KR970077272A - Ultrasonic brush cleaning device - Google Patents

Ultrasonic brush cleaning device Download PDF

Info

Publication number
KR970077272A
KR970077272A KR1019960016565A KR19960016565A KR970077272A KR 970077272 A KR970077272 A KR 970077272A KR 1019960016565 A KR1019960016565 A KR 1019960016565A KR 19960016565 A KR19960016565 A KR 19960016565A KR 970077272 A KR970077272 A KR 970077272A
Authority
KR
South Korea
Prior art keywords
brush
cleaning
ultrasonic
cleaning liquid
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019960016565A
Other languages
Korean (ko)
Inventor
우상석
변주상
이광열
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960016565A priority Critical patent/KR970077272A/en
Publication of KR970077272A publication Critical patent/KR970077272A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

세척액 초음파를 가해 주면 초음파의 진동에 의해서 세척액의 운동이 활발해지므로 브러쉬에 붙어 있는 이물질을 효과적으로 제거하여 웨이퍼 수율을 향상시킬 수 있고, 또한, 브러쉬에 붙어 있는 이물질을 효과적으로 제거됨으로써 브러쉬의 수명이 연장되어 노동력이 절감됨가 아울러 생산성을 향상시킬 수 있다.When the ultrasonic wave is applied to the cleaning liquid, the movement of the cleaning liquid becomes active due to the vibration of the ultrasonic wave. Therefore, the foreign substances attached to the brush can be effectively removed to improve the yield of the wafers. Further, Labor force can be saved and productivity can be improved.

Description

초음파를 이용한 브러쉬 세척 장치Ultrasonic brush cleaning device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도 (A)는 본 발명에 의한 초음파를 이용한 브러쉬 세척 장치의 구조를 나타낸 단면도이고, (B)는 초음파 장치에 있어서 발진판의 구조를 나타낸 부분 확대도.Fig. 2 (A) is a cross-sectional view showing the structure of a brush cleaning device using ultrasonic waves according to the present invention, and Fig. 2 (B) is a partially enlarged view showing the structure of an oscillation plate in an ultrasonic device.

Claims (7)

오염된 브러쉬를 세척하기 위한 세척조와, 상기 세척조에 투입되는 브러쉬부와, 상기 세척조의 일측에 형성되어 상기 브러쉬부를 세척하기 위해 세척액을 공급하여 분사하는 세척액 공급수단으로 구성된 브러쉬 세척 장치에 있어서, 상기 세척액 공급수단은 상기 세척액을 공급하는 공급관과, 상기 공급관에 연통되어 상기 공급관에 공급되는 세척액의 운동량을 증가시키는 초음파 장치로 구성된 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.A brush cleaning apparatus comprising: a cleaning tank for cleaning a contaminated brush; a brush unit to be inserted into the cleaning tank; and a cleaning liquid supply unit formed on one side of the cleaning tank for supplying and discharging a cleaning liquid to clean the brush unit, Wherein the cleaning liquid supply means comprises a supply pipe for supplying the cleaning liquid and an ultrasonic device communicating with the supply pipe to increase the amount of movement of the cleaning liquid supplied to the supply pipe. 제1항에 있어서, 상기 세척액 고급수단은 상기 부러쉬부의 상기 세척조로의 투입여부에 따라 상기 초음파 장치를 제어하는 제어수단을 더 포함하는 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.The apparatus according to claim 1, wherein the cleaning liquid advanced means further comprises control means for controlling the ultrasonic device according to whether the brush portion is inserted into the cleaning tank. 제1항에 있어서, 상기 제어수단은 상기 브러쉬부가 상기 세척조로의 투입여부를 감지하는 감지부와, 상기 감지부로부터 신호를 입력받아 상기 초음파 장치로 공급되는 전원을 제어하는 제어부로 구성된 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.The ultrasound system according to claim 1, wherein the control unit comprises: a sensing unit for sensing whether the brush unit is inserted into the cleaning tank; and a controller for controlling power supplied to the ultrasonic apparatus upon receipt of a signal from the sensing unit A brush cleaning device using ultrasonic waves. 제3항에 있어서, 상기 감지부는 근접센서인 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.[5] The apparatus of claim 3, wherein the sensing unit is a proximity sensor. 제1항 내지 제4항 중 어느 한 항에 있어서, 상기 초음파 장치는 중앙에 상기 공급관인 관통 연장된 분사헤드와, 상기 분사헤드 내부에 관통 형성된 초음파 전달관과, 상기 초음파 전달관의 일측 단부에 형성된 발진판과, 상기 초음파 전달관의 하측 단부에 연통된 집합관으로 구성되며 상기 집합관은 상기 공급관과 연통되는 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.5. The ultrasonic diagnostic apparatus according to any one of claims 1 to 4, wherein the ultrasonic device comprises: an injection head extending through the feed tube at a center; an ultrasonic transmission tube penetrating the inside of the injection head; And a collecting tube communicated with a lower end of the ultrasonic wave transmission tube, the collecting tube being in communication with the supply tube. 제5항에 있어서, 상기 분사헤드는 상기 테이퍼 형상인 것을 특징으로 하는 초음파를 이용한 브러쉬 세척 장치.6. The brush cleaning apparatus according to claim 5, wherein the ejection head has the tapered shape. 제6항에 있어서, 상기 집합관은 역 테이퍼 형상인 것을 초음파를 이용한 브러쉬 세적 장치.7. The brush device as claimed in claim 6, wherein the collecting tube has an inverted tapered shape. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960016565A 1996-05-17 1996-05-17 Ultrasonic brush cleaning device Withdrawn KR970077272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960016565A KR970077272A (en) 1996-05-17 1996-05-17 Ultrasonic brush cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960016565A KR970077272A (en) 1996-05-17 1996-05-17 Ultrasonic brush cleaning device

Publications (1)

Publication Number Publication Date
KR970077272A true KR970077272A (en) 1997-12-12

Family

ID=66219587

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960016565A Withdrawn KR970077272A (en) 1996-05-17 1996-05-17 Ultrasonic brush cleaning device

Country Status (1)

Country Link
KR (1) KR970077272A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030051210A (en) * 2002-10-31 2003-06-25 (주)홍익 하이엠 Apparatus for washing a brush for cleaning surface of a cathode ray tube
KR20050070767A (en) * 2003-12-30 2005-07-07 동부아남반도체 주식회사 An apparatus for eliminating particle of cleaning member of semiconductor wafer
KR100719369B1 (en) * 2005-07-06 2007-05-17 삼성전자주식회사 Brush wetting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030051210A (en) * 2002-10-31 2003-06-25 (주)홍익 하이엠 Apparatus for washing a brush for cleaning surface of a cathode ray tube
KR20050070767A (en) * 2003-12-30 2005-07-07 동부아남반도체 주식회사 An apparatus for eliminating particle of cleaning member of semiconductor wafer
KR100719369B1 (en) * 2005-07-06 2007-05-17 삼성전자주식회사 Brush wetting device

Similar Documents

Publication Publication Date Title
US7549429B2 (en) Ultrasonic washing device
US4135670A (en) Shower device
EP1149637A3 (en) Horn for ultrasonic cleaning apparatus
EP2275175A3 (en) Thermal treatment apparatus with focused energy application
CA2645933A1 (en) Megasonic processing apparatus with frequency sweeping of thickness mode transducers
WO2003024522A3 (en) Method for cleaning skin
EP0346496A4 (en) Excreting apparatus.
AU6213498A (en) Cleaning device for a dry shaver
ATE541646T1 (en) SPRAY DEVICE
SE8703458D0 (en) ULTRASOUND KNIFE
AU6213198A (en) Cleaning device for a dry shaver
HU9800508D0 (en) Device for vibratory dispensing of liquid
RU97117159A (en) ULTRASONIC PROBE
KR970077272A (en) Ultrasonic brush cleaning device
US4180886A (en) Windshield wiper system
JPH049670A (en) Analyzing apparatus
JP2002186921A (en) Ultrasonic cleaning equipment
JP2004305894A (en) Ultrasonic soil eliminator
JPH10305248A (en) Liquid jetting device using ultrasonic wave
JPS56106868A (en) Clearing method for clogging of ink jet head and device thereof
JPS6125899Y2 (en)
JPS63216558A (en) Ultrasonic treatment apparatus
JPH10202207A (en) Automatic washing device by ejecting water
JPH0570382U (en) Water soap discharge nozzle
JP4810912B2 (en) Mist cleaning method and mist cleaning device

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000