JPS6450932A - Minute-scratch hardness measuring machine - Google Patents

Minute-scratch hardness measuring machine

Info

Publication number
JPS6450932A
JPS6450932A JP20870987A JP20870987A JPS6450932A JP S6450932 A JPS6450932 A JP S6450932A JP 20870987 A JP20870987 A JP 20870987A JP 20870987 A JP20870987 A JP 20870987A JP S6450932 A JPS6450932 A JP S6450932A
Authority
JP
Japan
Prior art keywords
sample
probe
driving device
parallel
presser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20870987A
Other languages
Japanese (ja)
Inventor
Masahiro Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP20870987A priority Critical patent/JPS6450932A/en
Publication of JPS6450932A publication Critical patent/JPS6450932A/en
Pending legal-status Critical Current

Links

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  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

PURPOSE:To continuously measure the scratch hardness of a sample thin film with high accuracy, by pressing a presser into the sample by a presser driving device and then moving the presser driving device in parallel to the surface of the sample. CONSTITUTION:After a sample 1 is placed onto a receiver plate 3 of an electronic scale 2, a diamond probe 4 is moved closer to the surface of the sample 1 by a piezoelectric actuator 5. When the probe 4 is in touch with the surface of the sample 1 and the load is detected, at that time, the probe 4 is stopped moving. Thereafter, the probe 4 is moved parallel with the surface of the sample by a parallel driving device 6. Simultaneously with this, the actuator 5 is driven by a personal computer 10 to continuously add the load to the probe 4. And the light passing through an optical fiber 9 from a light reflection type displacement measuring device 8 is reflected onto a mirror 7, so that the depth of a scratch on the surface of the sample is measured with high accuracy by the measuring device 8.
JP20870987A 1987-08-21 1987-08-21 Minute-scratch hardness measuring machine Pending JPS6450932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20870987A JPS6450932A (en) 1987-08-21 1987-08-21 Minute-scratch hardness measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20870987A JPS6450932A (en) 1987-08-21 1987-08-21 Minute-scratch hardness measuring machine

Publications (1)

Publication Number Publication Date
JPS6450932A true JPS6450932A (en) 1989-02-27

Family

ID=16560781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20870987A Pending JPS6450932A (en) 1987-08-21 1987-08-21 Minute-scratch hardness measuring machine

Country Status (1)

Country Link
JP (1) JPS6450932A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897495A (en) * 2015-06-17 2015-09-09 上海工程技术大学 Scratch hardness test method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5728358A (en) * 1980-07-29 1982-02-16 Nec Kyushu Ltd Semiconductor device
JPS6091237A (en) * 1983-10-26 1985-05-22 Hitachi Ltd Thin film hardness test method and device
JPS61193047A (en) * 1985-02-22 1986-08-27 Nec Corp Microhardness measuring instrument

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5728358A (en) * 1980-07-29 1982-02-16 Nec Kyushu Ltd Semiconductor device
JPS6091237A (en) * 1983-10-26 1985-05-22 Hitachi Ltd Thin film hardness test method and device
JPS61193047A (en) * 1985-02-22 1986-08-27 Nec Corp Microhardness measuring instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104897495A (en) * 2015-06-17 2015-09-09 上海工程技术大学 Scratch hardness test method

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