JPS649601A - Manufacture of thin film platinum temperature sensor - Google Patents

Manufacture of thin film platinum temperature sensor

Info

Publication number
JPS649601A
JPS649601A JP62164521A JP16452187A JPS649601A JP S649601 A JPS649601 A JP S649601A JP 62164521 A JP62164521 A JP 62164521A JP 16452187 A JP16452187 A JP 16452187A JP S649601 A JPS649601 A JP S649601A
Authority
JP
Japan
Prior art keywords
thin film
platinum thin
substrate
manufacture
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62164521A
Other languages
English (en)
Inventor
Hideyuki Tanigawa
Kazuhisa Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62164521A priority Critical patent/JPS649601A/ja
Publication of JPS649601A publication Critical patent/JPS649601A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP62164521A 1987-07-01 1987-07-01 Manufacture of thin film platinum temperature sensor Pending JPS649601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62164521A JPS649601A (en) 1987-07-01 1987-07-01 Manufacture of thin film platinum temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62164521A JPS649601A (en) 1987-07-01 1987-07-01 Manufacture of thin film platinum temperature sensor

Publications (1)

Publication Number Publication Date
JPS649601A true JPS649601A (en) 1989-01-12

Family

ID=15794743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62164521A Pending JPS649601A (en) 1987-07-01 1987-07-01 Manufacture of thin film platinum temperature sensor

Country Status (1)

Country Link
JP (1) JPS649601A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393945B1 (ko) * 2001-02-24 2003-08-06 이노스텍 (주) 금속 박막 저항체 소자의 제조 방법 및 이를 이용한 금속 박막 온도 센서의 제조 방법
JP2012119389A (ja) * 2010-11-29 2012-06-21 Tdk Corp サーミスタ、温度センサ及びガスセンサ
CN107209067A (zh) * 2015-01-15 2017-09-26 株式会社电装 温度传感器及其制造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100393945B1 (ko) * 2001-02-24 2003-08-06 이노스텍 (주) 금속 박막 저항체 소자의 제조 방법 및 이를 이용한 금속 박막 온도 센서의 제조 방법
JP2012119389A (ja) * 2010-11-29 2012-06-21 Tdk Corp サーミスタ、温度センサ及びガスセンサ
CN107209067A (zh) * 2015-01-15 2017-09-26 株式会社电装 温度传感器及其制造方法
CN107209067B (zh) * 2015-01-15 2019-08-20 株式会社电装 温度传感器及其制造方法

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