JPS6448023U - - Google Patents

Info

Publication number
JPS6448023U
JPS6448023U JP14505787U JP14505787U JPS6448023U JP S6448023 U JPS6448023 U JP S6448023U JP 14505787 U JP14505787 U JP 14505787U JP 14505787 U JP14505787 U JP 14505787U JP S6448023 U JPS6448023 U JP S6448023U
Authority
JP
Japan
Prior art keywords
furnace mouth
mouth portion
vertical device
insulating material
heat insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14505787U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14505787U priority Critical patent/JPS6448023U/ja
Publication of JPS6448023U publication Critical patent/JPS6448023U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第1図は本考案炉口部の一実施例を示す断面図
、第2図は従来炉口部の一例を示す断面図である
。 1……縦型管状ヒータ、2……ヒータベース、
3……均熱管、4……反応管、5,6……断熱材
、7……受けフランジ、8……防塵カバー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 縦型装置の炉口部において均熱管3を支える断
    熱材5の内面に、防塵カバー8を取付けてなる縦
    型装置の炉口部。
JP14505787U 1987-09-21 1987-09-21 Pending JPS6448023U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14505787U JPS6448023U (ja) 1987-09-21 1987-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14505787U JPS6448023U (ja) 1987-09-21 1987-09-21

Publications (1)

Publication Number Publication Date
JPS6448023U true JPS6448023U (ja) 1989-03-24

Family

ID=31413313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14505787U Pending JPS6448023U (ja) 1987-09-21 1987-09-21

Country Status (1)

Country Link
JP (1) JPS6448023U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257219A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63257219A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 縦型処理装置

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