MY164505A - Capacitive sensor - Google Patents

Capacitive sensor

Info

Publication number
MY164505A
MY164505A MYPI20072088A MYPI20072088A MY164505A MY 164505 A MY164505 A MY 164505A MY PI20072088 A MYPI20072088 A MY PI20072088A MY PI20072088 A MYPI20072088 A MY PI20072088A MY 164505 A MY164505 A MY 164505A
Authority
MY
Malaysia
Prior art keywords
capacitive sensor
moisture content
insulating layers
sensor comprises
illustrative drawing
Prior art date
Application number
MYPI20072088A
Inventor
Agus Santoso Tamsir Dr
Manut Azrif
Muhamad Alias Dzuzlindah
Sulaiman Suraya
Zakaria Azlan
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI20072088A priority Critical patent/MY164505A/en
Priority to PCT/MY2008/000158 priority patent/WO2009066992A2/en
Publication of MY164505A publication Critical patent/MY164505A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

A CAPACITIVE SENSOR COMPRISES OF ELECTRODES INTERDIGITATED FINGERS (16) IN MULTIPLE INSULATING LAYERS (3, 4) FOR MEASURING MOISTURE CONTENT. THE MOST ILLUSTRATIVE DRAWING:
MYPI20072088A 2007-11-23 2007-11-23 Capacitive sensor MY164505A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI20072088A MY164505A (en) 2007-11-23 2007-11-23 Capacitive sensor
PCT/MY2008/000158 WO2009066992A2 (en) 2007-11-23 2008-11-24 Capacitive sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20072088A MY164505A (en) 2007-11-23 2007-11-23 Capacitive sensor

Publications (1)

Publication Number Publication Date
MY164505A true MY164505A (en) 2017-12-29

Family

ID=40668026

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20072088A MY164505A (en) 2007-11-23 2007-11-23 Capacitive sensor

Country Status (2)

Country Link
MY (1) MY164505A (en)
WO (1) WO2009066992A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2336758B1 (en) 2009-12-16 2012-08-29 Nxp B.V. Capacitive sensor
US9018060B2 (en) 2010-06-15 2015-04-28 3M Innovative Properties Company Variable capacitance sensors and methods of making the same
MY173650A (en) * 2010-11-15 2020-02-13 Mimos Berhad Humidity sensor and a method for fabricating the same
CN102507669A (en) * 2011-11-18 2012-06-20 中国科学院上海微系统与信息技术研究所 Structure improvement and making method of humidity sensor on basis of polyimide and filler corrosion
CN103207215A (en) * 2012-01-16 2013-07-17 中国科学院上海微系统与信息技术研究所 Improved humidity sensor based on polyimide
WO2014185771A2 (en) * 2013-05-17 2014-11-20 Mimos Berhad A capacitive humidity sensor
EP2988122B1 (en) * 2014-08-20 2019-04-24 ams international AG Capacitive sensor
WO2016056887A1 (en) * 2014-10-09 2016-04-14 Mimos Berhad Humidity sensor with nanoporous polyimide membranes and a method of fabrication thereof
EP3037810B1 (en) * 2014-12-23 2017-10-25 EM Microelectronic-Marin SA Improved moisture sensor
EP3208610B1 (en) 2016-02-18 2021-05-12 ams AG Sensor arrangement and method for generating measurement signals
DE102020100810A1 (en) * 2020-01-15 2021-07-15 B-Horizon GmbH Self-learning occupancy device for measuring pressure, gas and / or humidity on the basis of ambient humidity

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017820A (en) * 1975-07-25 1977-04-12 Illinois Tool Works Inc. Humidity sensor with multiple electrode layers separated by a porous monolithic ceramic dielectric structure
JP2002243689A (en) * 2001-02-15 2002-08-28 Denso Corp Capacitive humidity sensor and method of manufacturing the same
US7247271B2 (en) * 2003-03-14 2007-07-24 Delphi Technologies, Inc. Compact ceramic sensor for fuel volatility and oxygenate concentration
JP3994975B2 (en) * 2004-02-27 2007-10-24 株式会社デンソー Capacitive humidity sensor
JP4455286B2 (en) * 2004-11-09 2010-04-21 株式会社日本自動車部品総合研究所 Capacitive humidity sensor

Also Published As

Publication number Publication date
WO2009066992A2 (en) 2009-05-28
WO2009066992A3 (en) 2009-08-20

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