JPS64454A - Apparatus for inspecting shape of object - Google Patents

Apparatus for inspecting shape of object

Info

Publication number
JPS64454A
JPS64454A JP62178859A JP17885987A JPS64454A JP S64454 A JPS64454 A JP S64454A JP 62178859 A JP62178859 A JP 62178859A JP 17885987 A JP17885987 A JP 17885987A JP S64454 A JPS64454 A JP S64454A
Authority
JP
Japan
Prior art keywords
region
mirrors
lens
reflected light
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62178859A
Other languages
English (en)
Other versions
JPH01454A (ja
Inventor
Giichi Kakigi
Koji Oka
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62178859A priority Critical patent/JPS64454A/ja
Publication of JPH01454A publication Critical patent/JPH01454A/ja
Publication of JPS64454A publication Critical patent/JPS64454A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP62178859A 1987-03-19 1987-07-20 Apparatus for inspecting shape of object Pending JPS64454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178859A JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6247187 1987-03-19
JP62-62471 1987-03-19
JP62178859A JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Publications (2)

Publication Number Publication Date
JPH01454A JPH01454A (ja) 1989-01-05
JPS64454A true JPS64454A (en) 1989-01-05

Family

ID=26403509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178859A Pending JPS64454A (en) 1987-03-19 1987-07-20 Apparatus for inspecting shape of object

Country Status (1)

Country Link
JP (1) JPS64454A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (ja) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd 重畳監視装置及び方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008275577A (ja) * 2007-04-27 2008-11-13 King Yuan Electronics Co Ltd 重畳監視装置及び方法

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