JPS645105U - - Google Patents

Info

Publication number
JPS645105U
JPS645105U JP9841487U JP9841487U JPS645105U JP S645105 U JPS645105 U JP S645105U JP 9841487 U JP9841487 U JP 9841487U JP 9841487 U JP9841487 U JP 9841487U JP S645105 U JPS645105 U JP S645105U
Authority
JP
Japan
Prior art keywords
measuring device
thickness measuring
film
film thickness
pencil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9841487U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9841487U priority Critical patent/JPS645105U/ja
Publication of JPS645105U publication Critical patent/JPS645105U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係る膜厚測定装置の概略斜視
図であり、第２図はその概略回路図である。第３
図は本考案に係る膜厚測定装置の要部拡大斜視図
である。第４図は従来例の膜厚測定装置の概略斜
視図であり、第５図はその概略回路図である。 １……膜厚測定装置、２……四探針、３……ペ
ンシル状支持体、４……先端部、５……電池、６
……可変抵抗、７……テスター、１２……金属薄
膜、１３……ウエハー。 FIG. 1 is a schematic perspective view of a film thickness measuring device according to the present invention, and FIG. 2 is a schematic circuit diagram thereof. Third
The figure is an enlarged perspective view of the main parts of the film thickness measuring device according to the present invention. FIG. 4 is a schematic perspective view of a conventional film thickness measuring device, and FIG. 5 is a schematic circuit diagram thereof. DESCRIPTION OF SYMBOLS 1... Film thickness measuring device, 2... Four probes, 3... Pencil-shaped support, 4... Tip, 5... Battery, 6
...Variable resistor, 7...Tester, 12...Metal thin film, 13...Wafer.

Claims (1)

【実用新案登録請求の範囲】 四探針法を用いる膜厚測定装置において、 四探針がペンシル状支持体の先端部に配設され
てなり、且つ可撓性を有することを特徴とする膜
厚測定装置。[Claims for Utility Model Registration] A film thickness measuring device using a four-probe method, characterized in that four probes are disposed at the tip of a pencil-shaped support, and the film is flexible. Thickness measuring device.
JP9841487U 1987-06-29 1987-06-29 Pending JPS645105U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9841487U JPS645105U (en) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9841487U JPS645105U (en) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645105U true JPS645105U (en) 1989-01-12

Family

ID=31324654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9841487U Pending JPS645105U (en) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645105U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025073097A (en) * 2023-10-25 2025-05-12 ウィズメムズ カンパニー リミテッド Probe card for probing electrical characteristics of a test object and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025073097A (en) * 2023-10-25 2025-05-12 ウィズメムズ カンパニー リミテッド Probe card for probing electrical characteristics of a test object and method for manufacturing the same

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