KR970077465A - 반도체웨이퍼 탑재용 캐리어 - Google Patents

반도체웨이퍼 탑재용 캐리어 Download PDF

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Publication number
KR970077465A
KR970077465A KR1019960018029A KR19960018029A KR970077465A KR 970077465 A KR970077465 A KR 970077465A KR 1019960018029 A KR1019960018029 A KR 1019960018029A KR 19960018029 A KR19960018029 A KR 19960018029A KR 970077465 A KR970077465 A KR 970077465A
Authority
KR
South Korea
Prior art keywords
carrier
wafer
mounting
wafers
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
KR1019960018029A
Other languages
English (en)
Inventor
박홍식
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960018029A priority Critical patent/KR970077465A/ko
Publication of KR970077465A publication Critical patent/KR970077465A/ko
Abandoned legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/15—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

다수매의 웨이퍼를 하나의 공정에서 다른 공정으로 운반하거나 특정공정시 다수매의 웨이퍼를 로트(Lot)단위로 수행하기 위해 다수매의 웨이퍼를 탑재하는 캐리어에 관한 것이다.
본 발명의 구성은 웨이퍼를 끼워 탑재시킬 수 있도록 다수개의 슬롯이 형성된 양측벽과, 상기 양측벽을 있는 전방측벽 및 후방측 보강대로 구성된 반도체웨이퍼 탑재용 캐리어에 있어서, 상기 전방측벽의 높이를 상단부까지 형성하여 웨이퍼의 앞면이 외부와 차단되도록 구성된 것이다.
따라서, 캐리어의 전방측벽으로부터 첫번째에 위치한 웨이퍼도 다른 웨이퍼와 마찬가지로 동일한 조건에서 공정이 수행되므로 전체적으로 균일한 공정이 이루어져 불량이 방지되는 효과가 있다.

Description

반도체웨이퍼 탑재용 캐리어
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제4도는 본 발명에 따른 캐리어를 나타낸 사시도이다.

Claims (1)

  1. 웨이퍼를 끼워 탑재시킬 수 있도록 다수개의 슬롯이 형성된 양측벽과, 상기 양측벽을 있는 전방측벽 및 후방측 보강대로 구성된 반도체웨이퍼 탑재용 캐리어에 있어서, 상기 전방측벽의 높이를 상단부까지 형성하여 웨이퍼의 앞면이 외부와 차단되도록 구성됨을 특징으로 하는 반도체웨이퍼 탑재용 캐리어.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960018029A 1996-05-27 1996-05-27 반도체웨이퍼 탑재용 캐리어 Abandoned KR970077465A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960018029A KR970077465A (ko) 1996-05-27 1996-05-27 반도체웨이퍼 탑재용 캐리어

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960018029A KR970077465A (ko) 1996-05-27 1996-05-27 반도체웨이퍼 탑재용 캐리어

Publications (1)

Publication Number Publication Date
KR970077465A true KR970077465A (ko) 1997-12-12

Family

ID=66283815

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960018029A Abandoned KR970077465A (ko) 1996-05-27 1996-05-27 반도체웨이퍼 탑재용 캐리어

Country Status (1)

Country Link
KR (1) KR970077465A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416985B1 (ko) * 1996-11-29 2004-06-16 삼성전자주식회사 캐리어 적재장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100416985B1 (ko) * 1996-11-29 2004-06-16 삼성전자주식회사 캐리어 적재장치

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