JPS645434U - - Google Patents
Info
- Publication number
- JPS645434U JPS645434U JP1987098526U JP9852687U JPS645434U JP S645434 U JPS645434 U JP S645434U JP 1987098526 U JP1987098526 U JP 1987098526U JP 9852687 U JP9852687 U JP 9852687U JP S645434 U JPS645434 U JP S645434U
- Authority
- JP
- Japan
- Prior art keywords
- support plate
- ray
- exposure mask
- window
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098526U JPH0530347Y2 ( ) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987098526U JPH0530347Y2 ( ) | 1987-06-29 | 1987-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS645434U true JPS645434U ( ) | 1989-01-12 |
| JPH0530347Y2 JPH0530347Y2 ( ) | 1993-08-03 |
Family
ID=31324878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987098526U Expired - Lifetime JPH0530347Y2 ( ) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530347Y2 ( ) |
-
1987
- 1987-06-29 JP JP1987098526U patent/JPH0530347Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530347Y2 ( ) | 1993-08-03 |