JPS6472019A - Temperature measurement for work in flexible machining system - Google Patents

Temperature measurement for work in flexible machining system

Info

Publication number
JPS6472019A
JPS6472019A JP63220589A JP22058988A JPS6472019A JP S6472019 A JPS6472019 A JP S6472019A JP 63220589 A JP63220589 A JP 63220589A JP 22058988 A JP22058988 A JP 22058988A JP S6472019 A JPS6472019 A JP S6472019A
Authority
JP
Japan
Prior art keywords
work
sensor device
temperature value
temperature
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63220589A
Other languages
English (en)
Other versions
JP2710634B2 (ja
Inventor
Kamuraitaa Berunto
Shietsupaare Kaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of JPS6472019A publication Critical patent/JPS6472019A/ja
Application granted granted Critical
Publication of JP2710634B2 publication Critical patent/JP2710634B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q41/00—Combinations or associations of metal-working machines not directed to a particular result according to classes B21, B23, or B24
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/024—Means for indicating or recording specially adapted for thermometers for remote indication

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
JP63220589A 1987-09-04 1988-09-05 フレキシブル加工系内の工作物の温度測定方法 Expired - Lifetime JP2710634B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3729644.2 1987-09-04
DE3729644A DE3729644C2 (de) 1987-09-04 1987-09-04 Verfahren zur Bestimmung der Temperatur von Werkstücken in flexiblen Fertigungssystemen

Publications (2)

Publication Number Publication Date
JPS6472019A true JPS6472019A (en) 1989-03-16
JP2710634B2 JP2710634B2 (ja) 1998-02-10

Family

ID=6335252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63220589A Expired - Lifetime JP2710634B2 (ja) 1987-09-04 1988-09-05 フレキシブル加工系内の工作物の温度測定方法

Country Status (3)

Country Link
US (1) US4895454A (ja)
JP (1) JP2710634B2 (ja)
DE (1) DE3729644C2 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008200786A (ja) * 2007-02-19 2008-09-04 Koyo Electronics Ind Co Ltd 無線近接センサ装置、ワーククランプ装置および機械加工装置
JP2008221359A (ja) * 2007-03-09 2008-09-25 Koyo Electronics Ind Co Ltd 被加工ワーク検出用無線装置および機械加工装置
JP2008221378A (ja) * 2007-03-12 2008-09-25 Koyo Electronics Ind Co Ltd 近接センサ用電源供給装置および近接センサ
JP2008221422A (ja) * 2007-03-14 2008-09-25 Koyo Electronics Ind Co Ltd 機械加工装置
JP2009036753A (ja) * 2007-07-06 2009-02-19 Nikon Corp 計測装置
CN108247424A (zh) * 2016-12-28 2018-07-06 大族激光科技产业集团股份有限公司 一种机床加工温度的测试方法及装置
CN110977613A (zh) * 2019-12-13 2020-04-10 宁波大学 基于试件自标定的五轴数控机床几何误差辨识方法

Families Citing this family (34)

* Cited by examiner, † Cited by third party
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DE3823373A1 (de) * 1988-07-09 1990-01-11 Zeiss Carl Fa Verfahren zur erfassung der temperatur von messobjekten auf koordinatenmessgeraeten
DE8813875U1 (de) * 1988-11-05 1988-12-22 Fa. Carl Zeiss, 7920 Heidenheim Taster für Koordinatenmeßgeräte
DE3841488A1 (de) * 1988-12-09 1990-06-13 Zeiss Carl Fa Koordinatenmessgeraet mit einem oder mehreren fuehrungselementen aus aluminium
DE4039336C5 (de) * 1990-12-10 2004-07-01 Carl Zeiss Verfahren zur schnellen Werkstück-Temperaturmessung auf Koordinatenmeßgeräten
US5347476A (en) * 1992-11-25 1994-09-13 Mcbean Sr Ronald V Instrumentation system with multiple sensor modules
DE4300762C1 (de) * 1993-01-14 1994-03-31 Leitz Mestechnik Gmbh Verfahren zur dimensionellen Messung von Werkstücken
US5446971A (en) * 1993-01-14 1995-09-05 Leitz Messtechnik Gmbh Method for the dimensional measurement of workpieces
MY113681A (en) * 1994-03-22 2002-04-30 Casio Computer Co Ltd Thermometer
DE19717973C2 (de) * 1997-04-28 2003-04-30 Hommelwerke Gmbh Verfahren und Vorrichtung zur Längenmessung, insbesondere zur Abtastung der Kontur einer Oberfläche
US6917291B2 (en) * 1998-10-26 2005-07-12 Identec Solutions Inc. Interrogation, monitoring and data exchange using RFID tags
US6563417B1 (en) * 1998-10-26 2003-05-13 Identec Solutions Inc. Interrogation, monitoring and data exchange using RFID tags
DE19857132A1 (de) * 1998-12-11 2000-06-15 Heidenhain Gmbh Dr Johannes Verfahren und Anordnung zur Verringerung temperaturbedingter Maßabweichungen bei parallel angeordneten Meßsystemen
DE19958306C2 (de) * 1999-12-03 2002-03-14 Zeiss Carl Koordinatenmeßvorrichtung
US6691068B1 (en) * 2000-08-22 2004-02-10 Onwafer Technologies, Inc. Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
JP2006512401A (ja) * 2001-06-05 2006-04-13 ザ リージェンツ オブ ザ ユニバーシティ オブ ミシガン ナノエマルジョンワクチン
DE10225243B4 (de) * 2002-06-07 2013-01-31 Dr. Johannes Heidenhain Gmbh Positionsmessgerät und Verfahren zur Korrektur von Wärmeausdehnungen, insbesondere für eine Bearbeitungsmaschine
FR2852874B1 (fr) * 2003-03-31 2005-06-03 Thibaut Sa Banc de preparation d'une piece destinee a etre usinee sur une machine a commande numerique
FR2852876B1 (fr) * 2003-03-31 2005-06-03 Thibaut Sa Dispositif de mesure automatique des dimensions d'un outil pour machine d'usinage
US7170407B2 (en) * 2003-08-07 2007-01-30 Wagner Joerg C Method and apparatus for asset tracking and room monitoring in establishments having multiple rooms for temporary occupancy
DE20318571U1 (de) * 2003-12-01 2005-04-14 Otto Martin Maschinenbau Gmbh & Co Längenmeßvorrichtung
GB0515715D0 (en) * 2005-07-30 2005-09-07 Rolls Royce Plc Sensor measurement error
US9839685B2 (en) * 2006-04-13 2017-12-12 The Regents Of The University Of Michigan Methods of inducing human immunodeficiency virus-specific immune responses in a host comprising nasally administering compositions comprising a naonemulsion and recombinant GP120 immunogen
US10138279B2 (en) 2006-04-13 2018-11-27 Regents Of The University Of Michigan Compositions and methods for Bacillus anthracis vaccination
US20080038295A1 (en) * 2006-04-13 2008-02-14 Regents Of The University Of Michigan Compositions and methods for orthopox virus vaccination
JP4991365B2 (ja) * 2007-03-29 2012-08-01 カヤバ工業株式会社 寸法測定装置及び寸法測定方法
DE102007020176B4 (de) 2007-04-25 2010-08-12 Heinz Meßtechnik GmbH Messsystem zur Temperaturprofilmessung in Durchlauföfen
AU2009248810B2 (en) * 2008-05-23 2013-12-05 The Regents Of The University Of Michigan Nanoemulsion vaccines
WO2015147910A1 (en) * 2014-03-24 2015-10-01 Marposs Corporation Apparatus for inspecting machined bores
EP3124927A1 (en) * 2015-07-30 2017-02-01 Aktiebolaget SKF A portable probe unit for temperature measuring
DE102016107168B4 (de) * 2016-04-18 2025-05-22 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zum Abkühlen von Werkstücken
EP3660475B1 (en) * 2018-11-28 2022-08-10 General Electric Company Systems and methods for thermal monitoring
GB2596439B (en) * 2019-03-14 2023-04-19 Tokyo Seimitsu Co Ltd Three-dimensional measuring system, and three-dimensional measuring method
GB201918864D0 (en) * 2019-12-19 2020-02-05 Renishaw Plc Apparatus
DE102023136341B3 (de) 2023-12-21 2024-12-05 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Vermessung eines Werkstückes mit einem Messgerät und Messgerät

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56119503U (ja) * 1980-02-13 1981-09-11
JPS6176331U (ja) * 1984-10-25 1986-05-22
JPS61206100A (ja) * 1985-03-08 1986-09-12 株式会社　中村工業所 無線伝送式温度計の伝送方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2818732A (en) * 1955-02-08 1958-01-07 Gulton Ind Inc Device for remote temperature measurement
US3084986A (en) * 1959-03-23 1963-04-09 Ericsson Telefon Ab L M Method for machine control
US3332153A (en) * 1964-08-31 1967-07-25 Bausch & Lomb Temperature compensating system
US3491277A (en) * 1967-05-24 1970-01-20 Kearney & Trecker Corp Thermal compensation system for position transducers
US3637985A (en) * 1969-01-21 1972-01-25 Ball Corp Portable remote location measuring system
DE2216091A1 (de) * 1972-04-01 1973-10-18 Voith Gmbh J M Vorrichtung zur beruehrungslosen temperaturmessung an einem sich bewegenden gegenstand
DE3013378C2 (de) * 1980-04-05 1984-12-20 FAG Kugelfischer Georg Schäfer KGaA, 8720 Schweinfurt Einrichtung zur adaptiven Regelung von Bearbeitungsprozessen an Schleifmaschinen, insbesondere an Rundschleifmaschinen
DE3234345A1 (de) * 1982-09-16 1984-03-22 Robert Bosch Gmbh, 7000 Stuttgart Kodiersystem zur erfassung von informationen an werkstuecktraegern und dergleichen
EP0120102A1 (de) * 1983-03-23 1984-10-03 Firma Carl Zeiss Temperaturmesseinrichtung
DE3620118C2 (de) * 1986-06-14 1998-11-05 Zeiss Carl Fa Verfahren zur Bestimmung bzw. Korrektur des Temperaturfehlers bei Längenmessungen
US4747413A (en) * 1986-11-07 1988-05-31 Bloch Harry S Infant temperature measuring apparatus and methods

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56119503U (ja) * 1980-02-13 1981-09-11
JPS6176331U (ja) * 1984-10-25 1986-05-22
JPS61206100A (ja) * 1985-03-08 1986-09-12 株式会社　中村工業所 無線伝送式温度計の伝送方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008200786A (ja) * 2007-02-19 2008-09-04 Koyo Electronics Ind Co Ltd 無線近接センサ装置、ワーククランプ装置および機械加工装置
JP2008221359A (ja) * 2007-03-09 2008-09-25 Koyo Electronics Ind Co Ltd 被加工ワーク検出用無線装置および機械加工装置
JP2008221378A (ja) * 2007-03-12 2008-09-25 Koyo Electronics Ind Co Ltd 近接センサ用電源供給装置および近接センサ
JP2008221422A (ja) * 2007-03-14 2008-09-25 Koyo Electronics Ind Co Ltd 機械加工装置
JP2009036753A (ja) * 2007-07-06 2009-02-19 Nikon Corp 計測装置
JP2013164420A (ja) * 2007-07-06 2013-08-22 Nikon Corp 計測装置
CN108247424A (zh) * 2016-12-28 2018-07-06 大族激光科技产业集团股份有限公司 一种机床加工温度的测试方法及装置
CN108247424B (zh) * 2016-12-28 2020-06-02 大族激光科技产业集团股份有限公司 一种机床加工温度的测试方法及装置
CN110977613A (zh) * 2019-12-13 2020-04-10 宁波大学 基于试件自标定的五轴数控机床几何误差辨识方法

Also Published As

Publication number Publication date
US4895454A (en) 1990-01-23
JP2710634B2 (ja) 1998-02-10
DE3729644C2 (de) 1997-09-11
DE3729644A1 (de) 1989-03-23

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