JPS645081A - Manufacture of thin film superconducting element - Google Patents

Manufacture of thin film superconducting element

Info

Publication number
JPS645081A
JPS645081A JP62159977A JP15997787A JPS645081A JP S645081 A JPS645081 A JP S645081A JP 62159977 A JP62159977 A JP 62159977A JP 15997787 A JP15997787 A JP 15997787A JP S645081 A JPS645081 A JP S645081A
Authority
JP
Japan
Prior art keywords
plasma
ion source
thin film
superconducting element
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62159977A
Other languages
Japanese (ja)
Other versions
JPH081970B2 (en
Inventor
Takeshi Kamata
Kentaro Setsune
Takashi Hirao
Kiyotaka Wasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62159977A priority Critical patent/JPH081970B2/en
Publication of JPS645081A publication Critical patent/JPS645081A/en
Publication of JPH081970B2 publication Critical patent/JPH081970B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To facilitate manufacturing of a highly accurate thin film superconducting element by a method wherein hydrogen ions are applied to a superconductor film made of composite compound to form a weakly coupled part and the superconductor film is divided into two regions. CONSTITUTION:Hydrogen gas is introduced into an ion source 6 and a radio frequency signal is applied between electrodes 7 and 8 facing each other with the hydrogen gas between to generate a plasma. A magnetic field generating source 9 for forming a magnetic field in the plasma is provided and the effectively generated hydrogen ions are drawn out of the ion source and applied to a partially masked composite compound superconductor film formed on a substrate 10 by applying a voltage between a substrate table and the plasma in the ion source. The hydrogen ion are applied to the part without the mask to form a weakly coupled part.
JP62159977A 1987-06-26 1987-06-26 Method for manufacturing thin film superconducting device Expired - Fee Related JPH081970B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62159977A JPH081970B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin film superconducting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62159977A JPH081970B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin film superconducting device

Publications (2)

Publication Number Publication Date
JPS645081A true JPS645081A (en) 1989-01-10
JPH081970B2 JPH081970B2 (en) 1996-01-10

Family

ID=15705307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62159977A Expired - Fee Related JPH081970B2 (en) 1987-06-26 1987-06-26 Method for manufacturing thin film superconducting device

Country Status (1)

Country Link
JP (1) JPH081970B2 (en)

Also Published As

Publication number Publication date
JPH081970B2 (en) 1996-01-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees