JPS648736U - - Google Patents
Info
- Publication number
- JPS648736U JPS648736U JP10174187U JP10174187U JPS648736U JP S648736 U JPS648736 U JP S648736U JP 10174187 U JP10174187 U JP 10174187U JP 10174187 U JP10174187 U JP 10174187U JP S648736 U JPS648736 U JP S648736U
- Authority
- JP
- Japan
- Prior art keywords
- camera
- projection exposure
- reduction projection
- prealignment
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005070 sampling Methods 0.000 description 1
Description
第１図は縮小投影露光装置の概略構成図、第２
図は本案の一実施例の構成図、第３図、第４図は
本案の一実施例におけるフオーカス状態図、第５
図は顕微鏡の像を示す図、第６図はカメラの出力
信号を示す図、第７図はモニタＴＶの波形表示画
面信号を示す図である。
１４……プリアライメントステージ、１７……
プリアライメント十字マーク、１８……基準カー
ソル線、１９……サンプリングライン、２０……
信号波形、２１……コントローラ、２２……カメ
ラ、２３……対物レンズ、２４……信号電圧。
Figure 1 is a schematic diagram of the reduction projection exposure apparatus;
The figure is a configuration diagram of an embodiment of the present invention, FIGS. 3 and 4 are focus state diagrams of an embodiment of the present invention, and FIG.
6 is a diagram showing an image of a microscope, FIG. 6 is a diagram showing an output signal of a camera, and FIG. 7 is a diagram showing a waveform display screen signal of a monitor TV. 14...Pre-alignment stage, 17...
Pre-alignment cross mark, 18... Reference cursor line, 19... Sampling line, 20...
Signal waveform, 21... Controller, 22... Camera, 23... Objective lens, 24... Signal voltage.
Claims (1)
鏡とカメラとカメラ信号処理ユニツトと表示用モ
ニタより成る縮小投影露光装置において、プリア
ライメント十字マーク像の電気的信号をモニタに
表示する様な装置を設けた事を特徴とする縮小投
影露光装置。 In wafer prealignment, a reduction projection exposure system consisting of an optical microscope, a camera, a camera signal processing unit, and a display monitor is characterized by being equipped with a device that displays the electrical signal of the prealignment cross mark image on the monitor. Reduction projection exposure equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10174187U JPS648736U (en) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10174187U JPS648736U (en) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648736U true JPS648736U (en) | 1989-01-18 |
Family
ID=31331014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10174187U Pending JPS648736U (en) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648736U (en) |
-
1987
- 1987-07-03 JP JP10174187U patent/JPS648736U/ja active Pending
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