MY173650A - Humidity sensor and a method for fabricating the same - Google Patents

Humidity sensor and a method for fabricating the same

Info

Publication number
MY173650A
MY173650A MYPI2010005362A MYPI2010005362A MY173650A MY 173650 A MY173650 A MY 173650A MY PI2010005362 A MYPI2010005362 A MY PI2010005362A MY PI2010005362 A MYPI2010005362 A MY PI2010005362A MY 173650 A MY173650 A MY 173650A
Authority
MY
Malaysia
Prior art keywords
humidity
fabricating
humidity sensor
substrate
membrane
Prior art date
Application number
MYPI2010005362A
Inventor
Ramdzan Buyong Muhamad
Aishah Mohamad Badaruddin Siti
Mohd Saman Rahimah
Ghani Othaman Abdul
Bien Chia Sheng Daniel
Binti Mohd Zain Azlina
Nabipoor Mohsen
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2010005362A priority Critical patent/MY173650A/en
Priority to PCT/MY2011/000136 priority patent/WO2012067488A1/en
Publication of MY173650A publication Critical patent/MY173650A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The present invention relates to a sensor for determining humidity. A humidity sensor (30) comprises of a substrate (32); a bottom membrane (34) positioned above the substrate (32) and a top membrane (36) positioned above the bottom membrane (34) forming a dielectric layer (38); and a plurality of inter-digitated electrodes (40) with changing capacitance in accordance to change in humidity detected by the dielectric layer (38) embedded to the top membrane (36) wherein a plurality of trenches (42) are embedded to the bottom membrane (34) or to the substrate (32) thereby increasing area of exposure to humidity. The present invention also relates to a method for fabricating a humidity sensor.
MYPI2010005362A 2010-11-15 2010-11-15 Humidity sensor and a method for fabricating the same MY173650A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2010005362A MY173650A (en) 2010-11-15 2010-11-15 Humidity sensor and a method for fabricating the same
PCT/MY2011/000136 WO2012067488A1 (en) 2010-11-15 2011-06-23 Humidity sensor and a method for fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2010005362A MY173650A (en) 2010-11-15 2010-11-15 Humidity sensor and a method for fabricating the same

Publications (1)

Publication Number Publication Date
MY173650A true MY173650A (en) 2020-02-13

Family

ID=46084250

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2010005362A MY173650A (en) 2010-11-15 2010-11-15 Humidity sensor and a method for fabricating the same

Country Status (2)

Country Link
MY (1) MY173650A (en)
WO (1) WO2012067488A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014185771A2 (en) 2013-05-17 2014-11-20 Mimos Berhad A capacitive humidity sensor
WO2016056887A1 (en) * 2014-10-09 2016-04-14 Mimos Berhad Humidity sensor with nanoporous polyimide membranes and a method of fabrication thereof
WO2020008935A1 (en) * 2018-07-04 2020-01-09 株式会社村田製作所 Humidity sensor, and rfid tag comprising same
US12455255B2 (en) 2024-02-16 2025-10-28 Qualcomm Incorporated CMOS integrated humidity sensor with built-in heater

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100965835B1 (en) * 2007-09-18 2010-06-28 전자부품연구원 Capacitive polymer humidity sensor and its manufacturing method
MY164505A (en) * 2007-11-23 2017-12-29 Mimos Berhad Capacitive sensor
EP2321632B1 (en) * 2008-09-11 2017-03-01 ams International AG Sensor with combined in-plane and parallel-plane configuration

Also Published As

Publication number Publication date
WO2012067488A1 (en) 2012-05-24

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