JPS6481908A - Spectral element - Google Patents
Spectral elementInfo
- Publication number
- JPS6481908A JPS6481908A JP24008587A JP24008587A JPS6481908A JP S6481908 A JPS6481908 A JP S6481908A JP 24008587 A JP24008587 A JP 24008587A JP 24008587 A JP24008587 A JP 24008587A JP S6481908 A JPS6481908 A JP S6481908A
- Authority
- JP
- Japan
- Prior art keywords
- spectral element
- lif
- molybdenum
- lithium fluoride
- attains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003595 spectral effect Effects 0.000 title abstract 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 abstract 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 3
- 229910052750 molybdenum Inorganic materials 0.000 abstract 3
- 239000011733 molybdenum Substances 0.000 abstract 3
- 238000010030 laminating Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000004304 visual acuity Effects 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 1
- 238000001659 ion-beam spectroscopy Methods 0.000 abstract 1
- 238000003475 lamination Methods 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Landscapes
- Optical Filters (AREA)
Abstract
PURPOSE:To obtain a spectral element which has high strength and adequate resolving power and does not require intricate optical systems by alternately laminating molybdenum and lithium fluoride at respectively specific film thicknesses in such a manner that the film thickness ratio of the molybdenum and the lithium fluoride attains 0.1-10. CONSTITUTION:This spectral element is the artificial multi-layered film which is provided with periodic structures by alternately laminating the molybdenum (Mo) 2 and the lithium fluoride (Lif) 3 respectively to >=1atom. and <=400Angstrom film thicknesses on a substrate 1 in such a manner that the film thickness ratio of the Mo 2 and the LiF 3 attains 0.1-10. Glass, silicon, sapphire, etc., having optically flat surfaces are used for the substrate 1. A vacuum deposition method or neutralized ion beam sputtering method, high-frequency sputtering method, etc., are used for the alternate lamination of the Mo 2 and the LiF 3. The spectral element which has the high strength and the adequate resolving power and does not require the intricate optical systems is thereby obtd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24008587A JPS6481908A (en) | 1987-09-24 | 1987-09-24 | Spectral element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24008587A JPS6481908A (en) | 1987-09-24 | 1987-09-24 | Spectral element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6481908A true JPS6481908A (en) | 1989-03-28 |
Family
ID=17054260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24008587A Pending JPS6481908A (en) | 1987-09-24 | 1987-09-24 | Spectral element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6481908A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0242399A (en) * | 1988-08-02 | 1990-02-13 | Agency Of Ind Science & Technol | Multilayered film reflecting mirror for soft x ray |
| JPH0434400A (en) * | 1990-05-31 | 1992-02-05 | Japan Aviation Electron Ind Ltd | Soft x-rays multilayer film reflecting mirror |
-
1987
- 1987-09-24 JP JP24008587A patent/JPS6481908A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0242399A (en) * | 1988-08-02 | 1990-02-13 | Agency Of Ind Science & Technol | Multilayered film reflecting mirror for soft x ray |
| JPH0434400A (en) * | 1990-05-31 | 1992-02-05 | Japan Aviation Electron Ind Ltd | Soft x-rays multilayer film reflecting mirror |
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