KR970022014A - 국부청정실에 공급하는 정화된 저-난류 공기 흐름의 발생장치 - Google Patents

국부청정실에 공급하는 정화된 저-난류 공기 흐름의 발생장치 Download PDF

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Publication number
KR970022014A
KR970022014A KR1019960026826A KR19960026826A KR970022014A KR 970022014 A KR970022014 A KR 970022014A KR 1019960026826 A KR1019960026826 A KR 1019960026826A KR 19960026826 A KR19960026826 A KR 19960026826A KR 970022014 A KR970022014 A KR 970022014A
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South Korea
Prior art keywords
air flow
forced circulation
wall
filter
inlet
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KR1019960026826A
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KR0173766B1 (ko
Inventor
슈나이더 하인츠
슐츠 클라우스
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훨커 웸케
예놉틱 악틴게젤샤프트
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/007Ventilation with forced flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/20Casings or covers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28Arrangement or mounting of filters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00Ventilation
    • F24F7/04Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

국부청정실을 공급하기 위한 정화된 저-난류 공기흐름을 생성시켜주기 위한 장치의 목적은 공조장치의 구조 깊이를 줄이고 덧붙여서, 단순한 장치에 의하여 공기흐름발생장치로부터 공급되어질, 설비장치유니트로의 진동전달을 광범위하게 방지하는 것이다. 발명에 따라서, 강제순환실의 출구개구에 반대하게 위치하여진 강제순환실의 벽이 정화되지 않은 공기의 입구를 위한 측면에서 강제순환실 내에 내장된 여과기와 인접한다. 벽과 여과기 사이에 공간이 개방된 상태로 남아있게 된다. 이 공간은 강제순환실내의 나머지 공간과 연통하고 주로 강제순환을 형성하는 역할을 한다. 본 발명은 직접회로의 제작에 적용가능하다.

Description

국부청정실에 공급하는 정화된 저-난류 공기 흐름의 발생장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 국부 청정실을 가지는 설비유니트에 연결된 여과기-팬을 보여준다.

Claims (6)

  1. 장치내에 정화되지 않은 공기의 입구를 위한 일측방과 정화된 공기흐름의 출구를 위한 반대측방을 가진 팬과 여과기가 강제순환실 벽에 의하여 둘러 쌓여져 있고, 벽들중의 하나에는 입구개구를 가지며 팬은 공기를 흡입하기 위한 흡입구에 연결되고 다른 벽에는 출구개구를 가지며 여과기가 정화된 공기 흐름의 출구를 위한 측면에서 이 벽과 접하고 있으며, 국부적인 청정실을 공급하기 위하여 정화된, 저-난류 공기흐름을 생성시키기 위한 장치에 있어서, 출구개구(9), (19)에 반대측에 위치하여진 강제 순환실(1), (16)의 벽이 정화되지 않은 공기 입구를 위한 측면(6)에 인접하고 강제순환실(1), (16)에 있는 나머지 공간과 연통하는 공간(12), (26),(27)을 개방상태로 놓여지는 것을 특징으로 하는 장치.
  2. 제1항에 있어서, 팬(3)은 정화된 공기흐름(8)의 방향에 수직인 방향으로 여과기 (4)에 인접하고 있는 것을 특징으로 하는 장치.
  3. 제1항에 있어서, 적어도 한쌍의 팬 (22), (23)이 정화된 공기흐름(21)의 방향에 수직인 방향에서 여과기(20)에 이웃하는 것을 특징으로 하는 장치.
  4. 제3항에 있어서, 정화되지 않은 공기의 입구를 위한 측면에서 개방된체 놓여진 공간은 팬들(22), (23)의 수에 상응하는 부분적인 공간들(26, 27)로 분활되며 이들 부분공간들(26, 27)은 강제 순환실의 벽(16)과 정화되지 않은 공기의 입구를 위한 측면의 부분들(28, 29)에 의하여 형성되어지며, 여기서 이 분할은 정화된 공기 흐름의 출구를 위한 측면에서는 생략되어지는 것을 특징으로 하는 장치.
  5. 제1항 내지 제4항 중 어느 하나의 항에 있어서, 진동에 관련하여 밀폐되어지고 격리되어지도록 파지 및 고정요소들이 강제순환실(1), (16)로부터 나오도록 그러한, 이 강제 순환실(1), (16) 외측에서 기초후레임 (2)에서 고정되어지는 파지 및 고정요소(15)들이 각각의 팬(3) (22) (23)에 배열되어져 있는 것을 특징으로 하는 장치.
  6. 제5항에 있어서, 기초후레임 (2)은 국부청정실을 포함하는 설비유니트(10)를 위한 지지부루서 동시에 역할을 하고, 이 기초후레임 (2)과 설비유니트(10) 사이에는 진동격리시스템(30)이 제공되어지는 것을 특징으로 하는 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960026826A 1995-10-13 1996-07-03 국부청정실에 공급하는 정화된 난류량이 적은 공기흐름 발생장치 Expired - Fee Related KR0173766B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19538040A DE19538040C2 (de) 1995-10-13 1995-10-13 Einrichtung zur Erzeugung eines gereinigten, turbulenzarmen Luftstromes zur Versorgung lokaler Reinräume
DE19538040.1 1995-10-13

Publications (2)

Publication Number Publication Date
KR970022014A true KR970022014A (ko) 1997-05-28
KR0173766B1 KR0173766B1 (ko) 1999-03-20

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960026826A Expired - Fee Related KR0173766B1 (ko) 1995-10-13 1996-07-03 국부청정실에 공급하는 정화된 난류량이 적은 공기흐름 발생장치

Country Status (6)

Country Link
US (1) US5814116A (ko)
EP (1) EP0768498A3 (ko)
JP (1) JP3091412B2 (ko)
KR (1) KR0173766B1 (ko)
DE (1) DE19538040C2 (ko)
SG (1) SG88724A1 (ko)

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DE102004062592B3 (de) * 2004-12-24 2006-06-08 Leica Microsystems Jena Gmbh System zur Untersuchung eines scheibenförmigen Substrats
JP5427833B2 (ja) 2011-05-18 2014-02-26 パナソニック株式会社 クリーンルームの逆流防止装置
CN107883508A (zh) * 2016-09-29 2018-04-06 殷晓冬 装配式和组装式弱湍流集中送风装置
CN111271870A (zh) * 2020-02-24 2020-06-12 东莞市利人净化科技有限公司 一种带有静压箱的风机过滤器机组

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Also Published As

Publication number Publication date
SG88724A1 (en) 2002-05-21
JP3091412B2 (ja) 2000-09-25
EP0768498A2 (de) 1997-04-16
DE19538040A1 (de) 1997-04-17
US5814116A (en) 1998-09-29
KR0173766B1 (ko) 1999-03-20
DE19538040C2 (de) 1998-08-13
JPH09126511A (ja) 1997-05-16
EP0768498A3 (de) 1999-11-24

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