KR970077126A - 개량된 파리눈렌즈에 의한 변형조명법 - Google Patents

개량된 파리눈렌즈에 의한 변형조명법 Download PDF

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Publication number
KR970077126A
KR970077126A KR1019960016251A KR19960016251A KR970077126A KR 970077126 A KR970077126 A KR 970077126A KR 1019960016251 A KR1019960016251 A KR 1019960016251A KR 19960016251 A KR19960016251 A KR 19960016251A KR 970077126 A KR970077126 A KR 970077126A
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KR
South Korea
Prior art keywords
fly
modified illumination
illumination method
eye lens
modified
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KR1019960016251A
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English (en)
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KR100213200B1 (ko
Inventor
손창진
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김광호
삼성전자 주식회사
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Priority to KR1019960016251A priority Critical patent/KR100213200B1/ko
Publication of KR970077126A publication Critical patent/KR970077126A/ko
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Publication of KR100213200B1 publication Critical patent/KR100213200B1/ko
Anticipated expiration legal-status Critical
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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)

Abstract

개량된 파리눈젠즈에 의한 변형조명법이 개시되어 있다.
파리눈렌즈의 앞단에 다수의 홀로 이루어진 변형조명용 구경을 설치하는 변형조명법에 있어서, 변형조명용 구경의 홀에 대응하도록 각각 독립된 파리눈렌즈를 배열하여 렌즈군을 형성한다. 파리눈렌즈의 끝단을 변형조명용 구경의 끝단에 정확하게 일치시킬 수 있어, 빔 균일도를 개선시킬 수 있다.

Description

개량된 파리눈렌즈에 의한 변형조명법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제5도는 본 발명에 의한 사입사 조명법을 나타내는 개략도.

Claims (3)

  1. 파리눈렌즈의 앞단에 다수의 홀로 이루어진 변형조명용 구경을 설치하는 변형조명법에 있어서, 상기 변형조명용 구경의 홀에 대응하도록 각각 독립된 파리눈렌즈를 배열하여 렌즈군을 형성하는 것을 특징으로 하는 변형조명법.
  2. 제1항에 있어서, 상기 변형조명용 구경의 홀에 대응되는 렌즈군은 인접한 다른 렌즈군과의 사이에 소정의 간격을 갖도록 형성하는 것을 특징으로 하는 변형조명법.
  3. 제1항에 있어서, 상기 변형조명용 구경의 종류에 따라 상기 파리눈렌즈의 갯수 및 배열을 조절하는 것을 특징으로 하는 변형조명법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960016251A 1996-05-15 1996-05-15 개량된 파리눈렌즈에 의한 변형조명법 Expired - Fee Related KR100213200B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (ko) 1996-05-15 1996-05-15 개량된 파리눈렌즈에 의한 변형조명법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016251A KR100213200B1 (ko) 1996-05-15 1996-05-15 개량된 파리눈렌즈에 의한 변형조명법

Publications (2)

Publication Number Publication Date
KR970077126A true KR970077126A (ko) 1997-12-12
KR100213200B1 KR100213200B1 (ko) 1999-08-02

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ID=19458793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016251A Expired - Fee Related KR100213200B1 (ko) 1996-05-15 1996-05-15 개량된 파리눈렌즈에 의한 변형조명법

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KR (1) KR100213200B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (ko) * 1999-06-17 2003-06-25 한국전자통신연구원 파리눈 렌즈를 구비하는 사입사 조명계 및 그 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100388490B1 (ko) * 1999-06-17 2003-06-25 한국전자통신연구원 파리눈 렌즈를 구비하는 사입사 조명계 및 그 제조 방법

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Publication number Publication date
KR100213200B1 (ko) 1999-08-02

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