MY180133A - Pressure-sensitive adhesive tape for semiconductor substrate fabrication - Google Patents
Pressure-sensitive adhesive tape for semiconductor substrate fabricationInfo
- Publication number
- MY180133A MY180133A MYPI2018001762A MYPI2018001762A MY180133A MY 180133 A MY180133 A MY 180133A MY PI2018001762 A MYPI2018001762 A MY PI2018001762A MY PI2018001762 A MYPI2018001762 A MY PI2018001762A MY 180133 A MY180133 A MY 180133A
- Authority
- MY
- Malaysia
- Prior art keywords
- pressure
- sensitive adhesive
- semiconductor substrate
- adhesive tape
- substrate fabrication
- Prior art date
Links
- 239000004820 Pressure-sensitive adhesive Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 title abstract 3
- 239000010410 layer Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 3
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Adhesive Tapes (AREA)
- Dicing (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A pressure-sensitive adhesive tape (100) for semiconductor substrate fabrication of the present invention includes a base material (4) and a pressure-sensitive adhesive layer (2) laminated on one surface of the base material (4), in which the base material (4) has a notched layer (41) positioned on the one surface side and an expansion layer (42) laminated on the other surface of the notched layer (41) , and the expansion layer (42) has a tack strength equal to or higher than (1) kPa and equal to or lower than (200) kPa at 80?C. In a case where the above constitution is adopted, it is possible to provide a pressure-sensitive adhesive tape (100) for semiconductor substrate fabrication that makes it possible to reliably prevent the occurrence of warpage in a dicing step and to inhibit or prevent the expansion layer (42) from being fused with a dicing table. (Figure 3)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016096045 | 2016-05-12 | ||
| JP2016127070 | 2016-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MY180133A true MY180133A (en) | 2020-11-23 |
Family
ID=60267119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MYPI2018001762A MY180133A (en) | 2016-05-12 | 2017-05-02 | Pressure-sensitive adhesive tape for semiconductor substrate fabrication |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP6278164B1 (en) |
| CN (1) | CN109328219B (en) |
| MY (1) | MY180133A (en) |
| PH (1) | PH12018502253A1 (en) |
| TW (1) | TWI697947B (en) |
| WO (1) | WO2017195711A1 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7154686B2 (en) * | 2018-06-06 | 2022-10-18 | 株式会社ディスコ | Wafer processing method |
| JPWO2020158770A1 (en) * | 2019-01-31 | 2021-12-02 | リンテック株式会社 | Expanding method and manufacturing method of semiconductor devices |
| JP7438990B2 (en) * | 2019-01-31 | 2024-02-27 | リンテック株式会社 | Expanding method and semiconductor device manufacturing method |
| CN110699000A (en) * | 2019-10-11 | 2020-01-17 | 上海固柯胶带科技有限公司 | Film Materials for Semiconductor Grinding and Packaging |
| JP7488074B2 (en) * | 2020-03-17 | 2024-05-21 | 日本カーバイド工業株式会社 | Adhesive composition and protective tape |
| WO2021193935A1 (en) * | 2020-03-27 | 2021-09-30 | リンテック株式会社 | Sheet for production of semiconductor device and method for producing semiconductor chip with film-form adhesive |
| JP7757723B2 (en) * | 2020-11-16 | 2025-10-22 | 三菱ケミカル株式会社 | Laminate |
| KR20250179116A (en) * | 2024-01-18 | 2025-12-29 | 스미또모 베이크라이트 가부시키가이샤 | adhesive tape |
| JP7814476B2 (en) * | 2024-06-13 | 2026-02-16 | 日東電工株式会社 | protective sheet |
| WO2025258413A1 (en) * | 2024-06-13 | 2025-12-18 | 日東電工株式会社 | Protective sheet |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007027474A (en) * | 2005-07-19 | 2007-02-01 | Denki Kagaku Kogyo Kk | Wafer full cut dicing tape substrate film and wafer full cut dicing tape having the same |
| JP2007031535A (en) * | 2005-07-26 | 2007-02-08 | Denki Kagaku Kogyo Kk | A pressure-sensitive adhesive sheet and an electronic component manufacturing method using the same. |
| JP6146616B2 (en) * | 2013-10-31 | 2017-06-14 | 住友ベークライト株式会社 | Dicing substrate film, dicing film, and semiconductor chip manufacturing method |
| JP5603453B1 (en) * | 2013-04-26 | 2014-10-08 | 古河電気工業株式会社 | Adhesive tape for semiconductor wafer protection |
| US20160218077A1 (en) * | 2013-09-30 | 2016-07-28 | Lintec Corporation | Composite Sheet for Resin Film Formation |
| JP5607847B1 (en) * | 2013-11-29 | 2014-10-15 | 古河電気工業株式会社 | Adhesive tape for semiconductor processing |
| JP2016018810A (en) * | 2014-07-04 | 2016-02-01 | 積水化学工業株式会社 | Dicing die bonding tape |
| JP2016018811A (en) * | 2014-07-04 | 2016-02-01 | 積水化学工業株式会社 | Dicing-die-bonding tape |
| JP6227494B2 (en) * | 2014-07-14 | 2017-11-08 | ダイヤプラスフィルム株式会社 | Base film used for adhesive film for semiconductor manufacturing process |
| JP6293012B2 (en) * | 2014-07-28 | 2018-03-14 | グンゼ株式会社 | Dicing substrate film and dicing film using the same |
| JPWO2016027888A1 (en) * | 2014-08-22 | 2017-06-01 | リンテック株式会社 | Protective film forming sheet and manufacturing method of semiconductor chip with protective film |
-
2017
- 2017-05-02 CN CN201780029405.XA patent/CN109328219B/en active Active
- 2017-05-02 WO PCT/JP2017/017293 patent/WO2017195711A1/en not_active Ceased
- 2017-05-02 MY MYPI2018001762A patent/MY180133A/en unknown
- 2017-05-02 JP JP2017544786A patent/JP6278164B1/en active Active
- 2017-05-12 TW TW106115679A patent/TWI697947B/en active
-
2018
- 2018-10-22 PH PH12018502253A patent/PH12018502253A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| PH12018502253B1 (en) | 2019-08-19 |
| CN109328219A (en) | 2019-02-12 |
| PH12018502253A1 (en) | 2019-08-19 |
| TW201742132A (en) | 2017-12-01 |
| JP6278164B1 (en) | 2018-02-14 |
| CN109328219B (en) | 2020-04-28 |
| TWI697947B (en) | 2020-07-01 |
| WO2017195711A1 (en) | 2017-11-16 |
| JPWO2017195711A1 (en) | 2018-05-31 |
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