JPS6473241A - Foreign matter inspecting device - Google Patents

Foreign matter inspecting device

Info

Publication number
JPS6473241A
JPS6473241A JP23061587A JP23061587A JPS6473241A JP S6473241 A JPS6473241 A JP S6473241A JP 23061587 A JP23061587 A JP 23061587A JP 23061587 A JP23061587 A JP 23061587A JP S6473241 A JPS6473241 A JP S6473241A
Authority
JP
Japan
Prior art keywords
foreign matter
microscope
movement
crt
screen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23061587A
Other languages
Japanese (ja)
Inventor
Yasuna Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23061587A priority Critical patent/JPS6473241A/en
Publication of JPS6473241A publication Critical patent/JPS6473241A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To enable quick movement of a foreign matter desired to observe within a field of view of a microscope, by providing a contact type specifying means adapted to specify an observing point with the microscope on a CRT screen. CONSTITUTION:When a sample placed on a sample stage 1 is started to be inspected, a data for the size and position of a foreign matter is sampled with a foreign matter searching section 4 to be sent to a control section 28 and further transferred to a CRT 8 to display a foreign matter 20 at a corresponding position on the sample shown on a screen. When a display position of the foreign matter on the screen of the CRT 8 is specified by a contact type specifying means 30 as an observing point with a microscope 6, a coordinate conversion means 32 converts a specified position into a coordinate data on an X-Y coordinate axis. Subsequently, a movement conversion means 42 converts an X-Y coordinate data into a movement from a reference position of a sample stage 1. Then, based on the movement data, the sample stage 1 is moved in the X and Y axes to let a desired observing point to be located within a field of view of the microscope.
JP23061587A 1987-09-14 1987-09-14 Foreign matter inspecting device Pending JPS6473241A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23061587A JPS6473241A (en) 1987-09-14 1987-09-14 Foreign matter inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23061587A JPS6473241A (en) 1987-09-14 1987-09-14 Foreign matter inspecting device

Publications (1)

Publication Number Publication Date
JPS6473241A true JPS6473241A (en) 1989-03-17

Family

ID=16910540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23061587A Pending JPS6473241A (en) 1987-09-14 1987-09-14 Foreign matter inspecting device

Country Status (1)

Country Link
JP (1) JPS6473241A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6185322B1 (en) 1989-07-12 2001-02-06 Hitachi, Ltd. Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6185322B1 (en) 1989-07-12 2001-02-06 Hitachi, Ltd. Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device

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