JPS6445792A - Production of article coated with pyrolytic boron nitride - Google Patents
Production of article coated with pyrolytic boron nitrideInfo
- Publication number
- JPS6445792A JPS6445792A JP20082487A JP20082487A JPS6445792A JP S6445792 A JPS6445792 A JP S6445792A JP 20082487 A JP20082487 A JP 20082487A JP 20082487 A JP20082487 A JP 20082487A JP S6445792 A JPS6445792 A JP S6445792A
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- graphite
- graphite substrate
- thickness
- boron nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title abstract 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 8
- 229910002804 graphite Inorganic materials 0.000 abstract 8
- 239000010439 graphite Substances 0.000 abstract 8
- 239000011247 coating layer Substances 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 7
- 230000003746 surface roughness Effects 0.000 abstract 3
- 239000000853 adhesive Substances 0.000 abstract 2
- 230000001070 adhesive effect Effects 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052582 BN Inorganic materials 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- -1 boron halide Chemical class 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 230000002265 prevention Effects 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To contrive prevention of a coating layer from cracking or peeling by repeated heating cooling, by specifying bulk density and surface roughness of a graphite substrate and thickness of the coating layer in producing the titled article using graphite as the substrate. CONSTITUTION:The surface of a graphite substrate is coated with boron nitride by a chemical vapor pyrolytic method using a boron halide gas and ammonia gas as raw materials. In the process, a graphite substrate having 1.70-1.95g/cm<3> bulk density and >=10mu surface roughness (Rmax) is used as the graphite substrate and the thickness of the pyrolytic boron nitride coating layer is 10-300mu. In this case, if the bulk density of the graphite substrate is beyond the afore- mentioned range, adhesive force of the above-mentioned coating layer to the graphite substrate is reduced to <2.0MPa. If the surface roughness if <10mu, the adhesive force cannot be increased to >=2.0MPa, possibly resulting in natural peeling. Furthermore, the thickness of the afore-mentioned coating layer is <10mu, the graphite readily diffuses through the coating layer to emerge into the outside and reduce resistance to heating.cooling cycle. On the other hand, if the thickness exceeds 300mu, residual stress in the coating layer is increased to readily cause natural peeling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20082487A JPH0798708B2 (en) | 1987-08-13 | 1987-08-13 | Method for producing pyrolytic boron nitride coated article |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20082487A JPH0798708B2 (en) | 1987-08-13 | 1987-08-13 | Method for producing pyrolytic boron nitride coated article |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6445792A true JPS6445792A (en) | 1989-02-20 |
| JPH0798708B2 JPH0798708B2 (en) | 1995-10-25 |
Family
ID=16430815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20082487A Expired - Lifetime JPH0798708B2 (en) | 1987-08-13 | 1987-08-13 | Method for producing pyrolytic boron nitride coated article |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0798708B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05270925A (en) * | 1992-03-23 | 1993-10-19 | Ngk Insulators Ltd | Refractory material for ceramic burning |
| US5293032A (en) * | 1992-02-10 | 1994-03-08 | Sydney Urshan | Digital data optical recording and playback system |
| US5319182A (en) * | 1992-03-04 | 1994-06-07 | Welch Allyn, Inc. | Integrated solid state light emitting and detecting array and apparatus employing said array |
| AU745467B2 (en) * | 1998-03-31 | 2002-03-21 | Takara Bio Inc. | Process for producing lysosphingolipids |
| JP2011507795A (en) * | 2007-12-31 | 2011-03-10 | モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド | Low thermal conductivity low density pyrolytic boron nitride material, manufacturing method and article manufactured therefrom |
| CN111945129A (en) * | 2020-07-22 | 2020-11-17 | 山东国晶新材料有限公司 | Protection method for graphite component of vacuum furnace |
-
1987
- 1987-08-13 JP JP20082487A patent/JPH0798708B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5293032A (en) * | 1992-02-10 | 1994-03-08 | Sydney Urshan | Digital data optical recording and playback system |
| US5319182A (en) * | 1992-03-04 | 1994-06-07 | Welch Allyn, Inc. | Integrated solid state light emitting and detecting array and apparatus employing said array |
| JPH05270925A (en) * | 1992-03-23 | 1993-10-19 | Ngk Insulators Ltd | Refractory material for ceramic burning |
| AU745467B2 (en) * | 1998-03-31 | 2002-03-21 | Takara Bio Inc. | Process for producing lysosphingolipids |
| JP2011507795A (en) * | 2007-12-31 | 2011-03-10 | モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド | Low thermal conductivity low density pyrolytic boron nitride material, manufacturing method and article manufactured therefrom |
| CN111945129A (en) * | 2020-07-22 | 2020-11-17 | 山东国晶新材料有限公司 | Protection method for graphite component of vacuum furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0798708B2 (en) | 1995-10-25 |
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