JPS6479085A - Glass-coated aluminum nitride sintered compact and its production - Google Patents

Glass-coated aluminum nitride sintered compact and its production

Info

Publication number
JPS6479085A
JPS6479085A JP62234370A JP23437087A JPS6479085A JP S6479085 A JPS6479085 A JP S6479085A JP 62234370 A JP62234370 A JP 62234370A JP 23437087 A JP23437087 A JP 23437087A JP S6479085 A JPS6479085 A JP S6479085A
Authority
JP
Japan
Prior art keywords
sintered compact
glass
binder
production
paste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62234370A
Other languages
Japanese (ja)
Other versions
JPH0768065B2 (en
Inventor
Iwao Hiramatsu
Toshiaki Sakaida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP62234370A priority Critical patent/JPH0768065B2/en
Publication of JPS6479085A publication Critical patent/JPS6479085A/en
Publication of JPH0768065B2 publication Critical patent/JPH0768065B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69—Insulating materials thereof
    • H10W70/692—Ceramics or glasses

Landscapes

  • Glass Compositions (AREA)

Abstract

PURPOSE:To obtain the crackless titled sintered compact without leaving bubble in the glass layer by forming specified glass coated film on the surface of AlN sintered compact. CONSTITUTION:Glass powder consisting of 9-20wt.% Al2O3, 20-30wt.% B2O3, 40-60wt.% SiO2, 3-15wt.% CaO and 0-3wt.% ZrO2 is mixed with org. binder (e.g. ethylcellulose) to obtain a paste. Then, the paste above-mentioned is applied on the surface of AlN sintered compact, removed the binder by heating in the air at about 400 deg.C after drying, thereafter, heated in N2 atmosphere at 1,100-1,500 deg.C and cooled to obtain the AlN sintered compact having 0.5-1.0mg/cm<2> primary calcined glass layer. Then, the paste contg. 50-60wt.% glass powder above-mentioned and the org. binder is applied on the sintered compact, removed the binder by heating in the air at about 400 deg.C after drying, thereafter, heated in N2 atmosphere at 850-1,100 deg.C and cooled to form the secondary calcined glass layer.
JP62234370A 1987-09-18 1987-09-18 Glass-coated aluminum nitride sintered body and method for producing the same Expired - Lifetime JPH0768065B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62234370A JPH0768065B2 (en) 1987-09-18 1987-09-18 Glass-coated aluminum nitride sintered body and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62234370A JPH0768065B2 (en) 1987-09-18 1987-09-18 Glass-coated aluminum nitride sintered body and method for producing the same

Publications (2)

Publication Number Publication Date
JPS6479085A true JPS6479085A (en) 1989-03-24
JPH0768065B2 JPH0768065B2 (en) 1995-07-26

Family

ID=16969943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62234370A Expired - Lifetime JPH0768065B2 (en) 1987-09-18 1987-09-18 Glass-coated aluminum nitride sintered body and method for producing the same

Country Status (1)

Country Link
JP (1) JPH0768065B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374636U (en) * 1989-11-16 1991-07-26
US5200566A (en) * 1989-12-26 1993-04-06 Yamaha Corporation Electronic musical instrument with ad-lib melody playing device
WO2001044143A1 (en) * 1999-12-16 2001-06-21 Tokuyama Corporation Joint body of glass-ceramic and aluminum nitride sintered compact and method for producing the same
JP2007305508A (en) * 2006-05-15 2007-11-22 Sony Corp Light emitting device and light control film
JP2021011425A (en) * 2019-07-03 2021-02-04 台湾玻璃工業股▲ふん▼有限公司Ｔａｉｗａｎ Ｇｌａｓｓ Ｉｎｄｕｓｔｒｙ Ｃｏｒｐ． Glass raw material with reduced dielectric constant by increasing the weight percent of boron oxide

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374636U (en) * 1989-11-16 1991-07-26
US5200566A (en) * 1989-12-26 1993-04-06 Yamaha Corporation Electronic musical instrument with ad-lib melody playing device
WO2001044143A1 (en) * 1999-12-16 2001-06-21 Tokuyama Corporation Joint body of glass-ceramic and aluminum nitride sintered compact and method for producing the same
US6818574B2 (en) 1999-12-16 2004-11-16 Tokuyama Corporation Jointed body of glass-ceramic and aluminum nitride sintered compact and method for producing the same
JP2007305508A (en) * 2006-05-15 2007-11-22 Sony Corp Light emitting device and light control film
JP2021011425A (en) * 2019-07-03 2021-02-04 台湾玻璃工業股▲ふん▼有限公司Ｔａｉｗａｎ Ｇｌａｓｓ Ｉｎｄｕｓｔｒｙ Ｃｏｒｐ． Glass raw material with reduced dielectric constant by increasing the weight percent of boron oxide
US11345629B2 (en) 2019-07-03 2022-05-31 Taiwan Glass Industry Corp. Glass material with low dielectric constant attributable to high weight percentage of boron trioxide

Also Published As

Publication number Publication date
JPH0768065B2 (en) 1995-07-26

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