MY146263A - System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes - Google Patents

System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes

Info

Publication number
MY146263A
MY146263A MYPI20091252A MYPI20091252A MY146263A MY 146263 A MY146263 A MY 146263A MY PI20091252 A MYPI20091252 A MY PI20091252A MY PI20091252 A MYPI20091252 A MY PI20091252A MY 146263 A MY146263 A MY 146263A
Authority
MY
Malaysia
Prior art keywords
processes
exhausted gas
industrial processes
recovering hydrogen
epitaxial
Prior art date
Application number
MYPI20091252A
Inventor
Salvatore Raffa
Original Assignee
Meridionale Impianti S P A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meridionale Impianti S P A filed Critical Meridionale Impianti S P A
Priority to MYPI20091252A priority Critical patent/MY146263A/en
Publication of MY146263A publication Critical patent/MY146263A/en

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency
    • Y02P20/129Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

IT IS PROVIDED A SYSTEM (1) FOR RECOVERING HYDROGEN FROM EXHAUSTED GAS OF INDUSTRIAL PROCESSES USING HYDROGEN AS A "GAS CARRIER", IN PARTICULAR EPITAXIAI PROCESS AND SOMICONDUCTOR AND/OR PHOTOVOLTAIC INDUSTRIAL PROCESSES. THE RECOVERY PROCESS ESSENTIALLY CONSISTS OF THE FOLLOWING PHASES: EXHAUSTED GAS CONDENSATION WITH CHLOROSILANES RECOVERY, RESIDUAL IMPURITIES ABATEMENT TREATMENT, FINAL PURIFICATION 15 PREFERABLY VIA A PALLADIUM MEMBRANE UNIT.
MYPI20091252A 2009-03-27 2009-03-27 System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes MY146263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20091252A MY146263A (en) 2009-03-27 2009-03-27 System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20091252A MY146263A (en) 2009-03-27 2009-03-27 System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes

Publications (1)

Publication Number Publication Date
MY146263A true MY146263A (en) 2012-07-31

Family

ID=48040710

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20091252A MY146263A (en) 2009-03-27 2009-03-27 System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes

Country Status (1)

Country Link
MY (1) MY146263A (en)

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