JPS646535U - - Google Patents
Info
- Publication number
- JPS646535U JPS646535U JP10194587U JP10194587U JPS646535U JP S646535 U JPS646535 U JP S646535U JP 10194587 U JP10194587 U JP 10194587U JP 10194587 U JP10194587 U JP 10194587U JP S646535 U JPS646535 U JP S646535U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- vacuum
- vacuum gauge
- container
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の真空計を示すシステム構成図
、第２図は第１図に示す容器及び圧電素子の変形
例を示す図、第３図は従来の電離真空計を示す図
、第４図は従来のキヤパシタンス式絶対圧真空計
を示す図である。
１，７……容器、１ａ……開口、２，８……圧
電素子、６……表示部、１００……電離真空計、
１１０……キヤパシタンス式絶対圧真空計。
FIG. 1 is a system configuration diagram showing the vacuum gauge of the present invention, FIG. 2 is a diagram showing a modification of the container and piezoelectric element shown in FIG. 1, FIG. 3 is a diagram showing a conventional ionization vacuum gauge, and FIG. The figure shows a conventional capacitance type absolute pressure vacuum gauge. 1, 7... Container, 1a... Opening, 2, 8... Piezoelectric element, 6... Display section, 100... Ionization vacuum gauge,
110...Capacitance type absolute pressure vacuum gauge.
Claims (1)
、この圧電素子に加わる空気圧の変化に応じて出
力する圧電電圧に基づいて真空度を算出するよう
にしたことを特徴とする真空計。 A vacuum gauge characterized in that a piezoelectric element is fixed in a container having an opening in part, and the degree of vacuum is calculated based on a piezoelectric voltage output in response to changes in air pressure applied to the piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194587U JPS646535U (en) | 1987-07-02 | 1987-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10194587U JPS646535U (en) | 1987-07-02 | 1987-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646535U true JPS646535U (en) | 1989-01-13 |
Family
ID=31331399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10194587U Pending JPS646535U (en) | 1987-07-02 | 1987-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646535U (en) |
-
1987
- 1987-07-02 JP JP10194587U patent/JPS646535U/ja active Pending