KR970052009A - 경광등이 부착된 n_2 레벨 센서 - Google Patents

경광등이 부착된 n_2 레벨 센서 Download PDF

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Publication number
KR970052009A
KR970052009A KR1019950065730A KR19950065730A KR970052009A KR 970052009 A KR970052009 A KR 970052009A KR 1019950065730 A KR1019950065730 A KR 1019950065730A KR 19950065730 A KR19950065730 A KR 19950065730A KR 970052009 A KR970052009 A KR 970052009A
Authority
KR
South Korea
Prior art keywords
level sensor
sensor
nitrogen gas
level
warning lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019950065730A
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English (en)
Inventor
변주상
고용림
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950065730A priority Critical patent/KR970052009A/ko
Publication of KR970052009A publication Critical patent/KR970052009A/ko
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/14—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
    • G01F23/16—Indicating, recording, or alarm devices being actuated by mechanical or fluid means, e.g. using gas, mercury, or a diaphragm as transmitting element, or by a column of liquid
    • G01F23/165—Indicating, recording, or alarm devices being actuated by mechanical or fluid means, e.g. using gas, mercury, or a diaphragm as transmitting element, or by a column of liquid of bubbler type
    • G01F23/168—Indicating, recording, or alarm devices being actuated by mechanical or fluid means, e.g. using gas, mercury, or a diaphragm as transmitting element, or by a column of liquid of bubbler type with electric indicating or recording
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

본 발명은 반도체 제조 설비(SUGAI WET STATION)에서 사용되고 있는 질소 가스(N2GAS)의 레벨 확인용 센서에 관한 것으로써, 특히 센서 내부의 인식과 동시에 외부 작업자에게도 그 감지 여부가 인식되게 하여 감도 조정을 용이하게 한 경광등이 부착된 N2레벨 센서에 관한 것으로 반도체 웨이퍼의 세정 액조에 투입되는 질소 가스의 공급량을 인식하기 위한 N2레벨 센서에 있어서, N2압력에 따라 작동되는 마이크로 접점 스위치와 연결되어, 외부로의 식별이 가능하도록 온/오프 동작될 수 있는 경광등을 구비하여 센서 자체와 작업자에 의한 N2의 정량 관리가 이루어짐을 특징으로 하는 경광등이 부착된 N2레벨 센서.

Description

경광등이 부착된 N 레벨 센서
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따라 경광등이 부착된 N2레벨 센서의 구성을 도시한 사시도.

Claims (1)

  1. 반도체 웨이퍼의 세정 액조에 투입되는 질소 가스의 공급량을 인식하기 위한 N2레벨 센서에 있어서, N2압력에 따라 작동되는 마이크로 접점 스위치와 연결되어, 외부로의 식별이 가능하도록 온/오프 동작될 수 있는 경광등을 구비하여 센서 자체와 작업자에 의한 N2의 정량 관리가 이루어짐을 특징으로 하는 경광등이 부착된 N2레벨 센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950065730A 1995-12-29 1995-12-29 경광등이 부착된 n_2 레벨 센서 Ceased KR970052009A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950065730A KR970052009A (ko) 1995-12-29 1995-12-29 경광등이 부착된 n_2 레벨 센서

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950065730A KR970052009A (ko) 1995-12-29 1995-12-29 경광등이 부착된 n_2 레벨 센서

Publications (1)

Publication Number Publication Date
KR970052009A true KR970052009A (ko) 1997-07-29

Family

ID=66624112

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950065730A Ceased KR970052009A (ko) 1995-12-29 1995-12-29 경광등이 부착된 n_2 레벨 센서

Country Status (1)

Country Link
KR (1) KR970052009A (ko)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920003034A (ko) * 1990-07-03 1992-02-29 김진희 가스 종합 감시기 및 계량기
KR920004683U (ko) * 1990-08-29 1992-03-26 삼성전자 주식회사 가스배관의 가스유무 표시장치
KR940023193U (ko) * 1993-03-16 1994-10-22 주식회사 공영종합시스템 가스공급유량 측정장치
JPH0758071A (ja) * 1993-08-20 1995-03-03 Tokico Ltd 液管理装置
KR950009234A (ko) * 1993-09-07 1995-04-21 문정환 고압가스압력 측정장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR920003034A (ko) * 1990-07-03 1992-02-29 김진희 가스 종합 감시기 및 계량기
KR920004683U (ko) * 1990-08-29 1992-03-26 삼성전자 주식회사 가스배관의 가스유무 표시장치
KR940023193U (ko) * 1993-03-16 1994-10-22 주식회사 공영종합시스템 가스공급유량 측정장치
JPH0758071A (ja) * 1993-08-20 1995-03-03 Tokico Ltd 液管理装置
KR950009234A (ko) * 1993-09-07 1995-04-21 문정환 고압가스압력 측정장치

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