JPS6453494U - - Google Patents
Info
- Publication number
- JPS6453494U JPS6453494U JP14983287U JP14983287U JPS6453494U JP S6453494 U JPS6453494 U JP S6453494U JP 14983287 U JP14983287 U JP 14983287U JP 14983287 U JP14983287 U JP 14983287U JP S6453494 U JPS6453494 U JP S6453494U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic bearing
- rotor shaft
- turbomolecular pump
- signal
- bearing type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14983287U JPS6453494U (2) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14983287U JPS6453494U (2) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453494U true JPS6453494U (2) | 1989-04-03 |
Family
ID=31422422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14983287U Pending JPS6453494U (2) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453494U (2) |
-
1987
- 1987-09-30 JP JP14983287U patent/JPS6453494U/ja active Pending
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