KR970077126A - Modified illumination method by improved fly-eye lens - Google Patents

Modified illumination method by improved fly-eye lens Download PDF

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Publication number
KR970077126A
KR970077126A KR1019960016251A KR19960016251A KR970077126A KR 970077126 A KR970077126 A KR 970077126A KR 1019960016251 A KR1019960016251 A KR 1019960016251A KR 19960016251 A KR19960016251 A KR 19960016251A KR 970077126 A KR970077126 A KR 970077126A
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KR
South Korea
Prior art keywords
fly
modified illumination
illumination method
eye lens
modified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
KR1019960016251A
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Korean (ko)
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KR100213200B1 (en
Inventor
손창진
Original Assignee
김광호
삼성전자 주식회사
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Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960016251A priority Critical patent/KR100213200B1/en
Publication of KR970077126A publication Critical patent/KR970077126A/en
Application granted granted Critical
Publication of KR100213200B1 publication Critical patent/KR100213200B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

개량된 파리눈젠즈에 의한 변형조명법이 개시되어 있다.A modified illumination method by improved fliescentries is disclosed.

파리눈렌즈의 앞단에 다수의 홀로 이루어진 변형조명용 구경을 설치하는 변형조명법에 있어서, 변형조명용 구경의 홀에 대응하도록 각각 독립된 파리눈렌즈를 배열하여 렌즈군을 형성한다. 파리눈렌즈의 끝단을 변형조명용 구경의 끝단에 정확하게 일치시킬 수 있어, 빔 균일도를 개선시킬 수 있다.In a modified illumination method in which a bore for a modified illumination consisting of a plurality of holes is provided at the front end of a fly-eye lens, independent fly-eye lenses are arranged so as to correspond to holes of a bore for modified illumination to form a lens group. The end of the fly-eye lens can be precisely aligned with the end of the bore for deformed illumination, and the beam uniformity can be improved.

Description

개량된 파리눈렌즈에 의한 변형조명법Modified illumination method by improved fly-eye lens

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제5도는 본 발명에 의한 사입사 조명법을 나타내는 개략도.FIG. 5 is a schematic view showing the incidence incidence illumination method according to the present invention; FIG.

Claims (3)

파리눈렌즈의 앞단에 다수의 홀로 이루어진 변형조명용 구경을 설치하는 변형조명법에 있어서, 상기 변형조명용 구경의 홀에 대응하도록 각각 독립된 파리눈렌즈를 배열하여 렌즈군을 형성하는 것을 특징으로 하는 변형조명법.A deformed illumination method comprising the steps of: forming a plurality of holes in a front end of a fly-eye lens, the modified fly's eye lens being arranged so as to correspond to holes of the aperture for the modified illumination, thereby forming a lens group. 제1항에 있어서, 상기 변형조명용 구경의 홀에 대응되는 렌즈군은 인접한 다른 렌즈군과의 사이에 소정의 간격을 갖도록 형성하는 것을 특징으로 하는 변형조명법.2. The modified illumination method according to claim 1, wherein the lens group corresponding to the hole of the bore for deformed illumination is formed so as to have a predetermined gap with another adjacent lens group. 제1항에 있어서, 상기 변형조명용 구경의 종류에 따라 상기 파리눈렌즈의 갯수 및 배열을 조절하는 것을 특징으로 하는 변형조명법.The deformed illumination method according to claim 1, wherein the number and arrangement of the fly-eye lenses are adjusted according to the type of aperture for the modified illumination. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960016251A 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens Expired - Fee Related KR100213200B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

Publications (2)

Publication Number Publication Date
KR970077126A true KR970077126A (en) 1997-12-12
KR100213200B1 KR100213200B1 (en) 1999-08-02

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ID=19458793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016251A Expired - Fee Related KR100213200B1 (en) 1996-05-15 1996-05-15 Modified illumination method using improved fly eye lens

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (en) * 1999-06-17 2003-06-25 한국전자통신연구원 Off axis illumination aperture having fly eye lens and method for forming the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (en) * 1999-06-17 2003-06-25 한국전자통신연구원 Off axis illumination aperture having fly eye lens and method for forming the same

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KR100213200B1 (en) 1999-08-02

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