LV10316B - Dry granular composition for, and method of, polishing ferrous compositions - Google Patents
Dry granular composition for, and method of, polishing ferrous compositions Download PDFInfo
- Publication number
- LV10316B LV10316B LVP-92-359A LV920359A LV10316B LV 10316 B LV10316 B LV 10316B LV 920359 A LV920359 A LV 920359A LV 10316 B LV10316 B LV 10316B
- Authority
- LV
- Latvia
- Prior art keywords
- composition
- agent
- oxalic acid
- sufficient
- effective
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 114
- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000005498 polishing Methods 0.000 title claims description 10
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 title abstract description 23
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims abstract description 120
- 235000006408 oxalic acid Nutrition 0.000 claims abstract description 40
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 21
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000011574 phosphorus Substances 0.000 claims abstract description 19
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 19
- 230000002745 absorbent Effects 0.000 claims abstract description 17
- 239000002250 absorbent Substances 0.000 claims abstract description 17
- 239000002253 acid Substances 0.000 claims abstract description 17
- 239000004094 surface-active agent Substances 0.000 claims abstract description 14
- 238000009713 electroplating Methods 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000012876 carrier material Substances 0.000 claims abstract description 5
- 238000009736 wetting Methods 0.000 claims abstract description 5
- 239000003352 sequestering agent Substances 0.000 claims abstract 6
- 239000013078 crystal Substances 0.000 claims description 40
- 150000001412 amines Chemical class 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 29
- 239000006185 dispersion Substances 0.000 claims description 20
- 235000011180 diphosphates Nutrition 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 16
- 238000002156 mixing Methods 0.000 claims description 15
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical group NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 13
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical group [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 claims description 12
- 239000005909 Kieselgur Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 239000002736 nonionic surfactant Substances 0.000 claims description 7
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical class OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims description 5
- 235000019832 sodium triphosphate Nutrition 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims 7
- 229910052742 iron Inorganic materials 0.000 claims 6
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical group [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 claims 2
- 235000019818 tetrasodium diphosphate Nutrition 0.000 claims 2
- 238000004090 dissolution Methods 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 230000002085 persistent effect Effects 0.000 claims 1
- 238000009472 formulation Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 42
- 230000014759 maintenance of location Effects 0.000 description 31
- 238000013019 agitation Methods 0.000 description 10
- 229910019142 PO4 Inorganic materials 0.000 description 7
- 238000005187 foaming Methods 0.000 description 7
- 230000006872 improvement Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 235000021317 phosphate Nutrition 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000010452 phosphate Substances 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 6
- 230000003134 recirculating effect Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 241000199908 Diatoma Species 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 241000718541 Tetragastris balsamifera Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- VBIXEXWLHSRNKB-UHFFFAOYSA-N ammonium oxalate Chemical class [NH4+].[NH4+].[O-]C(=O)C([O-])=O VBIXEXWLHSRNKB-UHFFFAOYSA-N 0.000 description 1
- -1 ammonium oxalates Chemical class 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052816 inorganic phosphate Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000019592 roughness Nutrition 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
- B24B31/14—Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/34—Pretreatment of metallic surfaces to be electroplated
- C25D5/36—Pretreatment of metallic surfaces to be electroplated of iron or steel
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Disintegrating Or Milling (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Detergent Compositions (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- ing And Chemical Polishing (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Glass Compositions (AREA)
- Luminescent Compositions (AREA)
- Percussive Tools And Related Accessories (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Chemically Coating (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/934,469 US4724042A (en) | 1986-11-24 | 1986-11-24 | Dry granular composition for, and method of, polishing ferrous components |
| PCT/US1987/003093 WO1988003963A1 (en) | 1986-11-24 | 1987-11-20 | Dry granular composition for, and method of, polishing ferrous compositions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| LV10316A LV10316A (lv) | 1994-10-20 |
| LV10316B true LV10316B (en) | 1995-06-20 |
Family
ID=25465618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LVP-92-359A LV10316B (en) | 1986-11-24 | 1992-12-22 | Dry granular composition for, and method of, polishing ferrous compositions |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US4724042A (de) |
| EP (1) | EP0334877B1 (de) |
| JP (1) | JPH02500757A (de) |
| AT (1) | ATE86311T1 (de) |
| BR (1) | BR8707893A (de) |
| DE (1) | DE3784517T2 (de) |
| DK (1) | DK390588A (de) |
| FI (1) | FI83544C (de) |
| IL (1) | IL84562A (de) |
| LT (1) | LT3297B (de) |
| LV (1) | LV10316B (de) |
| MX (1) | MX165427B (de) |
| NO (1) | NO176722C (de) |
| NZ (1) | NZ222626A (de) |
| RU (1) | RU2062305C1 (de) |
| WO (1) | WO1988003963A1 (de) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8701407A (nl) * | 1987-06-17 | 1989-01-16 | Vunderink Ate | Een oppervlakte techniek die het massaal slijpen en polijsten van metalen artikelen in rotofinish apparatuur sneller doet verlopen. |
| DE3800834A1 (de) * | 1988-01-14 | 1989-07-27 | Henkel Kgaa | Verfahren und mittel zum gleichzeitigen gleitschleifen, reinigen und passivieren metallischer werkstuecke |
| US4906327A (en) * | 1989-05-04 | 1990-03-06 | Rem Chemicals, Inc. | Method and composition for refinement of metal surfaces |
| USRE34272E (en) * | 1989-05-04 | 1993-06-08 | Rem Chemicals, Inc. | Method and composition for refinement of metal surfaces |
| US20040140288A1 (en) * | 1996-07-25 | 2004-07-22 | Bakul Patel | Wet etch of titanium-tungsten film |
| US20040134873A1 (en) * | 1996-07-25 | 2004-07-15 | Li Yao | Abrasive-free chemical mechanical polishing composition and polishing process containing same |
| EP0852615B1 (de) | 1996-07-25 | 2005-12-14 | DuPont Air Products NanoMaterials L.L.C. | Zusammensetzung und verfahren zum chemisch-mechanischen polieren |
| US6261154B1 (en) | 1998-08-25 | 2001-07-17 | Mceneny Jeffrey William | Method and apparatus for media finishing |
| US6426295B1 (en) * | 1999-02-16 | 2002-07-30 | Micron Technology, Inc. | Reduction of surface roughness during chemical mechanical planarization(CMP) |
| US6409936B1 (en) | 1999-02-16 | 2002-06-25 | Micron Technology, Inc. | Composition and method of formation and use therefor in chemical-mechanical polishing |
| US6638326B2 (en) | 2001-09-25 | 2003-10-28 | Ekc Technology, Inc. | Compositions for chemical mechanical planarization of tantalum and tantalum nitride |
| US6895855B2 (en) | 2001-10-01 | 2005-05-24 | The Timken Company | Hydraulic motors and pumps with engineered surfaces |
| US6866792B2 (en) * | 2001-12-12 | 2005-03-15 | Ekc Technology, Inc. | Compositions for chemical mechanical planarization of copper |
| DK2401607T3 (en) | 2009-02-25 | 2016-02-29 | Illumina Inc | Separation of pyrophosphatfrigivelse and pyrophosphatdetektering |
| US10179388B2 (en) * | 2009-05-12 | 2019-01-15 | Rem Technologies, Inc. | High throughput finishing of metal components |
| CN103540947B (zh) * | 2013-10-30 | 2015-10-21 | 涿州安泰星电子器件有限公司 | 一种电镀基材除油剂及其制备方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2666000A (en) * | 1950-10-11 | 1954-01-12 | Standard Oil Dev Co | Process for cleaning automobile radiators |
| US2832706A (en) * | 1953-05-12 | 1958-04-29 | Victor Chemical Works | Metal cleaning and phosphating composition and method of cleaning and phosphating |
| US2890944A (en) * | 1956-05-25 | 1959-06-16 | North American Aviation Inc | Continuous chemical milling process |
| US2981610A (en) * | 1957-05-14 | 1961-04-25 | Boeing Co | Chemical milling process and composition |
| US2940838A (en) * | 1957-08-19 | 1960-06-14 | Boeing Co | Chemical milling |
| US3094489A (en) * | 1959-08-31 | 1963-06-18 | Monsanto Chemicals | Method and composition for brightening aluminum |
| US3052582A (en) * | 1959-10-05 | 1962-09-04 | Boeing Co | Process of chemical milling and acid aqueous bath used therefor |
| US3061494A (en) * | 1959-10-05 | 1962-10-30 | Boeing Co | Process of chemical milling and acid aqueous bath used therefor |
| SE400581B (sv) * | 1974-12-13 | 1978-04-03 | Nordnero Ab | Bad for kemisk polering av koppar och dess legeringar |
| AT366422B (de) * | 1980-06-30 | 1982-04-13 | Wiener Brueckenbau | Phosphorsaures medium und verfahren zum dampfstrahl-phosphatieren von stahlkonstruktionen mittels dieses mediums |
| US4491500A (en) * | 1984-02-17 | 1985-01-01 | Rem Chemicals, Inc. | Method for refinement of metal surfaces |
| US4532066A (en) * | 1984-03-05 | 1985-07-30 | Sterling Drug Inc. | Stable mildly acidic aqueous polishing cleanser and preparation thereof |
| US4705594A (en) * | 1986-11-20 | 1987-11-10 | Rem Chemicals, Inc. | Composition and method for metal surface refinement |
-
1986
- 1986-11-24 US US06/934,469 patent/US4724042A/en not_active Expired - Lifetime
-
1987
- 1987-11-20 JP JP63500332A patent/JPH02500757A/ja active Pending
- 1987-11-20 RU SU874614297A patent/RU2062305C1/ru active
- 1987-11-20 NZ NZ222626A patent/NZ222626A/xx unknown
- 1987-11-20 WO PCT/US1987/003093 patent/WO1988003963A1/en not_active Ceased
- 1987-11-20 DE DE87908091T patent/DE3784517T2/de not_active Expired - Lifetime
- 1987-11-20 BR BR8707893A patent/BR8707893A/pt active Search and Examination
- 1987-11-20 AT AT87908091T patent/ATE86311T1/de not_active IP Right Cessation
- 1987-11-20 EP EP87908091A patent/EP0334877B1/de not_active Expired - Lifetime
- 1987-11-23 IL IL84562A patent/IL84562A/xx not_active IP Right Cessation
- 1987-11-24 MX MX009451A patent/MX165427B/es unknown
-
1988
- 1988-07-13 DK DK390588A patent/DK390588A/da not_active Application Discontinuation
- 1988-07-21 NO NO883242A patent/NO176722C/no unknown
- 1988-10-11 FI FI884658A patent/FI83544C/fi not_active IP Right Cessation
-
1992
- 1992-12-22 LV LVP-92-359A patent/LV10316B/en unknown
-
1993
- 1993-01-20 LT LTIP287A patent/LT3297B/lt not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| BR8707893A (pt) | 1989-10-03 |
| RU2062305C1 (ru) | 1996-06-20 |
| EP0334877A4 (de) | 1989-12-28 |
| FI884658L (fi) | 1988-10-11 |
| EP0334877A1 (de) | 1989-10-04 |
| ATE86311T1 (de) | 1993-03-15 |
| FI83544C (fi) | 1991-07-25 |
| DE3784517D1 (de) | 1993-04-08 |
| IL84562A (en) | 1991-05-12 |
| DK390588D0 (da) | 1988-07-13 |
| WO1988003963A1 (en) | 1988-06-02 |
| NO883242L (no) | 1988-07-21 |
| JPH02500757A (ja) | 1990-03-15 |
| US4724042A (en) | 1988-02-09 |
| EP0334877B1 (de) | 1993-03-03 |
| DK390588A (da) | 1988-07-13 |
| IL84562A0 (en) | 1988-04-29 |
| NO176722C (no) | 1995-05-16 |
| NO176722B (no) | 1995-02-06 |
| FI83544B (fi) | 1991-04-15 |
| FI884658A0 (fi) | 1988-10-11 |
| LTIP287A (en) | 1994-10-25 |
| LV10316A (lv) | 1994-10-20 |
| NO883242D0 (no) | 1988-07-21 |
| MX165427B (es) | 1992-11-11 |
| NZ222626A (en) | 1990-07-26 |
| LT3297B (en) | 1995-06-26 |
| DE3784517T2 (de) | 1993-10-07 |
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