JPS647612A - Laser annealing device - Google Patents
Laser annealing deviceInfo
- Publication number
- JPS647612A JPS647612A JP62161213A JP16121387A JPS647612A JP S647612 A JPS647612 A JP S647612A JP 62161213 A JP62161213 A JP 62161213A JP 16121387 A JP16121387 A JP 16121387A JP S647612 A JPS647612 A JP S647612A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- laser
- working
- wavelength
- illumination light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laser Beam Processing (AREA)
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE:To observe a sample shape during working by a camera which is much faster than a conventional camera by cutting only a laser having a laser wavelength for working a sample of two laser beams reflected on the surface of the sample by a filter so that only the laser beam as an illumination light can be observed by a high speed camera. CONSTITUTION:Two lasers 10, 20 having different wavelengths, one of which is used for working a sample and the other of which is used as an illumination light are provided, the two lasers are irradiated to a sample 60 to be worked, and only the light having the wavelength of the laser 10 for working the sample of the two laser beams reflected on the surface of the sample 60 is cut by a filter 70 so that only the laser beam as the illumination light can be observed by a high speed camera. For example, two of Ar laser 10 having 18W of maximum output for working a sample and 457.9-514.5nm of wavelength for working the sample, and an He-Ne laser having 25mW and 632.8nm of wavelength for an illumination light are irradiated through the same axis by half mirrors 30, 40 to the sample 60, and only the light of the laser 10 of the reflected lights is cut by a gelatin filter 70.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62161213A JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62161213A JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS647612A true JPS647612A (en) | 1989-01-11 |
| JPH0230798B2 JPH0230798B2 (en) | 1990-07-09 |
Family
ID=15730760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62161213A Granted JPS647612A (en) | 1987-06-30 | 1987-06-30 | Laser annealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS647612A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008211136A (en) * | 2007-02-28 | 2008-09-11 | Sumitomo Heavy Ind Ltd | Laser annealing device and method |
| JP2012216733A (en) * | 2011-04-01 | 2012-11-08 | Japan Steel Works Ltd:The | Temperature measuring device and method for laser treatment process |
| JP2022082420A (en) * | 2020-11-20 | 2022-06-01 | ザ・ボーイング・カンパニー | Laser-based manufacturing with optical correction |
-
1987
- 1987-06-30 JP JP62161213A patent/JPS647612A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008211136A (en) * | 2007-02-28 | 2008-09-11 | Sumitomo Heavy Ind Ltd | Laser annealing device and method |
| JP2012216733A (en) * | 2011-04-01 | 2012-11-08 | Japan Steel Works Ltd:The | Temperature measuring device and method for laser treatment process |
| JP2022082420A (en) * | 2020-11-20 | 2022-06-01 | ザ・ボーイング・カンパニー | Laser-based manufacturing with optical correction |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230798B2 (en) | 1990-07-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |