MY146263A - System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes - Google Patents
System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processesInfo
- Publication number
- MY146263A MY146263A MYPI20091252A MYPI20091252A MY146263A MY 146263 A MY146263 A MY 146263A MY PI20091252 A MYPI20091252 A MY PI20091252A MY PI20091252 A MYPI20091252 A MY PI20091252A MY 146263 A MY146263 A MY 146263A
- Authority
- MY
- Malaysia
- Prior art keywords
- processes
- exhausted gas
- industrial processes
- recovering hydrogen
- epitaxial
- Prior art date
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title abstract 3
- 239000001257 hydrogen Substances 0.000 title abstract 3
- 229910052739 hydrogen Inorganic materials 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 3
- 239000007789 gas Substances 0.000 title abstract 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 238000011084 recovery Methods 0.000 abstract 2
- 239000005046 Chlorosilane Substances 0.000 abstract 1
- 238000009833 condensation Methods 0.000 abstract 1
- 230000005494 condensation Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 238000000746 purification Methods 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
IT IS PROVIDED A SYSTEM (1) FOR RECOVERING HYDROGEN FROM EXHAUSTED GAS OF INDUSTRIAL PROCESSES USING HYDROGEN AS A "GAS CARRIER", IN PARTICULAR EPITAXIAI PROCESS AND SOMICONDUCTOR AND/OR PHOTOVOLTAIC INDUSTRIAL PROCESSES. THE RECOVERY PROCESS ESSENTIALLY CONSISTS OF THE FOLLOWING PHASES: EXHAUSTED GAS CONDENSATION WITH CHLOROSILANES RECOVERY, RESIDUAL IMPURITIES ABATEMENT TREATMENT, FINAL PURIFICATION 15 PREFERABLY VIA A PALLADIUM MEMBRANE UNIT.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MYPI20091252A MY146263A (en) | 2009-03-27 | 2009-03-27 | System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MYPI20091252A MY146263A (en) | 2009-03-27 | 2009-03-27 | System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY146263A true MY146263A (en) | 2012-07-31 |
Family
ID=48040710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI20091252A MY146263A (en) | 2009-03-27 | 2009-03-27 | System and method for recovering hydrogen from exhausted gas of epitaxial processes and other industrial processes |
Country Status (1)
| Country | Link |
|---|---|
| MY (1) | MY146263A (en) |
-
2009
- 2009-03-27 MY MYPI20091252A patent/MY146263A/en unknown
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