KR970077911A - 리니어모우터, 스테이지장치 그리고 그것을 사용하는 노광장치 - Google Patents

리니어모우터, 스테이지장치 그리고 그것을 사용하는 노광장치 Download PDF

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KR970077911A
KR970077911A KR1019970017897A KR19970017897A KR970077911A KR 970077911 A KR970077911 A KR 970077911A KR 1019970017897 A KR1019970017897 A KR 1019970017897A KR 19970017897 A KR19970017897 A KR 19970017897A KR 970077911 A KR970077911 A KR 970077911A
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stage
linear motor
permanent magnets
moving
yoke
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KR100291500B1 (ko
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시게토 카마타
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미타라이 후지오
캐논 가부시기가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

영구자석이 코일에 대하여 이동하는 리니어모터에서 낮은 가격과 높은 구동력을 항유할 수 있으나 작은 추력 리플을 가지는 좋은 리니어모터 장치를 제공하기 위하여, 복수 개의 영구자석은 각각 차례로 그들의 극성 방향을 90°회전시키는 동안 이동방향을 따라서 배치되어 사인 자기장을 발생시킨다.
각 영구자석은 단순한 직사각형 평형 6면체형상을 가지고, 다상코일의 2 또는 그 이상의 코일이 동시에 통전된다.

Description

리니어모우터, 스테이지장치 그리고 그것을 사용하는 노광장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 일 실시예에 따른 리니어모우터의 구성을 나타내는 측면도, 제 3 도는 제 1 도에 나타낸 장치의 영구자석의 상세 디자인의 일예를 나타내는 사시도.

Claims (12)

  1. 코일과, 그리고 요우크를 구비하고, 요우크는 각각 차례로 그것의 극성방향을 90°회전시키는 동안 상기 코일과 상기 요우크 사이의 상대이동방향을 따라서 배치되는 복수 개의 영구자석을 가지는 리니어모우터.
  2. 제 1 항에 있어서, 상기 영구자석의 각각은 직사각형 평행 6면체 형상을 가지는 리니어모우터.
  3. 제 1 항에 있어서, 상기 코일에 동등한 복수 개의 코일이 이동 방향을 따라서 배치되고, 동시에 통전되는 리니어모우터.
  4. 제 1 항에 있어서, 상기 복수 개의 영구자석보다 더 작은 부피를 가지는 영구자석은 상기 복수 개의 영구자석의 터미널 단부에 배치되는 리니어모우터.
  5. 청구항 1의 리니어모우터를 사용하는 스테이지를 이동시키는 스테이지장치.
  6. 청구항 2의 리니어모우터를 사용하는 스테이지를 이동시키는 스테이지장치.
  7. 청구항 3의 리니어모우터를 사용하는 스테이지를 이동시키는 스테이지장치.
  8. 청구항 4의 리니어모우터를 사용하는 스테이지를 이동시키는 스테이지장치.
  9. 청구항 5의 스테이지장치를 가지는 노광장치.
  10. 청구항 6의 스테이지장치를 가지는 노광장치.
  11. 청구항 7의 스테이지장치를 가지는 노광장치.
  12. 청구항 8의 스테이지장치를 가지는 노광장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970017897A 1996-05-10 1997-05-09 리니어모우터와 이것을 사용한 스테이지장치 및 노광장치 Expired - Fee Related KR100291500B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11622496A JPH09308218A (ja) 1996-05-10 1996-05-10 リニアモータ及びこれを用いたステージ装置や露光装置
JP96-116224 1996-05-10

Publications (2)

Publication Number Publication Date
KR970077911A true KR970077911A (ko) 1997-12-12
KR100291500B1 KR100291500B1 (ko) 2001-06-01

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ID=14681911

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Application Number Title Priority Date Filing Date
KR1019970017897A Expired - Fee Related KR100291500B1 (ko) 1996-05-10 1997-05-09 리니어모우터와 이것을 사용한 스테이지장치 및 노광장치

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US (1) US6025658A (ko)
JP (1) JPH09308218A (ko)
KR (1) KR100291500B1 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11307430A (ja) 1998-04-23 1999-11-05 Canon Inc 露光装置およびデバイス製造方法ならびに駆動装置
JP2001037200A (ja) 1999-07-19 2001-02-09 Canon Inc リニアモータ、ステージ装置、露光装置およびデバイス製造方法
TWI248718B (en) * 1999-09-02 2006-02-01 Koninkl Philips Electronics Nv Displacement device
US6720686B1 (en) * 2000-10-03 2004-04-13 Emerson Electric Co. Reduced noise dynamoelectric machine
JP2002325421A (ja) * 2001-02-23 2002-11-08 Canon Inc リニアモータ、およびこれを用いたステージ装置、露光装置ならびにデバイス製造方法
JP4227452B2 (ja) * 2002-12-27 2009-02-18 キヤノン株式会社 位置決め装置、及びその位置決め装置を利用した露光装置
JP4194383B2 (ja) * 2003-02-13 2008-12-10 キヤノン株式会社 リニアモータ
JP4418699B2 (ja) * 2004-03-24 2010-02-17 キヤノン株式会社 露光装置
US7385679B2 (en) * 2004-12-29 2008-06-10 Asml Netherlands B.V. Lithographic apparatus and actuator
US7956982B2 (en) * 2005-11-18 2011-06-07 Asml Netherlands B.V. Apparatus for cooling
ES2457820T3 (es) * 2007-04-16 2014-04-29 Crisplant A/S Sistema de clasificación con un accionamiento mediante un motor lineal síncrono
JP2018160951A (ja) * 2017-03-22 2018-10-11 住友重機械工業株式会社 リニアモータ、ステージ装置
JP2021052456A (ja) * 2019-09-24 2021-04-01 セイコーエプソン株式会社 モーター及びロボット

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4916340A (en) * 1988-01-22 1990-04-10 Canon Kabushiki Kaisha Movement guiding mechanism
US5519266A (en) * 1993-06-01 1996-05-21 Anorad Corporation High efficiency linear motor
US5753991A (en) * 1994-12-02 1998-05-19 Hydro-Quebec Multiphase brushless AC electric machine
JP3449061B2 (ja) * 1995-09-19 2003-09-22 株式会社デンソー 直流モータ

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Publication number Publication date
KR100291500B1 (ko) 2001-06-01
US6025658A (en) 2000-02-15
JPH09308218A (ja) 1997-11-28

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