JPS6484561A - Secondary ion mass analyzer - Google Patents

Secondary ion mass analyzer

Info

Publication number
JPS6484561A
JPS6484561A JP62242131A JP24213187A JPS6484561A JP S6484561 A JPS6484561 A JP S6484561A JP 62242131 A JP62242131 A JP 62242131A JP 24213187 A JP24213187 A JP 24213187A JP S6484561 A JPS6484561 A JP S6484561A
Authority
JP
Japan
Prior art keywords
secondary ion
recorder
sample
ion
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62242131A
Other languages
Japanese (ja)
Inventor
Yasubumi Kameshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62242131A priority Critical patent/JPS6484561A/en
Publication of JPS6484561A publication Critical patent/JPS6484561A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain information required for analysis of data on the secondary ion intensity, in particular, profile of the secondary ion in the depth direction by indicating sample potential at the time of measurement along with data on the secondary ion mass analysis simultaneously on a recorder. CONSTITUTION:Secondary ions generated from a sample 2a are extracted at high potential at a secondary ion extracting electrode 3. The secondary ion pass through an energy separator 4 by electric field and further pass through a mass separator 5 by magnetic field and enter an ion detector 6 after being classified. The signal from the ion detector 6 is input into a recorder 8 through a signal processor 7. On the other hand, a high impedance potentiometer 9 measures potential difference between the sample 2a and the secondary ion extracting electrode 3, and the measured value is recorded in and indicated on the recorder through an A-D convertor 10 along with secondary ion intensity.
JP62242131A 1987-09-25 1987-09-25 Secondary ion mass analyzer Pending JPS6484561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242131A JPS6484561A (en) 1987-09-25 1987-09-25 Secondary ion mass analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242131A JPS6484561A (en) 1987-09-25 1987-09-25 Secondary ion mass analyzer

Publications (1)

Publication Number Publication Date
JPS6484561A true JPS6484561A (en) 1989-03-29

Family

ID=17084768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242131A Pending JPS6484561A (en) 1987-09-25 1987-09-25 Secondary ion mass analyzer

Country Status (1)

Country Link
JP (1) JPS6484561A (en)

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