JPS6477975A - Manufacture of light receiving device - Google Patents

Manufacture of light receiving device

Info

Publication number
JPS6477975A
JPS6477975A JP62235410A JP23541087A JPS6477975A JP S6477975 A JPS6477975 A JP S6477975A JP 62235410 A JP62235410 A JP 62235410A JP 23541087 A JP23541087 A JP 23541087A JP S6477975 A JPS6477975 A JP S6477975A
Authority
JP
Japan
Prior art keywords
layer
substrate
thin film
semiconductor layer
electrode layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62235410A
Other languages
Japanese (ja)
Other versions
JP2664377B2 (en
Inventor
Hiroshi Inoue
Yasuo Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP62235410A priority Critical patent/JP2664377B2/en
Publication of JPS6477975A publication Critical patent/JPS6477975A/en
Application granted granted Critical
Publication of JP2664377B2 publication Critical patent/JP2664377B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)

Abstract

PURPOSE:To improve workability and to improve adhesion of a thin film semiconductor layer, by patterning the thin film semiconductor layer and a second electrode layer, forming an island part on a substrate at the same time as the formation of a first electrode layer, and forming a thin film semiconductor layer thereon. CONSTITUTION:On a substrate 1 having an insulating surface, a first electrode layer 2 comprising a light receiving region 2a and a first output terminal part 2b and an island part layer 3 are formed. Then, a thin film semiconductor layer 4 is formed on the approximately entire surface of the substrate, and a second electrode layer 5 is sequentially formed on the approximately entire surface of the layer 4. The second electrode layer 5 and the thin semiconductor layer 4 are patterned into the same configuration in this order by photolithography. Light receiving parts 5a and 4a and second output terminals 5b and 4b are overlapped on the light receiving part 2a of the first electrode layer 2. The island part layer 3 having excellent adhesion with the substrate 1 is provided, and the separation of the thin film semiconductor layer 4 from the substrate 1 is prevented.
JP62235410A 1987-09-18 1987-09-18 Manufacturing method of light receiving device Expired - Lifetime JP2664377B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62235410A JP2664377B2 (en) 1987-09-18 1987-09-18 Manufacturing method of light receiving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62235410A JP2664377B2 (en) 1987-09-18 1987-09-18 Manufacturing method of light receiving device

Publications (2)

Publication Number Publication Date
JPS6477975A true JPS6477975A (en) 1989-03-23
JP2664377B2 JP2664377B2 (en) 1997-10-15

Family

ID=16985683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62235410A Expired - Lifetime JP2664377B2 (en) 1987-09-18 1987-09-18 Manufacturing method of light receiving device

Country Status (1)

Country Link
JP (1) JP2664377B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754377A (en) * 1980-09-18 1982-03-31 Canon Inc Photoelectric converting element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5754377A (en) * 1980-09-18 1982-03-31 Canon Inc Photoelectric converting element

Also Published As

Publication number Publication date
JP2664377B2 (en) 1997-10-15

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