NL1000759C2 - Geïntegreerde optische modus-omzetter. - Google Patents

Geïntegreerde optische modus-omzetter. Download PDF

Info

Publication number: NL1000759C2
Authority: NL; Netherlands
Prior art keywords: waveguide; strip; mask; shaped elements; etching
Prior art date: 1995-07-07

Application number

NL1000759A

Other languages

English (en)

Dutch (nl)

Inventor

Jorn Werngreen Pedersen

Original Assignee

Nederland Ptt

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-07-07

Filing date

1995-07-07

Publication date

1997-01-08

1995-07-07 Application filed by Nederland Ptt filed Critical Nederland Ptt

1995-07-07 Priority to NL1000759A priority Critical patent/NL1000759C2/nl

1996-06-03 Priority to EP96201547A priority patent/EP0753769A3/de

1996-06-04 Priority to US08/659,117 priority patent/US5703977A/en

1996-06-18 Priority to CA002179361A priority patent/CA2179361A1/en

1996-07-05 Priority to NO962844A priority patent/NO962844L/no

1996-07-05 Priority to JP8175312A priority patent/JP3028288B2/ja

1997-01-08 Application granted granted Critical

1997-01-08 Publication of NL1000759C2 publication Critical patent/NL1000759C2/nl

Links

230000003287 optical effect Effects 0.000 title claims description 7
230000008878 coupling Effects 0.000 claims description 38
238000010168 coupling process Methods 0.000 claims description 38
238000005859 coupling reaction Methods 0.000 claims description 38
238000005530 etching Methods 0.000 claims description 35
239000000463 material Substances 0.000 claims description 25
238000009826 distribution Methods 0.000 claims description 22
238000000034 method Methods 0.000 claims description 21
238000006243 chemical reaction Methods 0.000 claims description 19
239000000758 substrate Substances 0.000 claims description 17
230000000737 periodic effect Effects 0.000 claims description 9
230000001902 propagating effect Effects 0.000 claims description 6
230000002902 bimodal effect Effects 0.000 claims description 5
238000004519 manufacturing process Methods 0.000 claims description 5
GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 18
230000010287 polarization Effects 0.000 description 10
238000013016 damping Methods 0.000 description 9
238000012545 processing Methods 0.000 description 6
238000003631 wet chemical etching Methods 0.000 description 6
230000005540 biological transmission Effects 0.000 description 5
239000013078 crystal Substances 0.000 description 5
230000000694 effects Effects 0.000 description 5
238000001312 dry etching Methods 0.000 description 4
230000008569 process Effects 0.000 description 4
230000007704 transition Effects 0.000 description 4
229910052581 Si3N4 Inorganic materials 0.000 description 3
239000002178 crystalline material Substances 0.000 description 3
230000001965 increasing effect Effects 0.000 description 3
238000012986 modification Methods 0.000 description 3
230000004048 modification Effects 0.000 description 3
238000001020 plasma etching Methods 0.000 description 3
HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
238000004088 simulation Methods 0.000 description 3
239000000126 substance Substances 0.000 description 3
CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
241000826860 Trapezium Species 0.000 description 2
239000003795 chemical substances by application Substances 0.000 description 2
238000004140 cleaning Methods 0.000 description 2
230000002349 favourable effect Effects 0.000 description 2
229920002120 photoresistant polymer Polymers 0.000 description 2
230000009471 action Effects 0.000 description 1
238000004364 calculation method Methods 0.000 description 1
238000004891 communication Methods 0.000 description 1
230000007423 decrease Effects 0.000 description 1
230000003247 decreasing effect Effects 0.000 description 1
230000001419 dependent effect Effects 0.000 description 1
230000005672 electromagnetic field Effects 0.000 description 1
239000000835 fiber Substances 0.000 description 1
239000004922 lacquer Substances 0.000 description 1
239000000203 mixture Substances 0.000 description 1
238000011160 research Methods 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/14—Mode converters

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Optical Integrated Circuits (AREA)

NL1000759A 1995-07-07 1995-07-07 Geïntegreerde optische modus-omzetter. NL1000759C2 (nl)

Priority Applications (6)

Application Number	Priority Date	Filing Date	Title
NL1000759A NL1000759C2 (nl)	1995-07-07	1995-07-07	Geïntegreerde optische modus-omzetter.
EP96201547A EP0753769A3 (de)	1995-07-07	1996-06-03	Integrierter optischer Modenwandler
US08/659,117 US5703977A (en)	1995-07-07	1996-06-04	Integrated optical mode converter
CA002179361A CA2179361A1 (en)	1995-07-07	1996-06-18	Integrated optical mode converter
NO962844A NO962844L (no)	1995-07-07	1996-07-05	Integrert optisk modus-omformer
JP8175312A JP3028288B2 (ja)	1995-07-07	1996-07-05	集積型光モード変換器とその製造方法

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
NL1000759A NL1000759C2 (nl)	1995-07-07	1995-07-07	Geïntegreerde optische modus-omzetter.
NL1000759		1995-07-07

Publications (1)

Publication Number	Publication Date
NL1000759C2 true NL1000759C2 (nl)	1997-01-08

Family

ID=19761287

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL1000759A NL1000759C2 (nl)	1995-07-07	1995-07-07	Geïntegreerde optische modus-omzetter.

Country Status (6)

Country	Link
US (1)	US5703977A (de)
EP (1)	EP0753769A3 (de)
JP (1)	JP3028288B2 (de)
CA (1)	CA2179361A1 (de)
NL (1)	NL1000759C2 (de)
NO (1)	NO962844L (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6400860B1 (en) *	2000-03-21	2002-06-04	Lucent Technologies Inc.	Wavelength selective polarization beam splitter/combiner
US7609918B2 (en) *	2002-05-28	2009-10-27	Optun (Bvi) Ltd.	Method and apparatus for optical mode division multiplexing and demultiplexing
US7321705B2 (en) *	2002-05-28	2008-01-22	Optun (Bvi) Ltd.	Method and device for optical switching and variable optical attenuation
US7218814B2 (en) *	2002-05-28	2007-05-15	Optun (Bvi) Ltd.	Method and apparatus for optical mode conversion
US6804440B2 (en) *	2002-07-26	2004-10-12	Lnl Technologies, Inc.	Integrated mode converter, waveguide, and on-chip function
US20040096136A1 (en) *	2002-11-18	2004-05-20	Harmeet Singh	Integrated polarization rotator
US20100316070A1 (en) *	2007-09-25	2010-12-16	Mikhail Sumetsky	Asymmetrically perturbed optical fibers for mode transformers
WO2009055894A1 (en) *	2007-10-31	2009-05-07	Onechip Photonics Inc.	Enhanced efficiency laterally-coupled distributed feedback laser
US7796656B2 (en) *	2007-11-05	2010-09-14	Onechip Photonics Inc.	Enhanced efficiency laterally-coupled distributed feedback laser
DE102016202634A1 (de) *	2016-02-19	2017-08-24	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Verfahren zum Herstellen eines Polarisationskonverters, Polarisationskonverter und Polarisationskonverterelement
CN109644049B (zh) *	2016-08-29	2022-07-26	日本电信电话株式会社	光传输系统
CN109085702B (zh) *	2018-09-15	2020-09-18	西安奇芯光电科技有限公司	偏振衰减器及偏振衰减方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0513919A1 (de) *	1991-05-16	1992-11-19	Koninklijke KPN N.V.	Modenwandler
US5243669A (en) *	1992-04-07	1993-09-07	At&T Bell Laboratories	Asymmetric, periodically loaded waveguide for polarization rotation
EP0645650A1 (de) *	1993-09-24	1995-03-29	Koninklijke KPN N.V.	Integrierter optischer Polarisationswandler mit erhöhter periodischer Kopplung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL9200328A (nl) *	1992-02-21	1993-09-16	Nederland Ptt	Optische schakelcomponent.
NL9200576A (nl) *	1992-03-27	1993-10-18	Nederland Ptt	Regelbare polarisatie-omvormer.

1995
- 1995-07-07 NL NL1000759A patent/NL1000759C2/nl not_active IP Right Cessation
1996
- 1996-06-03 EP EP96201547A patent/EP0753769A3/de not_active Withdrawn
- 1996-06-04 US US08/659,117 patent/US5703977A/en not_active Expired - Fee Related
- 1996-06-18 CA CA002179361A patent/CA2179361A1/en not_active Abandoned
- 1996-07-05 NO NO962844A patent/NO962844L/no not_active Application Discontinuation
- 1996-07-05 JP JP8175312A patent/JP3028288B2/ja not_active Expired - Fee Related

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0513919A1 (de) *	1991-05-16	1992-11-19	Koninklijke KPN N.V.	Modenwandler
US5243669A (en) *	1992-04-07	1993-09-07	At&T Bell Laboratories	Asymmetric, periodically loaded waveguide for polarization rotation
EP0645650A1 (de) *	1993-09-24	1995-03-29	Koninklijke KPN N.V.	Integrierter optischer Polarisationswandler mit erhöhter periodischer Kopplung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TOL VAN DER J J G M ET AL: "A NEW SHORT AND LOW-LOSS PASSIVE POLARIZATION CONVERTER ON INP", IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 7, no. 1, 1 January 1995 (1995-01-01), pages 32 - 34, XP000488115 *

Also Published As

Publication number	Publication date
EP0753769A3 (de)	1997-01-22
EP0753769A2 (de)	1997-01-15
NO962844D0 (no)	1996-07-05
US5703977A (en)	1997-12-30
NO962844L (no)	1997-01-08
JPH0933743A (ja)	1997-02-07
JP3028288B2 (ja)	2000-04-04
CA2179361A1 (en)	1997-01-08

Legal Events

Date	Code	Title	Description
1997-03-03	PD2B	A search report has been drawn up
1998-11-02	TD	Modifications of names of proprietors of patents	Owner name: KONINKLIJKE KPN N.V.
2005-04-01	VD1	Lapsed due to non-payment of the annual fee	Effective date: 20050201

Publication	Publication Date	Title
NL1000759C2 (nl)	1997-01-08	Geïntegreerde optische modus-omzetter.
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CN1249820A (zh)	2000-04-05	包括至少一个布拉格光栅结构的光波长选择装置
US5640474A (en)	1997-06-17	Easily manufacturable optical self-imaging waveguide
EP1530736B1 (de)	2009-06-24	Integrierter optischer verzweiger mit sich verjüngenden mehrmoden-interferenz wellenleitern
US20090180731A1 (en)	2009-07-16	Photonic coupler
JP2000508083A (ja)	2000-06-27	光回折格子
US20020191885A1 (en)	2002-12-19	Optical component having improved warping symmetry
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US6810176B2 (en)	2004-10-26	Integrated transparent substrate and diffractive optical element
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US6097865A (en)	2000-08-01	Design and method for planar coupled waveguide filter
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WO2002044772A1 (en)	2002-06-06	Integrated optical waveguide device
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