KR100789727B1 - Flat Panel Cleaning Device - Google Patents

Abstract

The disclosed flat panel cleaning apparatus includes a body, a rotating shaft having a long cylindrical shape, connected to the rotating shaft, and a disk-shaped disk brush having a plurality of brush hairs formed on a bottom thereof to clean the flat panel, and surrounding the rotating shaft. A first liquid film disposed to contact the inner surface of the body where the disk brush is located and preventing the cleaning liquid from leaking from the inside of the body, and two or more second liquid films joined by an interview with the first liquid film surrounding the rotating shaft. . Therefore, in order to prevent the cleaning liquid from leaking from the flat panel cleaning apparatus, the flat panel cleaning apparatus includes a plurality of liquid membranes, and at least one of the liquid membranes is constituted by a double liquid membrane, whereby the cleaning liquid leaks from the flat panel cleaning apparatus. Can be blocked efficiently.

Description

Flat panel cleaning device {APPARATUS OF CLEANING FLAT PANEL}

1 is a schematic diagram illustrating flat panel cleaning apparatuses according to an exemplary embodiment of the present invention.

FIG. 2 is a configuration diagram illustrating the flat panel cleaning apparatus of FIG. 1 in detail.

3 is a cutaway perspective view illustrating the liquid barriers of FIG. 1 in detail.

<Description of the symbols for the main parts of the drawings>

100 flat panel cleaning device 200 cleaning chamber

210: body 300: rotation axis

310: driving unit 400: disc brush

410: brush head 420: cleaning liquid supply unit

500: liquid film 510: first liquid film

520: second liquid film 530: third liquid film

540: O-ring

The present invention relates to a flat panel cleaning apparatus, and more particularly, to a flat panel cleaning apparatus for efficiently preventing the cleaning liquid from leaking from the flat panel cleaning apparatus.

Recently, with the development of new advanced imaging devices such as high definition TVs, research on flat panel displays instead of CRTs has been actively conducted. In general, a flat panel display device is a device for visually displaying various images and includes a liquid crystal display device (LCD), a plasma display panel (PDP) device, an electro luminescence display (ELD), and the like. In particular, the flat panel display device is thin and light, has a low driving voltage and low power consumption, and thus is widely used throughout the industry.

In order to manufacture such a flat panel display, various processes such as a deposition process, an etching process, and a patterning process are performed. Therefore, when each process is completed, a cleaning process for removing the chemical liquid and impurities used in each process is required.

The flat panel display includes a cleaning chamber, a rotating shaft, and a disk brush to remove impurities from the flat panel. That is, it includes a cleaning chamber for providing a closed space and a rotating shaft formed through the body of the cleaning chamber to rotate the disk brush and a disk brush connected to the end of the rotating shaft to brush the flat panel. Thus, the disk brush is brushed with the cleaning liquid supplied to remove impurities remaining in the flat panel.

On the other hand, a minute space is generated between the rotating shaft and the through hole formed in the body in a space in which the rotating shaft is formed through the body. In this case, when the cleaning liquid supplied leaks out through the microcavity, the flat panel cleaning apparatus may be defective. Therefore, a problem occurs that the overall yield and reliability of the product is lowered due to the failure of the flat panel cleaning apparatus.

One object of the present invention is to provide a flat panel cleaning apparatus for efficiently preventing the cleaning liquid from leaking.

Flat panel cleaning device according to an embodiment of the present invention for achieving the above object is a body, a rotating shaft disposed through the body and having a long cylindrical shape, connected to the rotating shaft, the bottom surface for cleaning the flat panel A disk-shaped disk brush having a plurality of brush hairs formed thereon, a first liquid film disposed to contact the inner surface of the body in which the disk brush is located while surrounding the rotating shaft, and preventing a cleaning liquid from leaking from the inside of the body; At least two second liquid membranes are coupled to each other by an interview with the first liquid membrane while surrounding the rotating shaft.

According to one embodiment of the invention, the first liquid film and the second liquid film has the shape of a hollow cylinder having an inner diameter larger than the outer diameter of the rotation axis.

According to an embodiment of the present invention, the cross section of the first liquid film at the portion where the first liquid film and the second liquid film are coupled has a shape of “c” having an open upper surface, and the cross section of the second liquid film has a lower surface. It has the shape of an open "c". In addition, the first liquid film and the second liquid film are inserted into and coupled to each other in the space provided by the "C" shape.

According to an embodiment of the present invention, the cleaning solution further includes a supply for supplying the cleaning liquid to the flat panel. On the other hand, the cleaning liquid supply unit is formed in the cleaning liquid supply pipe receiving the cleaning liquid from the outside, the rotary shaft, the cleaning liquid injection pipe and the brush surface connected to the cleaning liquid supply pipe to receive the cleaning liquid and supplied from the cleaning liquid injection tube The cleaning liquid injection port which injects the received cleaning liquid to the flat panel is included.

According to an embodiment of the present invention, the second liquid film is disposed between the rotary shaft further includes an O-ring for contacting the second liquid film in close contact with the rotary shaft. In addition, the O-ring is formed integrally with the second liquid film.

The driving unit may further include a driving unit disposed at one end of the rotating shaft to rotate the rotating shaft clockwise or counterclockwise.

According to such a flat panel cleaning apparatus, the flat panel cleaning apparatus includes a plurality of liquid films disposed while surrounding the rotating shaft. In addition, since the liquid film disposed inside of the liquid films is formed in a double, it is possible to efficiently prevent the cleaning liquid from leaking.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed subject matter is thorough and complete, and that the scope of the invention to those skilled in the art will fully convey. In the drawings, the thickness, size, etc. of the substrate, the chamber, and the devices are exaggerated for clarity.

FIG. 1 is a schematic diagram illustrating flat panel cleaning apparatuses according to an exemplary embodiment of the present invention, and FIG. 2 is a schematic diagram illustrating the flat panel cleaning apparatus of FIG. 1 in detail.

1 and 2, the flat panel cleaning apparatus 100 according to an embodiment of the present invention includes a cleaning chamber 200, a rotating shaft 300, a disk brush 400, and a liquid film 500.

The cleaning chamber 200 provides a space in which the flat panel G can be cleaned. The cleaning chamber 200 may have a structure that is sealed from the outside according to the process type. Thus, the cleaning chamber 200 has an interior space surrounded by the body 210.

The cleaning chamber 200 receives the flat panel G from a process chamber (not shown) to clean chemicals, impurities, and the like used in the process. Thus, the cleaning chamber 200 is disposed adjacent to the process chamber. In addition, a transfer robot (not shown) for transferring the flat panel G is disposed between the cleaning chamber 200 and the process chamber. In contrast, when the cleaning chamber 200 and the process chamber are disposed adjacent to each other with an inner wall (not shown) interposed therebetween, the cleaning panel 200 and the process chamber may transfer the flat panel G through a roller (not shown).

The rotating shaft 300 is disposed through, for example, the body 210. Therefore, the rotation shaft 300 may be disposed inside the cleaning chamber 200 through a through hole (not shown) formed in the body 210. In contrast, the rotation shaft 300 may be disposed to be fixed to the body 210.

The rotating shaft 300 has a long cylindrical shape. Alternatively, the rotation shaft 300 may have various shapes. For example, the rotating shaft 300 is inserted into the bearing 320 disposed in the body 210 of the cleaning chamber 200. The rotation shaft 300 is stably fixed by the bearing 320. On the other hand, the rotating shaft 300 may be fixed by another fixing means.

The rotary shaft 300 rotates clockwise or counterclockwise. Therefore, as the rotating shaft 300 rotates, the disk brush 400 connected to the rotating shaft 300 simultaneously rotates. In addition, the flat panel cleaning apparatus 100 further includes a driving unit 310 disposed at one end of the rotating shaft 300 to rotate the rotating shaft 300. The driver 310 includes a motor, for example. Alternatively, the driving unit 310 may include a driving means such as an impeller provided in a separate space.

On the other hand, the driving unit 310 drives the rotating shaft 300 in the vertical direction. For example, when the flat panel G is transferred to the cleaning chamber 200, the driving unit 310 may move the rotary shaft 300 in the upward direction to allow the flat panel G to be easily transferred. On the contrary, when the disk brush 400 needs to be maintained as a whole, the rotating shaft 300 may be moved upward.

The disc brush 400 is connected to one end of the rotation shaft 300. The disc brush 400 includes, for example, a disc having the shape of a disc. In contrast, the disk brush 400 may include various shapes of disks for effectively cleaning the surface of the flat panel G.

The disk brush 400 includes a brush bristle 410 formed on a bottom surface of the flat panel G to clean the flat panel G. For example, the brush bristles 410 are uniformly disposed on the bottom of the disk. Alternatively, a plurality of brush hairs 410 may be formed at the edge of the disk rather than the center of the disk. On the other hand, the brush bristle 410 may have various shapes as long as it can efficiently clean the sprayed cleaning solution W on the entire surface of the flat panel G. FIG. In addition, the brush bristle 410 may vary in thickness, density, material, etc. according to the surface state of the flat panel (G).

The flat panel cleaning apparatus 100 further includes a cleaning liquid supply part 420 for supplying the cleaning liquid W used in the cleaning process. Meanwhile, the cleaning liquid W may include various kinds as long as it can effectively remove the chemical liquid and impurities used in the process. For example, the washing liquid W contains deionized water. The cleaning solution supply unit 420 includes a cleaning solution supply pipe 422, a cleaning solution injection pipe 424, and a cleaning solution injection port 426.

The cleaning liquid supply pipe 422 receives the cleaning liquid W from the cleaning liquid supply unit 430. For example, the cleaning liquid supply pipe 422 is formed to penetrate the inside of the rotation shaft 300. In contrast, the cleaning solution supply pipe 422 may be formed adjacent to the rotating shaft 300 to be connected to the disk. The cleaning liquid injection pipe 424 is formed at the end of the rotation shaft 300. In addition, the cleaning liquid injection pipe 424 is connected to the cleaning liquid supply pipe 422 to receive the cleaning liquid (W). On the other hand, the cleaning liquid injection port 426 is formed in the disk. For example, the cleaning liquid injection hole 426 is formed at the bottom of the disk brush 400. The cleaning liquid injection port 426 injects the cleaning liquid W supplied from the cleaning liquid injection pipe 424 to the flat panel G. The cleaning liquid injection port 426 uniformly injects the cleaning liquid W to the flat panel G as a whole. Therefore, the cleaning liquid W is uniformly distributed on the entire surface of the flat panel G through the cleaning liquid injection port 426.

The liquid film 500 is disposed to be in close contact with the inner surface of the body 210 where the disk brush 400 is located. Therefore, the liquid film 500 prevents the cleaning liquid W used to clean the flat panel G from leaking from the cleaning chamber 200.

The liquid film 500 is formed to surround the rotation shaft 300. For example, the liquid film 500 has a shape of a hollow cylinder having an inner diameter larger than the outer diameter of the rotation shaft 300. On the contrary, the liquid film 500 may have various shapes if it can effectively prevent the leakage of the cleaning liquid W while surrounding the rotating shaft 300. Therefore, the liquid film 500 covers the microcavity generated between the body 210 and the rotating shaft 300 formed through the body 210. In addition, when the separation space exists in another space of the cleaning chamber 200, the liquid film 500 may be disposed in the separation space to cover.

Meanwhile, the liquid film 500 includes a first liquid film 510, a second liquid film 520, and a third liquid film 530.

The first liquid film 510 is disposed to be in close contact with the inner surface of the body 210 while surrounding the rotating shaft 300. In addition, the second liquid film 520 is coupled to the first liquid film 510 and surrounds the rotation axis 300. In addition, the third liquid film 530 is coupled to the second liquid film 520 and surrounds the rotation shaft 3000. A detailed coupling relationship and shape of the liquid films 500 will be described in detail with reference to FIG. 3.

FIG. 3 is a cutaway perspective view partially illustrating the liquid barriers of FIG. 1.

1 to 3, the liquid film 500 according to an embodiment of the present invention includes a first liquid film 510, a second liquid film 520, and a third liquid film 530.

The first liquid film 510 is disposed to be in close contact with the inner surface of the body 210 while surrounding the rotating shaft 300. In addition, the second liquid film 520 is coupled to the first liquid film 510 and surrounds the rotation shaft 300. In addition, the third liquid film 530 is coupled to the second liquid film 520 and surrounds the rotation shaft 3000. For example, the first liquid film 510, the second liquid film 520, and the third liquid film 530 are It is formed in sequence from the body 210 of the cleaning chamber 200.

The first liquid film 510 and the second liquid film 520 may have a cross-section of a portion where the portions are coupled to each other. For example, the first liquid film 510 has a “c” shape in which the cross section of the portion joining the second liquid film 520 is opened, and the second liquid film 520 is connected to the first liquid film 510. The cross section of the joining part has a "c" shape with an open bottom. Therefore, the first liquid film 510 and the second liquid film 520 are inserted into and coupled to each other in the space provided by the letter “C”.

On the other hand, when the first liquid film 510 formed to be in close contact with the body 210 as the lower liquid film, the second liquid film 520 and the third liquid film 530 are combined to form an upper liquid film formed integrally. Therefore, the upper liquid film formed in duplicate prevents the washing liquid W from leaking out first, and the lower liquid film is finally prevented from leaking the washing liquid W. Therefore, since the upper liquid film, that is, the second liquid film 520 and the third liquid film 530 are formed in two and two stages, it is possible to effectively prevent the cleaning liquid W from leaking. In addition, by effectively preventing the cleaning liquid W from leaking, the overall product yield is improved and the defective rate is reduced.

In addition, an oil film is formed in the channel-shaped groove formed by the first liquid film 510 having a “c” shape with an open upper portion. The oil film may prevent the cleaning liquid W and the mist MIST from leaking to the outside of the cleaning chamber 200.

For example, the flat panel cleaning apparatus 100 further includes an O-ring 540 disposed between the second liquid film 520 and the third liquid film 530 and the rotation shaft 300. The o-ring 540 closely contacts the second liquid film 520 and the third liquid film 530 to the rotation shaft 300. That is, the O-ring 540 is preferably made of an adhesive material. For example, the o-ring 540 is made of a rubber material. Alternatively, the O-ring 540 may be made of various materials as long as the second liquid film 520 and the third liquid film 530 may be in close contact with the rotation shaft 300. On the other hand, the O-ring 540 is formed integrally with, for example, the second liquid film 520 and the third liquid film 530. Alternatively, the O-ring 540 may be formed to be separated from the second liquid film 520 and the third liquid film 530.

According to such a flat panel cleaning apparatus, the flat panel cleaning apparatus includes a double liquid film formed while surrounding the rotating shaft. Therefore, the double liquid membrane can block the leakage of the cleaning liquid primarily and can effectively block the leakage of the cleaning liquid.

In addition, the liquid film has an “c” shape with an open top, and when the oil film is formed in the groove formed by the shape, it is possible to prevent the mist from leaking.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art will be variously modified without departing from the spirit and scope of the invention described in the claims below. And can be changed.

Claims (9)

Body; A rotating shaft disposed through the body and having a long cylindrical shape; A disk-shaped disk brush connected to the rotating shaft and having a plurality of brush hairs formed on a bottom thereof to clean the flat panel; A first liquid film disposed to be in contact with an inner surface of the body in which the disk brush is located while surrounding the rotation shaft, and preventing a cleaning liquid from leaking from the inside of the body; And Flat panel panel cleaning apparatus including at least two second liquid film is coupled to the first liquid film by the interview while surrounding the rotation axis. The flat panel cleaning apparatus according to claim 1, wherein the first liquid film and the second liquid film have a shape of a hollow cylinder having an inner diameter larger than an outer diameter of the rotation shaft. The cross section of the first liquid film in a portion where the first liquid film and the second liquid film are coupled has a shape of a letter 'C' with an open top surface, and a cross section of the second liquid film with an open bottom surface. Flat panel cleaning device, characterized in that the "c" shape. The flat panel cleaning apparatus according to claim 3, wherein the first liquid film and the second liquid film are inserted into and coupled to each other in a space provided by the letter 'C'. The flat panel cleaning apparatus according to claim 1, further comprising a cleaning liquid supply unit for supplying the cleaning liquid to the flat panel. According to claim 5, wherein the cleaning liquid supply unit A cleaning solution supply pipe receiving the cleaning solution from the outside; A cleaning liquid inlet tube formed on the rotating shaft and connected to the cleaning liquid supply pipe to receive the cleaning liquid; And And a cleaning liquid injection port formed on the brush surface and spraying the cleaning liquid supplied from the cleaning liquid injection tube to the flat panel. The flat panel cleaning apparatus according to claim 1, further comprising an O-ring disposed between the second liquid film and the rotating shaft to bring the second liquid film into close contact with the rotating shaft. The flat panel cleaning apparatus according to claim 7, wherein the O-ring is integrally formed with the second liquid film. The flat panel cleaning apparatus according to claim 1, further comprising a driving unit disposed at one end of the rotating shaft to rotate the rotating shaft in a clockwise or counterclockwise direction.

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