JPS6476U - - Google Patents
Info
- Publication number
- JPS6476U JPS6476U JP9351987U JP9351987U JPS6476U JP S6476 U JPS6476 U JP S6476U JP 9351987 U JP9351987 U JP 9351987U JP 9351987 U JP9351987 U JP 9351987U JP S6476 U JPS6476 U JP S6476U
- Authority
- JP
- Japan
- Prior art keywords
- solid
- image sensor
- state image
- light
- sampling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案検査装置の一実施例の概略的構
成を示す模式図、第２図Ａ〜第２図Ｃは要部の波
形図である。
１……固体撮像素子、２……面光源、４……サ
ンプリング回路、５……検出回路、１１……半導
体ペレツト、１３……パツケージ、１４……受光
板。
FIG. 1 is a schematic diagram showing a schematic configuration of an embodiment of the inspection apparatus of the present invention, and FIGS. 2A to 2C are waveform diagrams of main parts. DESCRIPTION OF SYMBOLS 1... Solid-state image sensor, 2... Surface light source, 4... Sampling circuit, 5... Detection circuit, 11... Semiconductor pellet, 13... Package, 14... Light receiving plate.
Claims (1)
レツトを収納すると共に前記パツケージ凹所を透
光性の受光板で覆蓋する固体撮像素子の光学的検
査装置であつて、前記固体撮像素子に光照射を施
す光源と、該光源の光照射により得られた固体撮
像素子の光電変換出力をサンプリングするサンプ
リング回路と、該サンプリング回路のサンプリン
グ出力を導入し当該サンプリング出力の異常を検
出する検出回路と、を具備したことを特徴とする
固体撮像素子の光学的検査装置。 An optical inspection device for a solid-state image sensor, in which a semiconductor pellet that performs photoelectric conversion is housed in a recess of a package, and the recess of the package is covered with a light-transmitting light-receiving plate, wherein the solid-state image sensor is irradiated with light. A light source, a sampling circuit that samples a photoelectric conversion output of a solid-state image sensor obtained by light irradiation of the light source, and a detection circuit that introduces the sampling output of the sampling circuit and detects an abnormality in the sampling output. An optical inspection device for a solid-state image sensor, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9351987U JPS6476U (en) | 1987-06-18 | 1987-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9351987U JPS6476U (en) | 1987-06-18 | 1987-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6476U true JPS6476U (en) | 1989-01-05 |
Family
ID=30956163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9351987U Pending JPS6476U (en) | 1987-06-18 | 1987-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6476U (en) |
-
1987
- 1987-06-18 JP JP9351987U patent/JPS6476U/ja active Pending
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