JPS64730A - Formation of multilayer thin-film - Google Patents

Formation of multilayer thin-film

Info

Publication number
JPS64730A
JPS64730A JP3028788A JP3028788A JPS64730A JP S64730 A JPS64730 A JP S64730A JP 3028788 A JP3028788 A JP 3028788A JP 3028788 A JP3028788 A JP 3028788A JP S64730 A JPS64730 A JP S64730A
Authority
JP
Japan
Prior art keywords
plasma
film
thin
mixed gas
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3028788A
Other languages
English (en)
Other versions
JPH01730A (ja
JP2629773B2 (ja
Inventor
Hideomi Koinuma
Kazuo Fueki
Masashi Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bridgestone Corp
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Priority to JP63030287A priority Critical patent/JP2629773B2/ja
Publication of JPH01730A publication Critical patent/JPH01730A/ja
Publication of JPS64730A publication Critical patent/JPS64730A/ja
Application granted granted Critical
Publication of JP2629773B2 publication Critical patent/JP2629773B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP63030287A 1987-02-12 1988-02-12 多層薄膜の形成方法 Expired - Fee Related JP2629773B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63030287A JP2629773B2 (ja) 1987-02-12 1988-02-12 多層薄膜の形成方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3079987 1987-02-12
JP62-30799 1987-02-12
JP63030287A JP2629773B2 (ja) 1987-02-12 1988-02-12 多層薄膜の形成方法

Publications (3)

Publication Number Publication Date
JPH01730A JPH01730A (ja) 1989-01-05
JPS64730A true JPS64730A (en) 1989-01-05
JP2629773B2 JP2629773B2 (ja) 1997-07-16

Family

ID=26368613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63030287A Expired - Fee Related JP2629773B2 (ja) 1987-02-12 1988-02-12 多層薄膜の形成方法

Country Status (1)

Country Link
JP (1) JP2629773B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107459A (ja) * 1989-09-22 1991-05-07 Agency Of Ind Science & Technol アモルファスシリコン系薄膜の製造方法
US6380612B1 (en) 1996-03-18 2002-04-30 Hyundai Display Technology, Inc. Thin film formed by inductively coupled plasma

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62214619A (ja) * 1986-03-14 1987-09-21 Sumitomo Electric Ind Ltd 多層薄膜の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62214619A (ja) * 1986-03-14 1987-09-21 Sumitomo Electric Ind Ltd 多層薄膜の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107459A (ja) * 1989-09-22 1991-05-07 Agency Of Ind Science & Technol アモルファスシリコン系薄膜の製造方法
US6380612B1 (en) 1996-03-18 2002-04-30 Hyundai Display Technology, Inc. Thin film formed by inductively coupled plasma
KR100469134B1 (ko) * 1996-03-18 2005-09-02 비오이 하이디스 테크놀로지 주식회사 유도형플라즈마화학기상증착방법및그를이용하여생성된비정질실리콘박막트랜지스터

Also Published As

Publication number Publication date
JP2629773B2 (ja) 1997-07-16

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