KR970046830U - 에어밸브의 개폐확인장치 - Google Patents

에어밸브의 개폐확인장치

Info

Publication number
KR970046830U
KR970046830U KR2019950040667U KR19950040667U KR970046830U KR 970046830 U KR970046830 U KR 970046830U KR 2019950040667 U KR2019950040667 U KR 2019950040667U KR 19950040667 U KR19950040667 U KR 19950040667U KR 970046830 U KR970046830 U KR 970046830U
Authority
KR
South Korea
Prior art keywords
valve opening
air valve
confirmation device
closing confirmation
closing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR2019950040667U
Other languages
English (en)
Other versions
KR0132426Y1 (ko
Inventor
유도영
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950040667U priority Critical patent/KR0132426Y1/ko
Publication of KR970046830U publication Critical patent/KR970046830U/ko
Application granted granted Critical
Publication of KR0132426Y1 publication Critical patent/KR0132426Y1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
KR2019950040667U 1995-12-13 1995-12-13 에어밸브의 개폐확인장치 Expired - Fee Related KR0132426Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950040667U KR0132426Y1 (ko) 1995-12-13 1995-12-13 에어밸브의 개폐확인장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950040667U KR0132426Y1 (ko) 1995-12-13 1995-12-13 에어밸브의 개폐확인장치

Publications (2)

Publication Number Publication Date
KR970046830U true KR970046830U (ko) 1997-07-31
KR0132426Y1 KR0132426Y1 (ko) 1999-02-01

Family

ID=19433678

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950040667U Expired - Fee Related KR0132426Y1 (ko) 1995-12-13 1995-12-13 에어밸브의 개폐확인장치

Country Status (1)

Country Link
KR (1) KR0132426Y1 (ko)

Also Published As

Publication number Publication date
KR0132426Y1 (ko) 1999-02-01

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