JPS6464232A - Conveyor - Google Patents

Conveyor

Info

Publication number
JPS6464232A
JPS6464232A JP21911287A JP21911287A JPS6464232A JP S6464232 A JPS6464232 A JP S6464232A JP 21911287 A JP21911287 A JP 21911287A JP 21911287 A JP21911287 A JP 21911287A JP S6464232 A JPS6464232 A JP S6464232A
Authority
JP
Japan
Prior art keywords
locus
knot
arm
link
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21911287A
Other languages
English (en)
Inventor
Hiroshi Yamada
Toshiharu Hiwatari
Hiroshi Iimori
Akira Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21911287A priority Critical patent/JPS6464232A/ja
Publication of JPS6464232A publication Critical patent/JPS6464232A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP21911287A 1987-09-03 1987-09-03 Conveyor Pending JPS6464232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21911287A JPS6464232A (en) 1987-09-03 1987-09-03 Conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21911287A JPS6464232A (en) 1987-09-03 1987-09-03 Conveyor

Publications (1)

Publication Number Publication Date
JPS6464232A true JPS6464232A (en) 1989-03-10

Family

ID=16730437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21911287A Pending JPS6464232A (en) 1987-09-03 1987-09-03 Conveyor

Country Status (1)

Country Link
JP (1) JPS6464232A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5588789A (en) * 1995-07-06 1996-12-31 Brooks Automation Load arm for load lock
US5658123A (en) * 1995-09-15 1997-08-19 Advanced Micro Devices, Inc. Container-less transfer of semiconductor wafers through a barrier between fabrication areas
US5908281A (en) * 1996-09-20 1999-06-01 Brooks Automation Inc. Coaxial drive loader arm
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
US6663333B2 (en) * 2001-07-13 2003-12-16 Axcelis Technologies, Inc. Wafer transport apparatus
US7092779B1 (en) 1997-06-19 2006-08-15 Conboy Michael R Automated material handling system for a manufacturing facility divided into separate fabrication areas
WO2008136292A1 (ja) * 2007-04-27 2008-11-13 Nabtesco Corporation ロボットアーム
JP2017513036A (ja) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5588789A (en) * 1995-07-06 1996-12-31 Brooks Automation Load arm for load lock
WO1997002195A1 (en) * 1995-07-06 1997-01-23 Brooks Automation, Inc. Load arm for load lock
EP0836577A4 (en) * 1995-07-06 2006-07-19 Brooks Automation Inc Load arm for load lock
US5658123A (en) * 1995-09-15 1997-08-19 Advanced Micro Devices, Inc. Container-less transfer of semiconductor wafers through a barrier between fabrication areas
US5908281A (en) * 1996-09-20 1999-06-01 Brooks Automation Inc. Coaxial drive loader arm
US7092779B1 (en) 1997-06-19 2006-08-15 Conboy Michael R Automated material handling system for a manufacturing facility divided into separate fabrication areas
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
US6663333B2 (en) * 2001-07-13 2003-12-16 Axcelis Technologies, Inc. Wafer transport apparatus
WO2008136292A1 (ja) * 2007-04-27 2008-11-13 Nabtesco Corporation ロボットアーム
US8677853B2 (en) 2007-04-27 2014-03-25 Nabtesco Corporation Robot arm with temperature compensation
JP2017513036A (ja) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法
US10087019B2 (en) 2014-11-14 2018-10-02 Mapper Lithography Ip B.V. Load lock system and method for transferring substrates in a lithography system

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