JPWO2021255893A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2021255893A5 JPWO2021255893A5 JP2022531198A JP2022531198A JPWO2021255893A5 JP WO2021255893 A5 JPWO2021255893 A5 JP WO2021255893A5 JP 2022531198 A JP2022531198 A JP 2022531198A JP 2022531198 A JP2022531198 A JP 2022531198A JP WO2021255893 A5 JPWO2021255893 A5 JP WO2021255893A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic insulator
- heater
- radiant tube
- diameter
- central hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims 17
- 239000000919 ceramic Substances 0.000 claims 14
- 238000005485 electric heating Methods 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 3
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/023962 WO2021255893A1 (ja) | 2020-06-18 | 2020-06-18 | 電熱装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021255893A1 JPWO2021255893A1 (2) | 2021-12-23 |
| JPWO2021255893A5 true JPWO2021255893A5 (2) | 2022-09-09 |
| JP7161816B2 JP7161816B2 (ja) | 2022-10-27 |
Family
ID=79267657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022531198A Active JP7161816B2 (ja) | 2020-06-18 | 2020-06-18 | 電熱装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240237155A1 (2) |
| JP (1) | JP7161816B2 (2) |
| KR (1) | KR20230003190A (2) |
| CN (1) | CN115669218A (2) |
| WO (1) | WO2021255893A1 (2) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102569040B1 (ko) * | 2022-01-28 | 2023-08-22 | 칸켄 테크노 가부시키가이샤 | 통형상 가열부와 상기 통형상 가열부를 구비한 배기 가스 처리 장치 |
| JP7325151B1 (ja) | 2023-04-10 | 2023-08-14 | カンケンテクノ株式会社 | 筒状加熱部と該筒状加熱部を備えた排ガス処理装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2888546A (en) * | 1957-09-16 | 1959-05-26 | Theodore S Kinney | Immersion electric heater |
| US4322606A (en) * | 1980-04-28 | 1982-03-30 | Agf Inc. | Electrical heating element assembly |
| JPS5926895U (ja) * | 1982-08-13 | 1984-02-20 | ミクニ機工株式会社 | チユ−ブヒ−タ用支持碍子 |
| DE3445489C2 (de) * | 1984-12-13 | 1986-11-20 | Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn | Einrichtung zur Befestigung mehrerer elektrischer Leitungen in einem Flugzeug |
| JPS61142685A (ja) * | 1984-12-14 | 1986-06-30 | ニムラ鋼機株式会社 | ラジアントチユ−ブ式ヒ−タ− |
| JPH02143795U (2) * | 1989-05-02 | 1990-12-06 | ||
| ES2081650T3 (es) * | 1993-04-02 | 1996-03-16 | Kanthal Gmbh | Disco de ceramica de varios orificios, como soporte de conductores de caldeo de un elemento calefactor para el calentamiento electrico de instalaciones de hornos industriales. |
| SE526522C2 (sv) * | 2003-06-27 | 2005-10-04 | Sandvik Intellectual Property | Keramisk stödskiva för värmeledare |
| US9137858B2 (en) * | 2007-12-10 | 2015-09-15 | Sandvik Intellectual Property Ab | Electric heating device |
| DE202008016439U1 (de) * | 2008-12-11 | 2009-03-12 | Türk & Hillinger GmbH | Heizpatrone |
| JP4402743B1 (ja) * | 2009-07-27 | 2010-01-20 | ミクニ機工株式会社 | 炉内加熱ヒータ用碍子およびそれを用いた炉内加熱ヒータ |
-
2020
- 2020-06-18 CN CN202080100953.9A patent/CN115669218A/zh active Pending
- 2020-06-18 JP JP2022531198A patent/JP7161816B2/ja active Active
- 2020-06-18 US US18/000,890 patent/US20240237155A1/en active Pending
- 2020-06-18 KR KR1020227041882A patent/KR20230003190A/ko active Pending
- 2020-06-18 WO PCT/JP2020/023962 patent/WO2021255893A1/ja not_active Ceased
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11688590B2 (en) | Electrostatic-chuck heater | |
| JPWO2021255893A5 (2) | ||
| WO2007097193A1 (ja) | 面状ヒータ | |
| JP2017208275A5 (2) | ||
| JP6059512B2 (ja) | ヒータユニット | |
| TWM522949U (zh) | 加熱裝置 | |
| TWI621233B (zh) | 導線結構及其設計方法 | |
| CN1836144B (zh) | 改进的导热体支撑盘 | |
| JPH11163102A5 (ja) | 半導体製造装置 | |
| JP2018516446A5 (2) | ||
| JP2011129515A (ja) | 放電灯用の電極 | |
| JP5524782B2 (ja) | ヒータユニット、及び半導体ウエハ製造方法 | |
| JP3844408B2 (ja) | 複層セラミックスヒータ | |
| KR102355535B1 (ko) | 플레이트 타입 가열장치 | |
| WO2012050117A1 (ja) | 支持体及びウエハ成膜処理方法 | |
| JP4454557B2 (ja) | 縦型ウェーハボート | |
| KR102157573B1 (ko) | 기판 열처리용 히터 및 이를 이용한 기판 열처리 장치 | |
| JP5437764B2 (ja) | ヒータユニット | |
| JP7618034B2 (ja) | 静電チャックヒータ及び成膜装置 | |
| CN215207849U (zh) | 一种快速导热的工字轮 | |
| JP6210382B2 (ja) | エピタキシャル成長装置 | |
| JP6715631B2 (ja) | 基板支持部材 | |
| JP6190156B2 (ja) | セラミックス板及びヒータユニット | |
| CN210899671U (zh) | 易于卷曲定位的发热圈 | |
| JP6522481B2 (ja) | 面状ヒータ |