KR970046830U - Air valve opening/closing confirmation device - Google Patents

Air valve opening/closing confirmation device

Info

Publication number
KR970046830U
KR970046830U KR2019950040667U KR19950040667U KR970046830U KR 970046830 U KR970046830 U KR 970046830U KR 2019950040667 U KR2019950040667 U KR 2019950040667U KR 19950040667 U KR19950040667 U KR 19950040667U KR 970046830 U KR970046830 U KR 970046830U
Authority
KR
South Korea
Prior art keywords
valve opening
air valve
confirmation device
closing confirmation
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR2019950040667U
Other languages
Korean (ko)
Other versions
KR0132426Y1 (en
Inventor
유도영
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950040667U priority Critical patent/KR0132426Y1/en
Publication of KR970046830U publication Critical patent/KR970046830U/en
Application granted granted Critical
Publication of KR0132426Y1 publication Critical patent/KR0132426Y1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0402Apparatus for fluid treatment
KR2019950040667U 1995-12-13 1995-12-13 Air valve apparatus Expired - Fee Related KR0132426Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950040667U KR0132426Y1 (en) 1995-12-13 1995-12-13 Air valve apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950040667U KR0132426Y1 (en) 1995-12-13 1995-12-13 Air valve apparatus

Publications (2)

Publication Number Publication Date
KR970046830U true KR970046830U (en) 1997-07-31
KR0132426Y1 KR0132426Y1 (en) 1999-02-01

Family

ID=19433678

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950040667U Expired - Fee Related KR0132426Y1 (en) 1995-12-13 1995-12-13 Air valve apparatus

Country Status (1)

Country Link
KR (1) KR0132426Y1 (en)

Also Published As

Publication number Publication date
KR0132426Y1 (en) 1999-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

UA0108 Application for utility model registration

St.27 status event code: A-0-1-A10-A12-nap-UA0108

UA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-UA0201

UG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-UG1501

E701 Decision to grant or registration of patent right
UE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-UE0701

UR1002 Payment of registration fee

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Fee payment year number: 1

REGI Registration of establishment
UR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-UR0701

UG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-UG1601

UN2301 Change of applicant

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UR1001 Payment of annual fee

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Not in force date: 20050927

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

UC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-UC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

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P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000