LT2019061A - Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu - Google Patents

Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu

Info

Publication number
LT2019061A
LT2019061A LT2019061A LT2019061A LT2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A LT 2019061 A LT2019061 A LT 2019061A
Authority
LT
Lithuania
Prior art keywords
cmut
sensor
gases
changes
gas
Prior art date
Application number
LT2019061A
Other languages
English (en)
Other versions
LT6821B (lt
Inventor
Dovydas BARAUSKAS
Darius VIRŽONIS
Jonas BALTRUÅ AITIS
Gailius Vanagas
Donatas PELENIS
Original Assignee
Kauno technologijos universitetas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kauno technologijos universitetas filed Critical Kauno technologijos universitetas
Priority to LT2019061A priority Critical patent/LT6821B/lt
Priority to PCT/IB2020/057535 priority patent/WO2021028827A1/en
Publication of LT2019061A publication Critical patent/LT2019061A/lt
Publication of LT6821B publication Critical patent/LT6821B/lt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4454—Signal recognition, e.g. specific values or portions, signal events, signatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Išradimas yra gravimetrinis dujų jutiklis skirtas neorganinių ,,rūgščiųjų" dujų, tokių kaip sieros dvideginis ir anglies dvideginis, selektyviam aptikimui dujų mišinyje, neapribojant galimybių panaudoti ir su kitomis dujomis. Jutiklį sudaro talpinio mikromontuojamo ultragarsinio keitiklio (CMUT) struktūra ir funkcinė medžiaga. Žinomi išradimų patentai yra artimi šiam sprendimui tuo, kad remiasi CMUT struktūros rezonansinio dažnio pokyčių matavimu. Tačiau tam, kad selektyviai aptikti skirtingas dujas, reikalinga naudoti skirtingas funkcines medžiagas. Šis išradimas remiasi specifines savybes turinčių funkcinių polimerų naudojimu, pavyzdžiui, mPEI (metiliuotas polyethyleniminas), neapribojant galimybių naudoti ir kitus tinkamas savybes turinčius polimerus. Sprendžiama problema: tikslesnis, greitesnis ir efektyvesnis dujų aptikimas ir koncentracijos matavimas. Išradime naudojamas kryžminis jutiklio selektyvumas skirtingoms dujoms, pasiekiamas atsisakant jutiklio modifikavimo skirtingomis medžiagomis, vietoj to panaudojant sudėtingesnį detektoriaus dinaminių parametrų matavimą. CMUT struktūra modifikuojama funkcine medžiaga. Dėl sąveikos su dujomis keičiasi funkcinės medžiagos fizinės savybės (masė, elastingumo modulis), dėl ko keičiasi CMUT membranos apkrovimo parametrai, kurie yra matuojami. Išradimas gali būti pritaikomas kalnakasybos kompanijoms, plačiam buitinių vartotojų ratui.
LT2019061A 2019-08-14 2019-08-14 Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu LT6821B (lt)

Priority Applications (2)

Application Number Priority Date Filing Date Title
LT2019061A LT6821B (lt) 2019-08-14 2019-08-14 Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu
PCT/IB2020/057535 WO2021028827A1 (en) 2019-08-14 2020-08-11 Gas sensor with capacitive micromachined ultrasonic transducer structure and functional polymer layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2019061A LT6821B (lt) 2019-08-14 2019-08-14 Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu

Publications (2)

Publication Number Publication Date
LT2019061A true LT2019061A (lt) 2021-02-25
LT6821B LT6821B (lt) 2021-05-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
LT2019061A LT6821B (lt) 2019-08-14 2019-08-14 Dujų jutiklis su talpinio mikromontuojamo ultragarso keitiklio struktūra ir funkciniu polimero sluoksniu

Country Status (2)

Country Link
LT (1) LT6821B (lt)
WO (1) WO2021028827A1 (lt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112649597A (zh) * 2019-10-10 2021-04-13 鸿富锦精密工业（深圳）有限公司 传感器和应用该传感器的检测装置
DE102021126505A1 (de) * 2021-10-13 2023-04-13 Infineon Technologies Ag Gassensor enthaltend einen ultraschallresonator und verwendung für die detektion von gasen

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRM20010243A1 (it) 2001-05-09 2002-11-11 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
US20050148065A1 (en) 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
JP5771181B2 (ja) 2009-03-23 2015-08-26 コーニンクレッカ フィリップス エヌ ヴェ 複数の成分を含むガスを分析するために測定空気チャンバ内に設けられたセンサチップ
DE102009040052A1 (de) 2009-09-03 2011-03-10 Siemens Aktiengesellschaft Kohlendioxid-Sensor
US9366651B2 (en) 2013-07-03 2016-06-14 Matrix Sensors, Inc. Array of sensors with surface modifications
US9857243B2 (en) * 2014-03-18 2018-01-02 Matrix Sensors, Inc. Self-correcting chemical sensor
CN107151864B (zh) 2017-05-08 2019-03-12 西安交通大学 基于CMUTs谐振式生化传感器的敏感功能层制备方法
EP3664940A4 (en) 2017-08-11 2021-05-19 North Carolina State University OPTICALLY TRANSPARENT MICRO-MACHINED ULTRASONIC CONVERTER (CMUT)

Also Published As

Publication number Publication date
WO2021028827A1 (en) 2021-02-18
LT6821B (lt) 2021-05-25

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