JPS6456432U - - Google Patents

Info

Publication number
JPS6456432U
JPS6456432U JP15152887U JP15152887U JPS6456432U JP S6456432 U JPS6456432 U JP S6456432U JP 15152887 U JP15152887 U JP 15152887U JP 15152887 U JP15152887 U JP 15152887U JP S6456432 U JPS6456432 U JP S6456432U
Authority
JP
Japan
Prior art keywords
wafer
belt
belts
sets
pulleys
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15152887U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15152887U priority Critical patent/JPS6456432U/ja
Publication of JPS6456432U publication Critical patent/JPS6456432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例に係るウエハ用搬送
装置の斜視図、第２図は第１図のウエハ用搬送装
置に使用するベルトを示す斜視図、第３図は他の
実施例に係るウエハ用搬送装置に使用するベルト
を示す斜視図である。また第４図及び第５図は従
来のウエハ用搬送装置を示す斜視図である。 １，９：タイミングベルト、２，３：プーリ、
４：平ベルト、５：モータ、６，１１：平坦部、
７，１２：突出部、８，１０：溝、２０：ウエハ
。

Claims (1)

  1. 【実用新案登録請求の範囲】 ウエハを股がせて載せる２本のベルトと、これ
    ら２本のベルトを平行に巻掛けた２組のプーリと
    、これらの２組のプーリを駆動しベルト上のウエ
    ハを搬送するモータとを備え、 上記ベルトは、幅広の平坦な帯形状を有し、且
    つ該平坦部の略中央にウエハ載置用の突出部を備
    えたタイミングベルトであることを特徴とするウ
    エハ用搬送装置。
JP15152887U 1987-10-02 1987-10-02 Pending JPS6456432U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15152887U JPS6456432U (ja) 1987-10-02 1987-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15152887U JPS6456432U (ja) 1987-10-02 1987-10-02

Publications (1)

Publication Number Publication Date
JPS6456432U true JPS6456432U (ja) 1989-04-07

Family

ID=31425653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15152887U Pending JPS6456432U (ja) 1987-10-02 1987-10-02

Country Status (1)

Country Link
JP (1) JPS6456432U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100392444B1 (ko) * 1998-07-16 2003-07-23 슈말레-홀딩 게엠베하 운트 코 평형 제품을 이송하기 위한 장치 및 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100392444B1 (ko) * 1998-07-16 2003-07-23 슈말레-홀딩 게엠베하 운트 코 평형 제품을 이송하기 위한 장치 및 방법

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