JPS6464360A - Gto thyristor - Google Patents
Gto thyristorInfo
- Publication number
- JPS6464360A JPS6464360A JP22042187A JP22042187A JPS6464360A JP S6464360 A JPS6464360 A JP S6464360A JP 22042187 A JP22042187 A JP 22042187A JP 22042187 A JP22042187 A JP 22042187A JP S6464360 A JPS6464360 A JP S6464360A
- Authority
- JP
- Japan
- Prior art keywords
- etched
- segment
- gate
- parts
- cathode segment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thyristors (AREA)
Abstract
PURPOSE:To improve a gate part and a cathode segment part by a method wherein the gate part surrounding a curvature part of the cathode segment is etched to be deeper than other parts. CONSTITUTION:This is constituted by a cathode segment part 10, a gate part 11 and deep etched parts 12 and 13. For example, an n-emitter layer 3 is formed; after that, the parts 12 and 13 to be etched deep are first etched; then, the gate part is etched. Because the curvature parts 12 and 13 of the cathode segment part are etched two times, they are etched deeper than a part coming into contact with a straight part of the cathode segment. Accordingly, an irregularity in a gate impedance value due to a shape of the segment part is prevented; a whole GTO segment can be turned off uniformly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22042187A JPS6464360A (en) | 1987-09-04 | 1987-09-04 | Gto thyristor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22042187A JPS6464360A (en) | 1987-09-04 | 1987-09-04 | Gto thyristor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6464360A true JPS6464360A (en) | 1989-03-10 |
Family
ID=16750843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22042187A Pending JPS6464360A (en) | 1987-09-04 | 1987-09-04 | Gto thyristor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6464360A (en) |
-
1987
- 1987-09-04 JP JP22042187A patent/JPS6464360A/en active Pending
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