LT2019061A - Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer - Google Patents

Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer

Info

Publication number
LT2019061A
LT2019061A LT2019061A LT2019061A LT2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A
Authority
LT
Lithuania
Prior art keywords
cmut
sensor
gases
changes
gas
Prior art date
Application number
LT2019061A
Other languages
Lithuanian (lt)
Other versions
LT6821B (en
Inventor
Dovydas BARAUSKAS
Darius VIRŽONIS
Jonas BALTRUÅ AITIS
Gailius Vanagas
Donatas PELENIS
Original Assignee
Kauno technologijos universitetas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kauno technologijos universitetas filed Critical Kauno technologijos universitetas
Priority to LT2019061A priority Critical patent/LT6821B/en
Priority to PCT/IB2020/057535 priority patent/WO2021028827A1/en
Publication of LT2019061A publication Critical patent/LT2019061A/en
Publication of LT6821B publication Critical patent/LT6821B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4454—Signal recognition, e.g. specific values or portions, signal events, signatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The invention relates to a gravimetric gas sensor for the selective detection of inorganic "acidic" gases, such as sulfur dioxide and carbon dioxide, in a gas mixture, without limiting the possibility of use with other gases. The sensor consists of capacitive micromachined ultrasonic transducer (CMUT) structure and functional material. The prior-art patents are close to this invention in that they rely on the measurement of changes in the CMUT structure resonant frequency. However, different functional materials are required to selectively detect different gases. The present invention is based on the use of functional polymers having specific properties, such as mPEI (methylated polyethyleneimine), without limiting the possibility of using other polymers having suitable properties. The problem is solved: more accurate, faster and more efficient gas detection and concentration measurement. The invention utilizes cross-sensor selectivity for different gases, achieved by refraining from modifying the sensor with different materials, instead employing more sophisticated measurement of detector dynamic parameters. CMUT structure is modified by functional material. The interaction with the gas changes the physical properties of the functional material (mass, modulus of elasticity), resulting in changes in the CMUT membrane loading parameters that are measured. The invention can be applied by mining companies, a wide range of household consumers.
LT2019061A 2019-08-14 2019-08-14 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer LT6821B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
LT2019061A LT6821B (en) 2019-08-14 2019-08-14 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer
PCT/IB2020/057535 WO2021028827A1 (en) 2019-08-14 2020-08-11 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2019061A LT6821B (en) 2019-08-14 2019-08-14 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer

Publications (2)

Publication Number Publication Date
LT2019061A true LT2019061A (en) 2021-02-25
LT6821B LT6821B (en) 2021-05-25

Family

ID=72613944

Family Applications (1)

Application Number Title Priority Date Filing Date
LT2019061A LT6821B (en) 2019-08-14 2019-08-14 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer

Country Status (2)

Country Link
LT (1) LT6821B (en)
WO (1) WO2021028827A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112649597A (en) * 2019-10-10 2021-04-13 鸿富锦精密工业（深圳）有限公司 Sensor and detection device using same
DE102021126505A1 (en) * 2021-10-13 2023-04-13 Infineon Technologies Ag GAS SENSOR CONTAINING AN ULTRASONIC RESONATOR AND USE FOR THE DETECTION OF GASES

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRM20010243A1 (en) 2001-05-09 2002-11-11 Consiglio Nazionale Ricerche SURFACE MICROMECHANICAL PROCEDURE FOR THE CONSTRUCTION OF ELECTRO-ACOUSTIC TRANSDUCERS, IN PARTICULAR ULTRASONIC TRANSDUCERS, REL
US20050148065A1 (en) 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
EP2411799B1 (en) 2009-03-23 2020-05-06 Koninklijke Philips N.V. Gas sensing using ultrasound
DE102009040052A1 (en) 2009-09-03 2011-03-10 Siemens Aktiengesellschaft Carbon dioxide sensor
US9366651B2 (en) 2013-07-03 2016-06-14 Matrix Sensors, Inc. Array of sensors with surface modifications
US9857243B2 (en) * 2014-03-18 2018-01-02 Matrix Sensors, Inc. Self-correcting chemical sensor
CN107151864B (en) 2017-05-08 2019-03-12 西安交通大学 Preparation method of sensitive functional layer based on CMUTs resonant biochemical sensor
US20200282424A1 (en) 2017-08-11 2020-09-10 North Carolina State University Optically transparent micromachined ultrasonic transducer (cmut)

Also Published As

Publication number Publication date
WO2021028827A1 (en) 2021-02-18
LT6821B (en) 2021-05-25

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Legal Events

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BB1A Patent application published

Effective date: 20210225

FG9A Patent granted

Effective date: 20210525

MM9A Lapsed patents

Effective date: 20220814