KR970022014A - 국부청정실에 공급하는 정화된 저-난류 공기 흐름의 발생장치 - Google Patents
국부청정실에 공급하는 정화된 저-난류 공기 흐름의 발생장치 Download PDFInfo
- Publication number
- KR970022014A KR970022014A KR1019960026826A KR19960026826A KR970022014A KR 970022014 A KR970022014 A KR 970022014A KR 1019960026826 A KR1019960026826 A KR 1019960026826A KR 19960026826 A KR19960026826 A KR 19960026826A KR 970022014 A KR970022014 A KR 970022014A
- Authority
- KR
- South Korea
- Prior art keywords
- air flow
- forced circulation
- wall
- filter
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/007—Ventilation with forced flow
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/20—Casings or covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F7/00—Ventilation
- F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
- F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
Claims (6)
- 장치내에 정화되지 않은 공기의 입구를 위한 일측방과 정화된 공기흐름의 출구를 위한 반대측방을 가진 팬과 여과기가 강제순환실 벽에 의하여 둘러 쌓여져 있고, 벽들중의 하나에는 입구개구를 가지며 팬은 공기를 흡입하기 위한 흡입구에 연결되고 다른 벽에는 출구개구를 가지며 여과기가 정화된 공기 흐름의 출구를 위한 측면에서 이 벽과 접하고 있으며, 국부적인 청정실을 공급하기 위하여 정화된, 저-난류 공기흐름을 생성시키기 위한 장치에 있어서, 출구개구(9), (19)에 반대측에 위치하여진 강제 순환실(1), (16)의 벽이 정화되지 않은 공기 입구를 위한 측면(6)에 인접하고 강제순환실(1), (16)에 있는 나머지 공간과 연통하는 공간(12), (26),(27)을 개방상태로 놓여지는 것을 특징으로 하는 장치.
- 제1항에 있어서, 팬(3)은 정화된 공기흐름(8)의 방향에 수직인 방향으로 여과기 (4)에 인접하고 있는 것을 특징으로 하는 장치.
- 제1항에 있어서, 적어도 한쌍의 팬 (22), (23)이 정화된 공기흐름(21)의 방향에 수직인 방향에서 여과기(20)에 이웃하는 것을 특징으로 하는 장치.
- 제3항에 있어서, 정화되지 않은 공기의 입구를 위한 측면에서 개방된체 놓여진 공간은 팬들(22), (23)의 수에 상응하는 부분적인 공간들(26, 27)로 분활되며 이들 부분공간들(26, 27)은 강제 순환실의 벽(16)과 정화되지 않은 공기의 입구를 위한 측면의 부분들(28, 29)에 의하여 형성되어지며, 여기서 이 분할은 정화된 공기 흐름의 출구를 위한 측면에서는 생략되어지는 것을 특징으로 하는 장치.
- 제1항 내지 제4항 중 어느 하나의 항에 있어서, 진동에 관련하여 밀폐되어지고 격리되어지도록 파지 및 고정요소들이 강제순환실(1), (16)로부터 나오도록 그러한, 이 강제 순환실(1), (16) 외측에서 기초후레임 (2)에서 고정되어지는 파지 및 고정요소(15)들이 각각의 팬(3) (22) (23)에 배열되어져 있는 것을 특징으로 하는 장치.
- 제5항에 있어서, 기초후레임 (2)은 국부청정실을 포함하는 설비유니트(10)를 위한 지지부루서 동시에 역할을 하고, 이 기초후레임 (2)과 설비유니트(10) 사이에는 진동격리시스템(30)이 제공되어지는 것을 특징으로 하는 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19538040A DE19538040C2 (de) | 1995-10-13 | 1995-10-13 | Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume |
| DE19538040.1 | 1995-10-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970022014A true KR970022014A (ko) | 1997-05-28 |
| KR0173766B1 KR0173766B1 (ko) | 1999-03-20 |
Family
ID=7774679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960026826A Expired - Fee Related KR0173766B1 (ko) | 1995-10-13 | 1996-07-03 | 국부청정실에 공급하는 정화된 난류량이 적은 공기흐름 발생장치 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5814116A (ko) |
| EP (1) | EP0768498A3 (ko) |
| JP (1) | JP3091412B2 (ko) |
| KR (1) | KR0173766B1 (ko) |
| DE (1) | DE19538040C2 (ko) |
| SG (1) | SG88724A1 (ko) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6632260B1 (en) | 1999-04-28 | 2003-10-14 | Stratotech Corporation | Adjustable clean-air flow environment |
| US20020071954A1 (en) * | 2000-12-08 | 2002-06-13 | Nelson Christopher R. | Cellulose gypsum based substrate with increased water resistance and strength by surface application of polymeric diphenylmethane diisocyanate |
| DE10351848A1 (de) | 2003-11-06 | 2005-06-09 | Leica Microsystems Semiconductor Gmbh | System zur Detektion von Makrodefekten |
| DE102004062592B3 (de) * | 2004-12-24 | 2006-06-08 | Leica Microsystems Jena Gmbh | System zur Untersuchung eines scheibenförmigen Substrats |
| JP5427833B2 (ja) | 2011-05-18 | 2014-02-26 | パナソニック株式会社 | クリーンルームの逆流防止装置 |
| CN107883508A (zh) * | 2016-09-29 | 2018-04-06 | 殷晓冬 | 装配式和组装式弱湍流集中送风装置 |
| CN111271870A (zh) * | 2020-02-24 | 2020-06-12 | 东莞市利人净化科技有限公司 | 一种带有静压箱的风机过滤器机组 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3251177A (en) * | 1963-05-15 | 1966-05-17 | Arthur K Baker | Dust-free bench |
| US3301167A (en) * | 1964-05-04 | 1967-01-31 | Ray Products Company Inc | Anticontaminant work bench |
| US3290866A (en) * | 1964-08-26 | 1966-12-13 | Schonrock Verlie | Evaporative cooler |
| US3284148A (en) * | 1965-02-24 | 1966-11-08 | Ramniceanu Tiberiu Justinian | Blower-contained vibration-free work bench |
| DE2138985A1 (de) * | 1971-08-04 | 1973-02-15 | Buettner Schilde Haas Ag | Belueftungseinrichtung |
| US3828530A (en) * | 1971-09-01 | 1974-08-13 | M Peters | Filter system |
| US3935803A (en) * | 1972-10-12 | 1976-02-03 | Flanders Filters, Inc. | Air filtration apparatus |
| CA988357A (en) * | 1973-01-26 | 1976-05-04 | Her Majesty The Queen, In Right Of Canada, As Represented By The Minister Of National Defence | Back table clean station |
| US3838556A (en) * | 1973-04-06 | 1974-10-01 | Med Assists Inc | Air filtration device with oriented output |
| JPS5520886B2 (ko) * | 1974-04-26 | 1980-06-05 | ||
| JPS51136570A (en) * | 1975-05-22 | 1976-11-26 | Mitsubishi Heavy Ind Ltd | Coarse packed bed |
| JPS52142851A (en) * | 1976-05-22 | 1977-11-29 | Hosokawa Kankiyou Enjiniaringu | Distribution controlled air feeder assembled in interior building structure |
| US4412849A (en) * | 1981-04-09 | 1983-11-01 | Klenzaids Engineers Private Limited | Method and apparatus for control of gas-borne particulates |
| DE3484603D1 (de) * | 1983-12-16 | 1991-06-20 | Nitta Co | Luftreiniger. |
| US4560395A (en) * | 1984-04-17 | 1985-12-24 | Environmental Air Control, Inc. | Compact blower and filter assemblies for use in clean air environments |
| JPS6171829A (ja) * | 1984-09-14 | 1986-04-12 | Fuji Electric Co Ltd | 移動磁界式処理装置 |
| JPS61175834A (ja) * | 1985-01-31 | 1986-08-07 | Toshiba Corp | マイクロプログラムデバツグ機能付きデ−タ処理装置 |
| JPS61175834U (ko) * | 1985-04-22 | 1986-11-01 | ||
| JPS62183832A (ja) * | 1985-10-23 | 1987-08-12 | Hitachi Ltd | 半導体製造装置 |
| DE8805774U1 (de) * | 1988-04-30 | 1988-06-23 | Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld | Tunnelmodul zum Aufbau eines Reinraumes in Laminar-Flow-Technik |
| US5053065A (en) * | 1988-05-16 | 1991-10-01 | Garay Charles J | Low-profile blower and filter apparatus for supplying clean air |
| JPH02183832A (ja) * | 1989-01-11 | 1990-07-18 | Nec Corp | 推論処理装置 |
| DE4122582C2 (de) * | 1991-07-08 | 1994-12-15 | Babcock Bsh Ag | Modul zum Aufbau einer Reinraumdecke |
| DE4303805A1 (en) * | 1992-02-12 | 1993-09-09 | Helios Klima Kaelte | Supporting frame for air conditioning plant - comprises inner frame attached to outer frame by continuous rubber bead or by six rocker bolts |
| JP3309416B2 (ja) * | 1992-02-13 | 2002-07-29 | 松下電器産業株式会社 | 連結式クリーン空間装置 |
| KR970006728B1 (ko) * | 1992-08-31 | 1997-04-29 | 마쯔시다 덴기 산교 가부시끼가이샤 | 환경제어장치 |
| DE4236031C2 (de) * | 1992-10-24 | 1996-07-11 | Jenoptik Jena Gmbh | Vorrichtung zur Erzeugung eines Reinluftstromes |
| DE4238895C1 (de) * | 1992-11-19 | 1993-12-16 | Howatherm Klimatech Gmbh | Ventilatoraggregat zum Einbau in einen Luftkanal eines raumlufttechnischen Gerätes |
| US5413524A (en) * | 1993-02-09 | 1995-05-09 | Kabushiki Kaisha Nikko | Method of taking out viscera of fish and apparatus thereof |
-
1995
- 1995-10-13 DE DE19538040A patent/DE19538040C2/de not_active Expired - Fee Related
-
1996
- 1996-05-07 EP EP96107219A patent/EP0768498A3/de not_active Withdrawn
- 1996-06-01 SG SG9609946A patent/SG88724A1/en unknown
- 1996-06-07 JP JP08145635A patent/JP3091412B2/ja not_active Expired - Fee Related
- 1996-06-13 US US08/663,486 patent/US5814116A/en not_active Expired - Fee Related
- 1996-07-03 KR KR1019960026826A patent/KR0173766B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| SG88724A1 (en) | 2002-05-21 |
| JP3091412B2 (ja) | 2000-09-25 |
| EP0768498A2 (de) | 1997-04-16 |
| DE19538040A1 (de) | 1997-04-17 |
| US5814116A (en) | 1998-09-29 |
| KR0173766B1 (ko) | 1999-03-20 |
| DE19538040C2 (de) | 1998-08-13 |
| JPH09126511A (ja) | 1997-05-16 |
| EP0768498A3 (de) | 1999-11-24 |
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