JPS6448023U - - Google Patents
Info
- Publication number
- JPS6448023U JPS6448023U JP1987145057U JP14505787U JPS6448023U JP S6448023 U JPS6448023 U JP S6448023U JP 1987145057 U JP1987145057 U JP 1987145057U JP 14505787 U JP14505787 U JP 14505787U JP S6448023 U JPS6448023 U JP S6448023U
- Authority
- JP
- Japan
- Prior art keywords
- furnace mouth
- mouth portion
- vertical device
- insulating material
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案炉口部の一実施例を示す断面図
、第２図は従来炉口部の一例を示す断面図である
。
１……縦型管状ヒータ、２……ヒータベース、
３……均熱管、４……反応管、５，６……断熱材
、７……受けフランジ、８……防塵カバー。
FIG. 1 is a cross-sectional view showing an embodiment of the furnace mouth according to the present invention, and FIG. 2 is a cross-sectional view showing an example of the conventional furnace mouth. 1... Vertical tubular heater, 2... Heater base,
3... Soaking tube, 4... Reaction tube, 5, 6... Heat insulating material, 7... Receiving flange, 8... Dust cover.
Claims (1)
熱材５の内面に、防塵カバー８を取付けてなる縦
型装置の炉口部。 A furnace mouth portion of a vertical device, in which a dustproof cover 8 is attached to the inner surface of a heat insulating material 5 that supports a soaking tube 3 at the furnace mouth portion of the vertical device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145057U JPS6448023U (en) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145057U JPS6448023U (en) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448023U true JPS6448023U (en) | 1989-03-24 |
Family
ID=31413313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987145057U Pending JPS6448023U (en) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448023U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257219A (en) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | Vertical treatment apparatus |
-
1987
- 1987-09-21 JP JP1987145057U patent/JPS6448023U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63257219A (en) * | 1987-04-15 | 1988-10-25 | Hitachi Ltd | Vertical treatment apparatus |