JPS6480470A - Coating device - Google Patents

Abstract

PURPOSE:To prevent the resticking of splashed paint to an object to be coated by providing a filter to the circumference in the rotating direction of a spin head to which the object to be coated is supported in a treatment space and further, providing a low-pressure force discharge space by the outside peripheral face side thereof. CONSTITUTION:A resist liquid 13a splashed toward the outside of the rotating circumference from the surface of a wafer 2 by the centrifugal force generated when the spin head 7 rotates is brought into collision against the porous filter 14. The filter 14 is kept under the negative pressure on the discharge space 5 side which is the surface on the side opposite to the surface to collide against the resist liquid 13a and, therefore, the resist liquid 13a colliding against the same is sucked into the filter 14 and the resticking thereof to the wafer 2 is effectively prevented. Since the splashing liquid sucked into the filter 14 is removed to the outside through the force discharge space 5 on the outside peripheral face side of the filter, the clogging of the filter 14 is prevented. The coating with the high reliability over a long period of time is thus executed.