JPH0459144U - - Google Patents
Info
- Publication number
- JPH0459144U JPH0459144U JP10104490U JP10104490U JPH0459144U JP H0459144 U JPH0459144 U JP H0459144U JP 10104490 U JP10104490 U JP 10104490U JP 10104490 U JP10104490 U JP 10104490U JP H0459144 U JPH0459144 U JP H0459144U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped conductor
- contact
- measured
- probe head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案によるプローブヘツドの一実施
例を示す側面図、第２図は同プローブヘツドの平
面図、第３図ａ，ｂは従来のプローブヘツドの一
構成例を示す図である。 １ａ……第１の板状導体、１ｂ……第２の板状
導体、３……第１の接点、４……第２の接点、Ｗ
……被測定物（半導体ウエーハ）。
例を示す側面図、第２図は同プローブヘツドの平
面図、第３図ａ，ｂは従来のプローブヘツドの一
構成例を示す図である。 １ａ……第１の板状導体、１ｂ……第２の板状
導体、３……第１の接点、４……第２の接点、Ｗ
……被測定物（半導体ウエーハ）。
Claims (1)
- 被測定物Ｗと接離する第１の接点３を有する第
１の板状導体１ａと、前記被測定物の鉛直方向に
前記第１の板状導体と並ぶように縦列配置された
第２の板状導体１ｂと、前記第１の板状導体ある
いは第２の板状導体の何れかに接触して設けられ
た第２の接点４とを備えたことを特徴とするプロ
ーブヘツド。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101044U JP2531042Y2 (ja) | 1990-09-28 | 1990-09-28 | プローブヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990101044U JP2531042Y2 (ja) | 1990-09-28 | 1990-09-28 | プローブヘッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459144U true JPH0459144U (ja) | 1992-05-21 |
| JP2531042Y2 JP2531042Y2 (ja) | 1997-04-02 |
Family
ID=31844168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990101044U Expired - Lifetime JP2531042Y2 (ja) | 1990-09-28 | 1990-09-28 | プローブヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2531042Y2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102037657B1 (ko) * | 2018-09-05 | 2019-10-29 | 주식회사 아이에스시 | 전기적 검사용 프로브 카드 및 프로브 카드의 프로브 헤드 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (ja) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (ja) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (ja) * | 1986-12-16 | 1988-06-24 | Nec Corp | プロ−ブカ−ド |
| JPH01124576U (ja) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (ja) * | 1988-06-13 | 1990-01-05 |
-
1990
- 1990-09-28 JP JP1990101044U patent/JP2531042Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098282A (ja) * | 1973-12-26 | 1975-08-05 | ||
| JPS52113773U (ja) * | 1977-03-10 | 1977-08-29 | ||
| JPS63152141A (ja) * | 1986-12-16 | 1988-06-24 | Nec Corp | プロ−ブカ−ド |
| JPH01124576U (ja) * | 1988-02-16 | 1989-08-24 | ||
| JPH02663U (ja) * | 1988-06-13 | 1990-01-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2531042Y2 (ja) | 1997-04-02 |