MD4010F2 - Procedeu de obtinere a peliculelor subtiri de semiconductoare oxidice de In2O3 - Google Patents
Procedeu de obtinere a peliculelor subtiri de semiconductoare oxidice de In2O3 Download PDFInfo
- Publication number
- MD4010F2 MD4010F2 MDA20070334A MD20070334A MD4010F2 MD 4010 F2 MD4010 F2 MD 4010F2 MD A20070334 A MDA20070334 A MD A20070334A MD 20070334 A MD20070334 A MD 20070334A MD 4010 F2 MD4010 F2 MD 4010F2
- Authority
- MD
- Moldova
- Prior art keywords
- in2o3
- oxide semiconductors
- thin films
- films
- obtaining thin
- Prior art date
Links
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 2
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 abstract 2
- 238000000137 annealing Methods 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000007935 neutral effect Effects 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- 238000005118 spray pyrolysis Methods 0.000 abstract 1
Landscapes
- Formation Of Insulating Films (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
Inventia se refera la un procedeu de obtinere a peliculelor subtiri de semiconductoare oxidice, in particular de In2O3. Procedeul include depunerea peliculelor prin piroliza spray la temperatura de 450…550°Ń din solutii apoase de InCl3 cu concentratia sarii de metal din solutie ce depaseste 0,2Ě cu recoacerea ulterioara in atmosfera neutra sau cu continut de oxigen la o temperatura nu mai mica de 1000°Ń. Rezultatul inventiei consta in obtinerea peliculelor cu textura inalta in directia (100) cu grosimea de 200…3000 nm cu dimensiuni mari ale suprafetei cristalografice plate a cristalitelor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| MD20070334A MD20070334A (ro) | 2009-09-30 |
| MD4010F2 true MD4010F2 (ro) | 2010-01-29 |
| MD4010G2 MD4010G2 (ro) | 2010-08-31 |
Family
ID=43568782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MDA20070334A MD4010G2 (ro) | 2007-12-12 | 2007-12-12 | Procedeu de obţinere a peliculelor subţiri de semiconductoare oxidice de In2O3 |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD4010G2 (ro) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD20080058A (ro) * | 2008-02-25 | 2009-08-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD175Z (ro) * | 2008-02-25 | 2010-10-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD193Z (ro) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Procedeu de obţinere a peliculei polisulfidice |
| MD353Z (ro) * | 2010-02-24 | 2011-10-31 | Институт Электронной Инженерии И Промышленных Технологий | Ventil supraconductor de spin |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2667437B1 (fr) * | 1990-09-28 | 1992-10-30 | Commissariat Energie Atomique | Procede de preparation par recuit rapide d'une couche mince en materiau cristallise du type oxyde et substrat revetu d'une couche mince obtenu par ce procede. |
| JP2735422B2 (ja) * | 1991-12-03 | 1998-04-02 | 日鉄鉱業株式会社 | ルチル単結晶の処理方法 |
| RU2051207C1 (ru) * | 1992-02-27 | 1995-12-27 | Санкт-Петербургский государственный университет | Способ получения слоев гидроксидов металлов |
-
2007
- 2007-12-12 MD MDA20070334A patent/MD4010G2/ro not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| MD20080058A (ro) * | 2008-02-25 | 2009-08-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD175Z (ro) * | 2008-02-25 | 2010-10-31 | Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы | Dispozitiv de obţinere a peliculelor supraconductoare |
| MD193Z (ro) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Procedeu de obţinere a peliculei polisulfidice |
| MD353Z (ro) * | 2010-02-24 | 2011-10-31 | Институт Электронной Инженерии И Промышленных Технологий | Ventil supraconductor de spin |
Also Published As
| Publication number | Publication date |
|---|---|
| MD20070334A (ro) | 2009-09-30 |
| MD4010G2 (ro) | 2010-08-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG4A | Patent for invention issued | ||
| KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
| MM4A | Patent for invention definitely lapsed due to non-payment of fees |