JPS6473209A - Method for measuring cross-sectional profile - Google Patents

Method for measuring cross-sectional profile

Info

Publication number
JPS6473209A
JPS6473209A JP22963587A JP22963587A JPS6473209A JP S6473209 A JPS6473209 A JP S6473209A JP 22963587 A JP22963587 A JP 22963587A JP 22963587 A JP22963587 A JP 22963587A JP S6473209 A JPS6473209 A JP S6473209A
Authority
JP
Japan
Prior art keywords
sectional profile
cross
correction
signal
measuring cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22963587A
Other languages
Japanese (ja)
Inventor
Hisashi Okazaki
Akiya Shinozuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ERIONIKUSU KK
Original Assignee
ERIONIKUSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ERIONIKUSU KK filed Critical ERIONIKUSU KK
Priority to JP22963587A priority Critical patent/JPS6473209A/en
Publication of JPS6473209A publication Critical patent/JPS6473209A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE:To simplify the processing work required in correction and to obtain an accurate cross-sectional profile, by correcting the take-in signal of each detector and operating the signal after correction to obtain the cross-sectional profile. CONSTITUTION:A specimen surface 1 is scanned by electron beam in an X-axis direction and signal waveforms by the unevenness of a cross-section are obtained from detectors 3a, 3b. Correction is respectively applied to the intensities of the take-in signals of the detectors 3a, 3b preliminarily and the signals after correction are operated to obtain a cross-sectional profile.
JP22963587A 1987-09-16 1987-09-16 Method for measuring cross-sectional profile Pending JPS6473209A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22963587A JPS6473209A (en) 1987-09-16 1987-09-16 Method for measuring cross-sectional profile

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22963587A JPS6473209A (en) 1987-09-16 1987-09-16 Method for measuring cross-sectional profile

Publications (1)

Publication Number Publication Date
JPS6473209A true JPS6473209A (en) 1989-03-17

Family

ID=16895284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22963587A Pending JPS6473209A (en) 1987-09-16 1987-09-16 Method for measuring cross-sectional profile

Country Status (1)

Country Link
JP (1) JPS6473209A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4099359A1 (en) * 2021-06-03 2022-12-07 Jeol Ltd. Charged particle beam apparatus and image acquiring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4099359A1 (en) * 2021-06-03 2022-12-07 Jeol Ltd. Charged particle beam apparatus and image acquiring method
US12148594B2 (en) 2021-06-03 2024-11-19 Jeol Ltd. Charged particle beam apparatus and image acquiring method

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