JPS6453968U - - Google Patents

Info

Publication number
JPS6453968U
JPS6453968U JP14823987U JP14823987U JPS6453968U JP S6453968 U JPS6453968 U JP S6453968U JP 14823987 U JP14823987 U JP 14823987U JP 14823987 U JP14823987 U JP 14823987U JP S6453968 U JPS6453968 U JP S6453968U
Authority
JP
Japan
Prior art keywords
contact member
probe
view
fixed
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14823987U
Other languages
English (en)
Other versions
JPH065640Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987148239U priority Critical patent/JPH065640Y2/ja
Publication of JPS6453968U publication Critical patent/JPS6453968U/ja
Application granted granted Critical
Publication of JPH065640Y2 publication Critical patent/JPH065640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Description

【図面の簡単な説明】
第１図ａ，ｂは、それぞれ本考案の第１実施例
である低周波用または電源用プローブの側面図及
び下面図、第２図は同第２実施例の側面図、第３
図ａ，ｂ，ｃは、それぞれ本考案の第３実施例で
あるコープレナー方式の信号用プローブを示す側
面図、下面図及び先端正面図、第４図ａ，ｂ，ｃ
は、それぞれ本考案の第４実施例であるサスペン
デツド方式の信号用プローブを示す側面図、下面
図及び先端正面図、第５図ａ，ｂは本考案の第５
実施例であるマイクロストリツプ方式の信号用プ
ローブを示す側面図及び下面図、第６図及び第７
図はそれぞれ従来のプローブにおける接点部の構
造を示す側面図である。 １０…低周波用又は電源用プローブ、３０…コ
ープレナー方式の信号用プローブ、４０…サスペ
ンデツド方式の信号用プローブ、５０…マイクロ
ストリツプ方式の信号用プローブ、１１，３１，
４１，５１…板状誘電体、１１ｂ，３１ｂ…板状
誘電体１１，３１の端面、１１ｃ，４１ｃ，５１
ｃ…板状誘電体１１，４１，５１の上面、１２，
３２，４２，５２…膜状導体、１３，２３，３３
，４３，５３…接点部材としての金ワイヤ、１３
ａ，２３ａ，３３ａ，４３ａ，５３ａ…金ワイヤ
の一端、１３ｂ，２３ｂ，３３ｂ，４３ｂ，５３
ｂ…金ワイヤの他端。

Claims (1)

    【実用新案登録請求の範囲】
  1. 板状誘電体の表面に膜状導体を形成したプロー
    ブにおいて、前記膜状導体に接点部材の一端を固
    定して電気的に導通させ、前記接点部材の一端が
    固定された板状誘電体の一面以外の面に前記接点
    部材の他端を固定したことを特徴とするプローブ
    の接点構造。
JP1987148239U 1987-09-30 1987-09-30 プローブの接点構造 Expired - Lifetime JPH065640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987148239U JPH065640Y2 (ja) 1987-09-30 1987-09-30 プローブの接点構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987148239U JPH065640Y2 (ja) 1987-09-30 1987-09-30 プローブの接点構造

Publications (2)

Publication Number Publication Date
JPS6453968U true JPS6453968U (ja) 1989-04-03
JPH065640Y2 JPH065640Y2 (ja) 1994-02-09

Family

ID=31419376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987148239U Expired - Lifetime JPH065640Y2 (ja) 1987-09-30 1987-09-30 プローブの接点構造

Country Status (1)

Country Link
JP (1) JPH065640Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117765U (ja) * 1990-03-19 1991-12-05
JPH03117766U (ja) * 1990-03-19 1991-12-05
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62186542A (ja) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62186542A (ja) * 1986-02-12 1987-08-14 Tanaka Kikinzoku Kogyo Kk 半導体ウエ−ハの電気的特性測定用プロ−ブ針

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117765U (ja) * 1990-03-19 1991-12-05
JPH03117766U (ja) * 1990-03-19 1991-12-05
JP2001337108A (ja) * 2000-05-29 2001-12-07 Tokai Rika Co Ltd 加速度スイッチ

Also Published As

Publication number Publication date
JPH065640Y2 (ja) 1994-02-09

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