, arraying the split rays of the light respectively perpendicularly on a two-dimensional photodetector and imaging the same. CONSTITUTION:The detecting optical system is constituted, for example, by disposing the mirror system consisting of two pairs of mirrors 13, 14, 15, 16 between a detecting region R on the object to be inspected and a lens 12 for optical imaging to a two-dimensional CCD sensor 11. The region R is bisected horizontally by a center line. The reflected light from the region R1 is imaged by the mirrors 13, 14 via the lens 12 to the lower region 11a of the sensor 11 and the reflected light from the region R2 is imaged by the mirrors 15, 16 via the lens 12 to the upper region 11b of the sensor 11, respectively. The optically cut images of the regions R1, R2 are, therefore, arrayed vertically and are put into one detecting image so that twice larger region can be examined at one time.
JP62-178859A 1987-03-19 1987-07-20 Object shape inspection device Pending JPH01454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-178859A JPH01454A (en) 1987-03-19 1987-07-20 Object shape inspection device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6247187 1987-03-19
JP62-62471 1987-03-19
JP62-178859A JPH01454A (en) 1987-03-19 1987-07-20 Object shape inspection device

Publications (2)

Publication Number Publication Date
JPS64454A true JPS64454A (en) 1989-01-05
JPH01454A JPH01454A (en) 1989-01-05

Family

ID=

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (en) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd Superposition monitoring apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (en) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd Superposition monitoring apparatus and method

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